[특허]Flow rate range variable type flow rate control apparatus

Flow rate range variable type flow rate control apparatus 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	G05D-007/06 G01F-001/684 G01F-001/36 G01F-005/00 G01F-007/00 G01F-001/40
출원번호	US-0171333 (2016-06-02)
등록번호	US-9921089 (2018-03-20)
우선권정보	JP-2005-185845 (2005-06-27)
발명자 / 주소	Ohmi, Tadahiro Saito, Masahito Hino, Shoichi Shimazu, Tsuyoshi Miura, Kazuyuki Nishino, Kouji Nagase, Masaaki Sugita, Katsuyuki Hirata, Kaoru Dohi, Ryousuke Hirose, Takashi Shinohara, Tsutomu Ikeda, Nobukazu Imai, Tomokazu Yoshida, Toshihide Tanaka, Hisashi
출원인 / 주소	Fujikin Incorporated
대리인 / 주소	Griffin and Szipl PC
인용정보	피인용 횟수 : 0 인용 특허 : 50

초록 ▼

A pressure type flow rate control apparatus is provided wherein flow rate of fluid passing through an orifice is computed as Qc=KP1 (where K is a proportionality constant) or as Qc=KP2m (P1-P2)n (where K is a proportionality constant, m and n constants) by using orifice upstream side pressure P1 and/or orifice downstream side pressure P2. A fluid passage between the downstream side of a control valve and a fluid supply pipe of the pressure type flow rate control apparatus comprises at least 2 fluid passages in parallel, and orifices having different flow rate characteristics are provided for each of these fluid passages, wherein fluid in a small flow quantity area flows to one orifice for flow control of fluid in the small flow quantity area, while fluid in a large flow quantity area flows to the other orifice for flow control of fluid in the large flow quantity area.

대표청구항 ▼

1. A flow rate range variable type flow rate control apparatus comprising: (a) a thermal type mass flow rate control apparatus comprising (i) a flow rate control valve connected to a first fluid passage;(ii) a laminar flow element device part disposed on the first fluid passage; and(iii) a flow rate sensor part, wherein temperature changes in proportion to a mass flow rate of fluid are detected at the flow rate sensor part, and fluid with a predetermined set flow rate is made to flow out by opening or closing the flow rate control valve based on detected temperature of fluid flowing in the first fluid passage; and(b) a second fluid passage bypassing the flow rate sensor part and leading to the flow rate control valve arranged in parallel with the first fluid passage, wherein the second fluid passage is provided with a laminar flow element and a switching valve, wherein fluid flowing in a small flow quantity range is made not to flow to at least one laminar flow element provided to the second fluid passage while fluid flowing in a large flow quantity range is made to flow to the at least one laminar flow element. 2. A flow rate range variable type flow rate control apparatus as claimed in claim 1, wherein two second fluid passages are arranged in parallel, and the corresponding two laminar flow elements include a coarse laminar flow element and a fine laminar flow element, and a control range of fluid flow rate is switched by operating switching valves respectively provided on each second fluid passage. 3. The flow rate range variable type flow rate control apparatus according to claim 1, wherein when fluid is flowing in the large flow quantity range each switching valve in the second fluid passage are made to be open. 4. The flow rate range variable type flow rate control apparatus according to claim 1, wherein, in response to receiving a flow rate setting signal, the thermal type mass flow rate control apparatus is switched to a flow rate setting suitable for a large flow quantity, a medium flow quantity or a small flow quantity setting.

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