초록 ▼

An apparatus is described for controlling a flow of a fluid therethrough while the apparatus is connected to a source of control fluid. The apparatus includes an input, a valve seat, a diaphragm, an output, and a diaphragm control space. The diaphragm control space is partially defined by the diaphr

An apparatus is described for controlling a flow of a fluid therethrough while the apparatus is connected to a source of control fluid. The apparatus includes an input, a valve seat, a diaphragm, an output, and a diaphragm control space. The diaphragm control space is partially defined by the diaphragm, and includes a control fluid inlet and a control fluid outlet. The apparatus is operative to independently control a flow of control fluid into the diaphragm control space through the control fluid inlet and a flow of control fluid out of the diaphragm control space through the control fluid outlet. A deflection of the diaphragm in relation to the valve seat is responsive to a pressure of the control fluid in the diaphragm control space. The deflection of the diaphragm in relation to the valve seat is operative to control a fluidic flow resistance between the input and the output.

대표청구항 ▼

1. An apparatus for controlling a flow of a fluid therethrough while the apparatus is connected to a source of control fluid, the apparatus comprising: an input;a valve seat;a diaphragm formed of metal;an output;a diaphragm control space, the diaphragm control space partially defined by the diaphrag

1. An apparatus for controlling a flow of a fluid therethrough while the apparatus is connected to a source of control fluid, the apparatus comprising: an input;a valve seat;a diaphragm formed of metal;an output;a diaphragm control space, the diaphragm control space partially defined by the diaphragm and comprising a control fluid inlet and a control fluid outlet;a control fluid feed valve, the control fluid feed valve operative to regulate the flow of control fluid into the diaphragm control space;a stem, the stem operative to slide towards and away from the diaphragm;a spring, the spring applying a spring bias force against the stem towards the diaphragm; anda stem control space, the stem control space operative to receive control fluid from the source of control fluid;wherein the apparatus is operative to independently control a flow of control fluid into the diaphragm control space through the control fluid inlet and a flow of control fluid out of the diaphragm control space through the control fluid outlet;wherein a deflection of the diaphragm in relation to the valve seat is responsive to a pressure of control fluid in the diaphragm control space;wherein the deflection of the diaphragm in relation to the valve seat is operative to control a fluidic flow resistance between the input and the output;wherein a pressure of control fluid in the stem control space urges the stem in a direction opposite to the spring bias force. 2. The apparatus of claim 1, wherein the stem control space is in serial fluidic communication with the control fluid feed valve, and the control fluid feed valve is in serial fluidic communication with the diaphragm control space. 3. The apparatus of claim 1, wherein the stem passes through a wall of the diaphragm control space. 4. The apparatus of claim 1, wherein the control fluid feed valve comprises a pressure regulator. 5. The apparatus of claim 1, further comprising a control fluid relief valve, the control fluid relief valve operative to regulate the flow of control fluid out of the diaphragm control space. 6. The apparatus of claim 5, wherein the control fluid feed valve comprises a solenoid valve. 7. The apparatus of claim 5, wherein the control fluid relief valve comprises a solenoid valve. 8. The apparatus of claim 5, further comprising a controller, the controller operative to actuate the control fluid feed valve and the control fluid relief valve. 9. The apparatus of claim 8, further comprising a sensor, the sensor in data communication with the controller. 10. The apparatus of claim 9, wherein the sensor is operative to measure at least one of flow and pressure. 11. The apparatus of claim 9, wherein the controller is operative to actuate the control fluid feed valve and the control fluid relief valve at least in part based on data received from the sensor. 12. The apparatus of claim 11, wherein the controller is operative to actuate the control fluid feed valve and the control fluid relief valve at least in part based on data received from the sensor so as to achieve a sensor set point on the sensor. 13. The apparatus of claim 8, wherein the controller is operative to actuate the control fluid feed valve and the control fluid relief valve at least in part based on data received from a sensor, the sensor being distinct from the apparatus and being operative to measure at least one of flow and pressure. 14. The apparatus of claim 1, wherein the valve seat comprises a metal or a polymer. 15. The apparatus of claim 1, wherein the control fluid comprises a gas or a liquid. 16. The apparatus of claim 1, further comprising: an upstream pressure sensor, the upstream pressure sensor operative to measure pressure at a first space in the apparatus;a downstream pressure sensor, the downstream pressures sensor operative to measure pressure at a second space in the apparatus; andan orifice;wherein the second space is in fluidic communication with the first space through the orifice. 17. A method of controlling a flow of a fluid comprising the steps of: providing an input:providing a valve seat;providing a diaphragm formed of metal;providing an output;providing a diaphragm control space, the diaphragm control space partially defined by the diaphragm and comprising a control fluid inlet and a control fluid outlet;providing a control fluid feed valve, the control fluid feed valve operative to regulate the flow of control fluid into the diaphragm control space;providing a stem, the stem operative to slide towards and away from the diaphragm;providing a spring, the spring applying a spring bias force against the stem towards the diaphragm; andproviding a stem control space, the stem control space operative to receive control fluid from a source of control fluid; andindependently controlling a flow of control fluid into the diaphragm control space through the control fluid inlet and a flow of control fluid out of the diaphragm control space through the control fluid outlet;wherein a deflection of the diaphragm in relation to the valve seat is responsive to a pressure of control fluid in the diaphragm control space;wherein the deflection of the diaphragm in relation to the valve seat is operative to control a fluidic flow resistance between the input and the output;wherein a pressure of control fluid in the stem control space urges the stem in a direction opposite to the spring bias force.