초록 ▼

Disclosed herein are systems and methods for cleaning a ceramic article using a stream of solid carbon dioxide (CO2) particles. A method includes flowing liquid CO2 into a spray nozzle, and directing a first stream of solid CO2 particles from the spray nozzle toward a ceramic article for a first tim

Disclosed herein are systems and methods for cleaning a ceramic article using a stream of solid carbon dioxide (CO2) particles. A method includes flowing liquid CO2 into a spray nozzle, and directing a first stream of solid CO2 particles from the spray nozzle toward a ceramic article for a first time duration to clean the ceramic article. The liquid CO2 is converted into the first stream of solid CO2 particles upon exiting the spray nozzle. The first stream of solid CO2 particles causes a layer of solid CO2 to be formed on the ceramic article. After the layer of solid CO2 has sublimated, a second stream of solid CO2 particles is directed from the spray nozzle toward the ceramic article for at least one of the first time duration or a second time duration to further clean the ceramic article.

대표청구항 ▼

1. A method for cleaning a ceramic article, the ceramic article comprising one or more plasma-contacting surfaces and one or more non-plasma-contacting surfaces, wherein, during use of the ceramic article, a plasma contacts the one or more plasma-contacting surfaces without contacting the one or mor

1. A method for cleaning a ceramic article, the ceramic article comprising one or more plasma-contacting surfaces and one or more non-plasma-contacting surfaces, wherein, during use of the ceramic article, a plasma contacts the one or more plasma-contacting surfaces without contacting the one or more non-plasma-contacting surfaces, and wherein the method comprises: flowing liquid CO2 into a spray nozzle;directing a first stream of solid CO2 particles from the spray nozzle toward the ceramic article for a first time duration to clean the ceramic article, wherein the liquid CO2 is converted into the first stream of solid CO2 particles upon exiting the spray nozzle, wherein the one or more plasma-contacting surfaces are contacted by the first stream of solid CO2 particles after the one or more non-plasma-contacting surfaces are contacted by the first stream of solid CO2 particles to reduce particle defects on the one or more plasma-contacting surfaces, and wherein the first time duration is sufficient for the first stream of solid CO2 particles to cause a first layer of solid CO2 to be formed on the ceramic article; andafter the first layer of solid CO2 has sublimated, directing a second stream of solid CO2 particles from the spray nozzle toward the ceramic article for at least one of the first time duration or a second time duration to further clean the ceramic article. 2. The method of claim 1, wherein the second stream of solid CO2 particles causes a second layer of solid CO2 to be formed on the ceramic article, the method further comprising: contacting the article with a cleaning solution after the second layer of solid CO2 has sublimated. 3. The method of claim 1, wherein at least one of the first time duration or the second time duration is between about 2 minutes and about 10 minutes. 4. The method of claim 1, wherein the spray nozzle is maintained at an angle ranging from 15° to 45° with respect to a surface of the ceramic article. 5. The method of claim 1, wherein the spray nozzle is maintained at an angle of approximately 30° with respect to a surface of the ceramic article. 6. The method of claim 1, wherein directing the first stream of solid CO2 particles from the spray nozzle toward the ceramic article comprises: directing the first stream of solid CO2 particles toward a top non-plasma-contacting surface of the ceramic article;subsequently directing the first stream of solid CO2 particles toward a side non-plasma-contacting surface of the ceramic article; andsubsequently directing the first stream of solid CO2 particles toward the one or more plasma-contacting surfaces of the ceramic article. 7. The method of claim 1, wherein the ceramic article is a nozzle, and wherein the one or more non-plasma-contacting surfaces comprise a top surface, a side surface, and a bottom surface, wherein: the top surface comprises a first aperture passing through the ceramic article to the bottom surface, andthe side surface comprises a second aperture passing through the ceramic article,wherein directing the first stream of solid CO2 particles from the spray nozzle toward the plurality of surfaces of the ceramic article comprises: directing the first stream of solid CO2 particles toward the top surface of the ceramic article;subsequently directing the first stream of solid CO2 particles toward the first aperture in a first direction from the top surface to the bottom surface;subsequently directing the first stream of solid CO2 particles toward the side surface of the ceramic article;subsequently directing the first stream of solid CO2 particles toward the second aperture;subsequently directing the first stream of solid CO2 particles toward the bottom surface of the ceramic article; andsubsequently directing the first stream of solid CO2 particles toward the first aperture in a second direction from the bottom surface to the top surface. 8. The method of claim 1, wherein a pressure of the liquid CO2 is between about 700 psi and about 900 psi. 9. The method of claim 1, wherein a pressure of the liquid CO2 is approximately 838 psi. 10. The method of claim 1, wherein a distance from the spray nozzle to the ceramic article is maintained between about 0.5 inches and 2 inches. 11. The method of claim 1, wherein the ceramic article is a chamber component selected from the group consisting of: a lid, a nozzle, a showerhead, and a liner kit. 12. The method of claim 1, wherein the ceramic article comprises at least one of Y3Al5O12, Y4Al2O9, Y2O3, Er2O3, Gd2O3, Er3Al5O12, Gd3Al5O12, YF3, Nd2O3, Er4Al2O9, ErAlO3, Gd4Al2O9, GdAlO3, Nd3Al5O12, Nd4Al2O9, NdAlO3, or a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2. 13. The method of claim 1, wherein a purity of the liquid CO2 is at least 99.9999999%. 14. An apparatus for cleaning a ceramic article, the ceramic article comprising one or more plasma-contacting surfaces and one or more non-plasma-contacting surfaces, wherein, during use of the ceramic article, a plasma contacts the one or more plasma-contacting surfaces without contacting the one or more non-plasma-contacting surfaces, and wherein the apparatus comprises: a mounting fixture;a spray nozzle to generate a stream of solid CO2 particles toward the ceramic article held by the mounting fixture; anda controller, wherein the controller is configured to: direct the stream of solid CO2 particles toward the ceramic article for a first time duration to clean the ceramic article, wherein the one or more plasma-contacting surfaces are contacted by the first stream of solid CO2 particles after the one or more non-plasma-contacting surfaces are contacted by the first stream of solid CO2 particles to reduce particle defects on the one or more plasma-contacting surfaces, and wherein the first time duration is sufficient for the stream of solid CO2 particles to cause a first layer of solid CO2 to be formed on the ceramic article;stop the stream of solid CO2 particles for a second time duration, wherein the first layer of solid CO2 is sublimated during the second time duration; andafter the first layer of solid CO2 has sublimated, direct the stream of solid CO2 particles toward the ceramic article for a third time duration to further clean the ceramic article. 15. The apparatus of claim 14, wherein one or more of the spray nozzle or mounting fixture is arranged to cause the stream of solid CO2 particles to contact a surface of the ceramic article at an angle ranging from 15° to 45° with respect to the surface of the ceramic article. 16. The apparatus of claim 14, wherein at least one of the first duration or the third time duration is between about 2 minutes and about 10 minutes. 17. The apparatus of claim 14, further comprising: a liquid CO2 source fluidly coupled to the spray nozzle, wherein a pressure of liquid CO2 delivered to the spray nozzle is between about 700 psi and about 900 psi. 18. The apparatus of claim 14, wherein the mounting fixture is configured to expose a top non-plasma-contacting surface of the ceramic article to the stream of solid CO2 particles, expose a side non-plasma-contacting surface of the ceramic article to the stream of solid CO2 particles after exposing the top non-plasma-contacting surface, and expose the one or more plasma-contacting surfaces of the ceramic article to the stream of solid CO2 particles after exposing the side non-plasma-contacting surface. 19. The apparatus of claim 14, wherein the ceramic article is a semiconductor chamber component selected from the group consisting of: a lid, a nozzle, a showerhead, and a liner kit.