Light-receiving device having avalanche photodiodes of different types
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-031/00
H01L-027/144
H01L-031/107
H01L-031/028
H01L-031/02
H01L-027/146
출원번호
US-0448542
(2017-03-02)
등록번호
US-9899434
(2018-02-20)
우선권정보
JP-2016-165666 (2016-08-26)
발명자
/ 주소
Kokubun, Koichi
출원인 / 주소
Kabushiki Kaisha Toshiba
대리인 / 주소
Patterson & Sheridan, LLP
인용정보
피인용 횟수 :
0인용 특허 :
2
초록▼
A light-receiving device includes a silicon semiconductor substrate, a plurality of first serial connections each of which includes a first avalanche photodiode (APD) and a first resistor connected in series, and a plurality of second serial connections each of which includes a second avalanche phot
A light-receiving device includes a silicon semiconductor substrate, a plurality of first serial connections each of which includes a first avalanche photodiode (APD) and a first resistor connected in series, and a plurality of second serial connections each of which includes a second avalanche photodiode (APD) and a second resistor connected in series. The first APDs and the first resistors are formed on the silicon semiconductor substrate, and the first APDs is formed of silicon. The second APDs and the second resistors are formed on the silicon semiconductor substrate, and the second APDs is formed of a material having a smaller band gap than silicon. The plurality of first and second serial connections is connected in parallel between an anode terminal and a cathode terminal.
대표청구항▼
1. A light-receiving device comprising: a silicon semiconductor substrate;a plurality of first serial connections each of which includes a first avalanche photodiode (APD) and a first resistor connected in series, the first APDs and the first resistors being formed on the silicon semiconductor subst
1. A light-receiving device comprising: a silicon semiconductor substrate;a plurality of first serial connections each of which includes a first avalanche photodiode (APD) and a first resistor connected in series, the first APDs and the first resistors being formed on the silicon semiconductor substrate, and the first APDs being formed of silicon; anda plurality of second serial connections each of which includes a second avalanche photodiode (APD) and a second resistor connected in series, the second APDs and the second resistors being formed on the silicon semiconductor substrate, and the second APDs being formed of a material having a smaller band gap than silicon, whereinthe plurality of first and second serial connections is connected in parallel between an anode terminal and a cathode terminal. 2. The light-receiving device according to claim 1, wherein the first APD and the second APD are alternately arranged in each row along a first surface direction of the silicon semiconductor substrate, andthe first APD and the second APD are alternately arranged in each column arranged along a second surface direction of the silicon semiconductor substrate that crosses the first surface direction. 3. The light-receiving device according to claim 2, wherein each of the first resistors extends in the first surface direction between two APDs adjacent in the second surface direction, andeach of the second resistors extends in the first surface direction between two adjacent APDs adjacent in the second surface direction. 4. The light-receiving device according to claim 3, further comprising: a plurality of wirings, each of which extends in the second surface direction, so as to connect first and second resistors arranged along adjacent two columns to one of the anode and the cathode. 5. The light-receiving device according to claim 1, wherein the first APD and the second APD are alternately arranged in each row along a first surface direction of the silicon semiconductor substrate, andone of the first APDs and the second APDs are arranged in each column along a second surface direction of the silicon semiconductor substrate that crosses the first surface direction. 6. The light-receiving device according to claim 5, wherein each of the first resistors extends in the first surface direction between two APDs adjacent in the second surface direction, andeach of the second resistors extends in the first surface direction between two adjacent APDs adjacent in the second surface direction. 7. The light-receiving device according to claim 6, further comprising: a plurality of wirings, each of which extends in the second surface direction, so as to connect first and second resistors arranged along a same column to one of the anode and the cathode. 8. The light-receiving device according to claim 1, wherein the material of the second APD includes germanium. 9. The light-receiving device according to claim 1, wherein each of the first APDs includes a first epitaxial semiconductor layer of a first conductivity type formed on the silicon semiconductor substrate, and a first semiconductor layer of a second conductivity type formed on the first epitaxial semiconductor layer, andeach of the second APDs includes a second epitaxial semiconductor layer of the first conductivity type formed on the silicon semiconductor substrate, and a second semiconductor layer of the second conductivity type formed on the second epitaxial semiconductor layer. 10. The light-receiving device according to claim 1, wherein the plurality of first serial connections is connected between the anode terminal and the cathode terminal via a first switch, andthe plurality of second serial connections is connected between the anode terminal and the cathode terminal via a second switch. 11. The light-receiving device according to claim 10, further comprising: a control circuit configured to selectively turn on one of the first switch and the second switch. 12. The light-receiving device according to claim 1, wherein the first resistors and the second resistors are formed of a same material. 13. The light-receiving device according to claim 1, wherein the first resistors and the second resistors have a same resistance. 14. A light-receiving device comprising: a silicon semiconductor substrate;a first serial connection including a first avalanche photodiode (APD) and a first resistor connected in series, the first APD and the first resistor being formed on the silicon semiconductor substrate and the first APD being formed of silicon; anda second serial connection including a second avalanche photodiode (APD) and a second resistor connected in series, the second APD and the second resistor being formed on the silicon semiconductor substrate and the second APD being formed of a material having a smaller band gap than silicon, whereinthe first serial connection and the second serial connection are connected in parallel between an anode and a cathode. 15. The light-receiving device according to claim 14, wherein the material of the second APD includes germanium. 16. The light-receiving device according to claim 14, wherein the first APD includes a first epitaxial semiconductor layer of a first conductivity type formed on the silicon semiconductor substrate, and a first semiconductor layer of a second conductivity type formed on the first epitaxial semiconductor layer, andthe second APD includes a second epitaxial semiconductor layer of the first conductivity type formed on the silicon semiconductor substrate, and a second semiconductor layer of the second conductivity type formed on the second epitaxial semiconductor layer. 17. The light-receiving device according to claim 14, wherein the first serial connection is connected between the anode terminal and the cathode terminal via a first switch, andthe second serial connections is connected between the anode terminal and the cathode terminal via a second switch. 18. The light-receiving device according to claim 17, further comprising: a control circuit configured to turn on selectively one of the first switch and the second switch. 19. The light-receiving device according to claim 14, wherein the first resistors and the second resistors are formed of a same material. 20. The light-receiving device according to claim 14, wherein the first resistors and the second resistors have a same resistance.
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