초록 ▼

When a disproportionated chlorosilane is to be produced by causing a starting material chlorosilane liquid to flow through a catalyst-packed layer which is packed with a weakly basic anion exchange resin as a disproportionation reaction catalyst to carry out a disproportionation reaction, before the

When a disproportionated chlorosilane is to be produced by causing a starting material chlorosilane liquid to flow through a catalyst-packed layer which is packed with a weakly basic anion exchange resin as a disproportionation reaction catalyst to carry out a disproportionation reaction, before the disproportionation reaction is carried out, the disproportionation reaction catalyst is brought into contact with a processing gas obtained by diluting a chlorosilane with an inert gas to prevent the deterioration of the disproportionation reaction catalyst at the start of the reaction so as to carry out the disproportionation of the chlorosilane efficiently.

대표청구항 ▼

1. A method of producing a trichloromonosilane, which comprises flowing a starting material chlorosilane liquid comprising dichloromonosilane and silicon tetrachloride through a catalyst-packed layer which is packed with a weakly basic anion exchange resin as a reaction catalyst to react dichloromon

1. A method of producing a trichloromonosilane, which comprises flowing a starting material chlorosilane liquid comprising dichloromonosilane and silicon tetrachloride through a catalyst-packed layer which is packed with a weakly basic anion exchange resin as a reaction catalyst to react dichloromonosilane and silicon tetrachloride to form trichloromonosilane,wherein a step of bringing the reaction catalyst contained in the catalyst-packed layer into contact with a processing gas obtained by diluting a silicon tetrachloride with an inert gas until a temperature rise in the catalyst-packed layer comes to an end and a step of cleaning the reaction catalyst that has been brought into contact with the processing gas by flowing a silicon tetrachloride liquid through the catalyst-packed layer to remove solid matter are carried out before flowing the starting material chlorosilane liquid through the catalyst-packed layer. 2. The production method according to claim 1, wherein the reaction mixture obtained after the reaction is carried out has a higher content of trichlorosilane than the starting material chlorosilane. 3. The production method according to claim 1, wherein solid matter is separated from the silicon tetrachloride liquid after the cleaning step and then the silicon tetrachloride liquid is reused to clean the catalyst-packed layer. 4. A method of producing a trichloromonosilane, which comprises contacting a catalyst-packed layer which is packed with a weakly basic anion exchanger resin as a reaction catalyst for a reaction between dichloromonosilane and silicon tetrachloride with a processing gas obtained by diluting a silicon tetrachloride with an inert gas until a temperature rise in the catalyst-packed layer comes to an end,cleaning the reaction catalyst that has been brought into contact with the processing gas by flowing a silicon tetrachloride liquid to flow through the catalyst packed layer, andafter the cleaning step, flowing a starting material chlorosilane liquid comprising dichloromonosilane and silicon tetrachloride through the catalyst-packed layer to react dichloromonosilane and silicon tetrachloride to form trichloromonosilane. 5. The production method according to claim 1, wherein the starting material chlorosilane liquid further comprises trichloromonosilane. 6. The production method according to claim 4, wherein the starting material chlorosilane liquid further comprises trichloromonosilane.