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특허 상세정보

Dual signal coaxial cavity resonator plasma generation

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) F02P-023/04    F02P-009/00    H01T-013/50    B60K-005/00    H05H-001/46    F02P-003/01    F02P-015/10    H01J-037/32   
출원번호 US-0680734 (2015-04-07)
등록번호 US-9873315 (2018-01-23)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Serra, Wayne M.
인용정보 피인용 횟수 : 1  인용 특허 : 48
초록

A plasma generator comprises a radio frequency power source, a coaxial cavity resonator assembly, and a direct current power source. The radio frequency power source provides a voltage supply of radio frequency power having a first ratio of power over voltage. The resonator assembly includes a center conductor coupled to the radio frequency power source, and also includes a virtual short circuit. The direct current power source is connected to the center conductor at the virtual short circuit, and provides a voltage supply of direct current power having ...

대표
청구항

1. A plasma generator comprising: a source of radio frequency power;a coaxial cavity resonator assembly including a center conductor that is both oriented in a coupling arrangement to the source of radio frequency power and is configured to maintain a voltage null at a first location; anda source of direct current power connected to the center conductor proximal to the first location. 2. The plasma generator of claim 1, further comprising: a radio frequency control component connected between the source of direct current power and the coaxial cavity reso...

이 특허에 인용된 특허 (48)

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이 특허를 인용한 특허 피인용횟수: 1

  1. Ikeda, Yuji; Ohtsubo, Hidekazu. Ignition device. USP20180710036361.