[특허]Method and apparatus for gas flow control

Method and apparatus for gas flow control 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G05D-007/06 F16K-007/16 F16K-007/14 F16K-031/00
출원번호	US-0475472 (2014-09-02)
등록번호	US-9904297 (2018-02-27)
발명자 / 주소	Monkowski, Adam J. Chen, Jialing Ding, Tao Monkowski, Joseph R.
출원인 / 주소	PIVOTAL SYSTEMS CORPORATION
대리인 / 주소	Womble Bond Dickinson (US) LLP
인용정보	피인용 횟수 : 0 인용 특허 : 89

초록 ▼

A method and apparatus for self-calibrating control of gas flow. The gas flow rate is initially set by controlling, to a high degree of precision, the amount of opening of a flow restriction, where the design of the apparatus containing the flow restriction lends itself to achieving high precision. The gas flow rate is then measured by a pressure rate-of-drop upstream of the flow restriction, and the amount of flow restriction opening is adjusted, if need be, to obtain exactly the desired flow.

대표청구항 ▼

1. A system for precision gas delivery, comprising: a flow control valve comprising an actuator setting flow restriction openings by varying the amount of gas flow through the flow control valve and a displacement sensor measuring displacement caused by the actuator in setting the flow restriction openings;a pressure transducer measuring gas pressure upstream of the flow control valve;a temperature sensor measuring gas temperature;a controller receiving signals from the pressure transducer and the temperature sensor and controlling operation of the actuator according to a lookup table that is determined ahead of time by the pressure transducer measuring pressures, the temperature sensor measuring gas temperatures, and the displacement sensor measuring displacements, to provide gas flow rate for a range of values of gas pressures, gas temperatures and flow restriction openings;wherein the flow control valve further comprises:a first body part having a flow restriction surface;a second body part having a complementary flow restriction surface and coupled to the first body part by a flexure bearing, wherein the flow restriction surface and the complementary flow restriction surface cooperate to form a flow restriction valve;a fluid inlet hole formed in one of the first body part or the second both part and providing fluid passage to the flow restriction valve;a fluid outlet hole formed in one of the first body part or the second body part and providing fluid passage from the flow restriction valve;wherein the actuator is installed in the first body and expands or contracts to act on the second body to thereby induce displacement of the second body and causes elastic flexure in the flexure bearing, thereby changing dimension of the flow restriction valve. 2. The system of claim 1, wherein the controller controls amount of flow restriction opening of the flow control valve to a precision of at least 100 nanometers. 3. The system of claim 1, wherein the displacement sensor performs measurement at least once every 100 milliseconds. 4. The system of claim 1, wherein the controller determines the flow rate through the flow control valve by actuating a flow regulator to temporarily interrupting gas flow upstream of the flow control valve and using the pressure transducer to measure the rate of drop in pressure in the conduit. 5. The system of claim 4, wherein the flow regulator comprises a metering valve. 6. The system of claim 1, wherein the displacement sensor measures axial motion between the body part and the second body part and sends a corresponding signal to the controller. 7. A system for precision gas delivery, comprising: a flow control valve;a pressure transducer measuring gas pressure upstream of the flow control valve;a temperature sensor;a controller receiving signals from the pressure transducer and temperature sensor and controlling the operation of the flow control valve according to a lookup table that is determined ahead of time by the pressure transducer measuring gas pressures for a range of values of gas pressure, the temperature sensor measuring gas temperatures, and a displacement sensor measuring displacements, to provide gas flow rate for a range of values of gas pressures, gas temperatures and flow restriction openings;wherein the flow control valve comprises an actuator varying the flow restriction openings to vary the amount of gas flow through the flow control valve; and,the displacement sensor measuring the displacement of the flow control valve and sending a corresponding signal to the controller;wherein the flow control valve comprises:a first body part having a flow restriction surface;a second body part having a complementary flow restriction surface, wherein the flow restriction surface and the complementary flow restriction surface cooperate to form a flow restriction valve;a fluid inlet hole formed in one of the first body part or the second body part and providing fluid passage to the flow restriction valve; a fluid outlet hole formed in one of the first body part or the second body part and providing fluid passage from the flow restriction valve; and,wherein the actuator is installed in the first body and expands or contracts to act on the second body to thereby induce displacement of the second body and causes elastic flexure in the flexure bearing, thereby changing dimension of the flow restriction valve. 8. The system of claim 7, further comprising: a flow regulator positioned upstream of the flow control valve; and,a conduit coupling the flow regulator to the flow control valve. 9. The system of claim 7, wherein the controller controls the amount of flow restriction opening of the flow control valve to a precision of at least 100 nanometers. 10. The system of claim 7, wherein the signal of the displacement sensor is sent out at least once every 100 milliseconds. 11. The system of claim 8, wherein the controller determines the flow rate through the flow control valve by actuating the flow regulator to temporarily interrupting gas flow upstream of the flow control valve and using the pressure transducer to measure the rate of drop in pressure in the conduit. 12. The system of claim 8, wherein the flow regulator comprises a metering valve.

이 특허에 인용된 특허 (89)

Bowman, Ronald R.; Sodal, Ingvar E., Actuator for control valves and related systems.
상세보기
Gagnon, Frederic, Air mass flow controller.
상세보기
Vaughn P. Esham, Animal anchor and tether system.
상세보기
Shajii,Ali; Kottenstette,Nicholas; Ambrosina,Jesse, Apparatus and method for calibration of mass flow controller.
상세보기
Shajii, Ali; Kottenstette, Nicholas; Ambrosina, Jesse; Smith, Donald K.; Clark, William R., Apparatus and method for pressure fluctuation insensitive mass flow control.
상세보기
Shajii, Ali; Kottenstette, Nicholas; Ambrosnia, Jesse, Apparatus and method for pressure fluctuation insensitive mass flow control.
상세보기
Shajii, Ali; Kottenstette, Nicholas; Ambrosina, Jesse; Smith, John A., Apparatus and method for self-calibration of mass flow controller.
상세보기
Ollivier Louis A., Apparatus for delivering process gas for making semiconductors and method of using same.
상세보기
Hinkle Luke D. (Townsend MA), Apparatus for mass flow measurement of a gas.
상세보기
Kurth Guido,DEX, Apparatus for monitoring the valve stroke of an electromagnetically actuated valve.
상세보기
Carpenter, Kent; Dietz, James, Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels.
상세보기
Hirata, Kaoru; Sugita, Katsuyuki; Nishino, Kouji; Dohi, Ryousuke; Ikeda, Nobukazu, Automatic pressure regulator for flow rate regulator.
상세보기
Fujimoto Akihiro,JPX, Coating unit.
상세보기
Shirai Takashi (Miyanohigashi JPX) Iwamoto Michinori (Miyanohigashi JPX) Shimizu Tetsuo (Miyanohigashi JPX) Ohsasa Hiroshi (Miyanohigashi JPX), Control valve.
상세보기
Coakley, Kim; Bessinger, Russell, Direct drive servovalve device with redundant position sensing and methods for making the same.
상세보기
Wilmer Michael E., Dynamic gas flow controller.
상세보기
Nagano, Taku; Ohba, Koichi; Shingu, Yasuyuki; Hirano, Kenichi, Electromagnetic operating device.
상세보기
Zhang, Ming; Madireddi, Sesha C.; Na, Byeongchul, Expansion valve with piezo material.
상세보기
Shajii,Ali; Smith,Daniel Alexander, External volume insensitive flow verification.
상세보기
Morgan,Daniel P.; Thelen,Warner C., Flow control apparatus and method with internally isothermal control volume for flow verification.
상세보기
Louis A. Ollivier, Flow control of process gas in semiconductor manufacturing.
상세보기
Louis A. Ollivier, Flow control of process gas in semiconductor manufacturing.
상세보기
Tanaka, Makoto; Suzuki, Shigehiro, Flow controller and its regulation method.
상세보기
Sato, Akio, Flow rate control valve.
상세보기
Watanabe Yasushi,JPX ; Senda Keiichiro,JPX ; Fujita Hiroshi,JPX ; Hayamizu Naoya,JPX ; Hirabayashi Hideaki,JPX, Flow rate control valve and flow rate control system.
상세보기
Watanabe Yoshiyuki (Fukaya JPX) Watanabe Junichi (Kumagaya JPX) Jomura Shigeru (Tokyo JPX) Someji Takahiro (Fukaya JPX), Flow rated control valve using a high-temperature stacked-type displacement device.
상세보기
Shimizu Tetsuo (Kyoto JPX) Tujimura Kiyoharu (Kyoto JPX) Iwamoto Michinori (Kyoto JPX), Fluid control device.
상세보기
White, William W.; White, William H.; Davis, Christopher B.; Smith, Nelson D., Fluid flow controller and method of operation.
상세보기
Louis A. Ollivier, Fluid pressure regulator with differential pressure setting control.
상세보기
Kokubo, Mitsuhiro, Fuel cell system.
상세보기
Codina George (North Hollywood CA) Oestmann Eldon D. (Morton IL) Shane Gary J. (Edelstein IL), Integral position sensing apparatus for a hydraulic directional valve.
상세보기
Welz ; Jr. Albert W. ; Parker John D. ; Marchetti Brenda J., Intelligent burner control system.
상세보기
Anderson Richard L. (Austin TX), Intelligent mass flow controller.
상세보기
Morgan Daniel P., Load balanced pressure regulator and method and apparatus for delivering process gas for manufacturing semiconductor dev.
상세보기
Steber George R. (Mequon WI) Knutson Dale A. (Nashotah WI), Magnetically assisted piezo-electric valve actuator.
상세보기
Waldbusser Edwin, Mass flow controller having automatic pressure compensator.
상세보기
Barros,Philip R.; Martin,Raul A.; Norman,Russell T.; Melcer,Chris, Method and apparatus for analyzing gas flow in a gas panel.
상세보기
Laragione Robert ; LeMay Dan B. ; Redemann Eric J. ; Upchurch Michael D., Method and apparatus for determining a rate of flow of gas by a rate of change of pressure.
상세보기
Chung, Sherk; Chalmers, James MacAllen; Chen, Jialing; Wang, Yi; Tran, Paul; Shtilman, Sophia Leonidovna; Monkowski, Joseph R., Method and apparatus for enhancing in-situ gas flow measurement performance.
상세보기
Chung, Sherk; Chalmers, James MacAllen; Chen, Jialing; Wang, Yi; Tran, Paul; Shtilman, Sophia Leonidovna; Monkowski, Joseph R., Method and apparatus for enhancing in-situ gas flow measurement performance.
상세보기
Chung, Sherk; Chalmers, James MacAllen; Chen, Jialing; Wang, Yi; Tran, Paul; Shtilman, Sophia Leonidovna; Monkowski, Joseph R., Method and apparatus for enhancing in-situ gas flow measurement performance.
상세보기
Monkowski, Joseph R.; Chen, Jialing; Ding, Tao; Chalmers, James MacAllen, Method and apparatus for in situ testing of gas flow controllers.
상세보기
Monkowski, Joseph R.; Chen, Jialing; Ding, Tao; Chalmers, James MacAllen, Method and apparatus for in situ testing of gas flow controllers.
상세보기
Monkowski, Joseph R.; Chen, Jialing; Ding, Tao; Chalmers, James MacAllen, Method and apparatus for in situ testing of gas flow controllers.
상세보기
Monkowski, Joseph R.; Chen, Jialing; Ding, Tao; MacAllen Chalmers, James, Method and apparatus for in situ testing of gas flow controllers.
상세보기
Kennedy Lyn R. (Dallas TX), Method and apparatus for measuring and controlling volumetric flow rate of gases in a line.
상세보기
Li Long-Jang, Method and apparatus for sensing armature position in direct current solenoid actuators.
상세보기
Tison,Stuart A.; Sukumaran,Sandeep; Barker,James, Method and system for flow measurement and validation of a mass flow controller.
상세보기
Brent H. Larson ; Harry A. Burns ; Larry Keith Brown, Method for detecting broken valve stem.
상세보기
Brown Timothy R., Method for wide range gas flow system with real time flow measurement and correction.
상세보기
Meslif Alain (Saint Martin du Tertre FRX), Method of continuous modulation of a fluid flow rate by means of an electrically controlled sequential valve.
상세보기
Mettner Michael (Ludwigsburg MA DEX) Schmidt Martin A. (Reading MA) Lober Theresa (Newton MA) Huff Michael A. (Medford MA), Method of making a microvalve.
상세보기
Mettner Michael (Ludwigsburg MA DEX) Schmidt Martin A. (Reading MA) Lober Theresa (Newton MA) Huff Michael A. (Medford MA), Method of making a microvalve.
상세보기
Kimbell ; Charles L., Method of testing an analyzer to determine the accuracy thereof and a volumetric primary standard apparatus for doing s.
상세보기
Miller Charles E. ; Wyss Jerry C. ; Balsley ; Jr. Richard B., Micro mass flow control apparatus and method.
상세보기
Scheurenbrand Hans,DEX ; Post Peter,DEX ; Vollmer Herbert,DEX ; Weinmann Michael,DEX, Micro-valve with capacitor plate position detector.
상세보기
Saaski Elric W. ; Lawrence Dale M., Micromachined fluid handling devices.
상세보기
Engelsdorf Kurt (Besigheim DEX) Mettner Michael (Ludwigsburg DEX), Microvalve.
상세보기
Kober Hans-Friedemann,DEX, Microvalve with joined layers of metal parts and process for manufacture of a microvalve.
상세보기
Henderson Richard C., Miniature pulsatile flow controller.
상세보기
Mettner Michael (Ludwigsburg DEX) Schuelke Armin (Schwieberdingen DEX) Doering Christian (Stuttgart DEX) Schittny Thomas (Steinheim-Murr DEX), Multi-layer microvalve having integral closure, membrane and pressure compensating surface forming a middle layer.
상세보기
Blischak, Brian, Multi-stable valves for medical applications and methods for use thereof.
상세보기
Nakazawa Akira (Kyoto JPX) Ohsasa Hiroshi (Miyanohigashi JPX), Normally closed-type fluid control valve.
상세보기
Tai Yu-Chong ; Wang Xuan-Qi, Parylene micro check valve and fabrication method thereof.
상세보기
Eberhardt, Wolfgang; Kück, Heinz; Pein, Carsten; Pöhlau, Frank; Schmid, Andreas; Klump, Stefan; Riedel, Michael; Sestak, Jürgen; Töpfer, Udo; Krämer, Hubert; Maichl, Martin; , Piezoelectric valve.
상세보기
Miyazoe Shinji,JPX ; Ishikawa Makoto,JPX, Piezoelectric valve.
상세보기
Kluge Stefan,DEX, Piezoelectrically actuated microvalve.
상세보기
Gassman George W., Plug and seat positioning system for control applications.
상세보기
Lafler Lawrence R. ; Tanner Douglas J. ; DiEullis Val ; Cottles Vernon M., Position detection for rotary control valves.
상세보기
Juniman Jonathan, Position-determining apparatus.
상세보기
Dahlgren Derek A. (St. Paul MN) Wasson Jeffrey B. (Circle Pines MN), Pre-detent tactile feedback assembly for a fluid control valve.
상세보기
Loan James ; LeFavour John ; Lischer D. Jeffrey ; Sullivan Laura A. ; Planchard David, Pressure-based mass flow controller.
상세보기
Charles C. Hansen, III ; John A. Yencho ; Martin F. Kozi ; Orval J. Kuhn, Jr., Sealed motor driven valve.
상세보기
Byers J. Otto ; Haner Lambert, Servo positioning system.
상세보기
Sterghos Peter M. ; Sodeika John A. ; Cosgrove Patrick J. ; Godsted Jeff ; Kinports Brian D., Swimming pool control system.
상세보기
Fujiwara Masatoshi (Yokosuka JPX) Kuroda Masato (Fujisawa JPX), Switching valve and an electro-pneumatic pressure converter utilizing the same.
상세보기
Sandhu, Gurtej Singh; Sharan, Sujit; Rueger, Neal R.; Mardian, Allen P., System and method for detecting flow in a mass flow controller.
상세보기
Esposito,Sandro; Payne,John Thurman, System and method for fluid regulation.
상세보기
Zarkar, Kaveh; L'Bassi, Michael Frank; Quaratiello, Mark James, System and method for in-situ flow verification and calibration.
상세보기
Chang, Young-Chul, Time based mass flow controller and method for controlling flow rate using it.
상세보기
Monkowski, Joseph R.; Monkowski, Adam J.; Chen, Jialing; Ding, Tao, Transient measurements of mass flow controllers.
상세보기
Mengle, Tobi, True position sensor for diaphragm valves.
상세보기
van Lintel Harald T. G. (Enschede NLX), Two valve micropump with improved outlet.
상세보기
Miller Charles E. ; Yoshida Louis T. ; Steinbach Michael, Valve closure seating method and apparatus.
상세보기
Saito, Yoji, Valve positioner and current-to-pneumatic converter.
상세보기
Seale Joseph B. (Gorham ME), Variable-pulse dynamic fluid flow controller.
상세보기
Gillott Michael A. (Somers CT) Vosseller Kenneth F. (Enfield CT) Sherman Robert (West Hartford CT) Hansen Kenneth P. (Somers CT), Vibration damper.
상세보기
Takahashi Tamami,JPX ; Usami Yuichi,JPX, Water hydraulic proportional control valve.
상세보기
Brown Timothy R. ; Judd Daniel R., Wide range gas flow system with real time flow measurement and correction.
상세보기

IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

연합인증

Method and apparatus for gas flow control 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

이 특허에 인용된 특허 (89)

관련 콘텐츠

특허 원문 보기

IPC 상위 출원인

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트

연합인증

Method and apparatus for gas flow control 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

전체(0) 논문(0) 특허(0) 보고서(0)

전체(0) 논문(0) 특허(0) 보고서(0)

이 특허에 인용된 특허 (89)

관련 콘텐츠

특허 원문 보기

IPC 상위 출원인

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

선택된 텍스트