Thermal property microscopy with frequency domain thermoreflectance and uses thereof
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G01J-005/00
G01N-025/20
G01N-021/17
G01N-021/55
출원번호
US-0511903
(2014-10-10)
등록번호
US-9927350
(2018-03-27)
발명자
/ 주소
Schmidt, Aaron J.
출원인 / 주소
TRUSTEES OF BOSTON UNIVERSITY
대리인 / 주소
Nixon Peabody LLP
인용정보
피인용 횟수 :
0인용 특허 :
6
초록▼
The present invention relates to frequency domain thermoreflectance (FDTR) imaging of a thermophysical property or a set of thermophysical properties of a sample. A method comprises measuring the amplitude and/or phase of a beam of radiation reflected from a sample surface, while a heat source appli
The present invention relates to frequency domain thermoreflectance (FDTR) imaging of a thermophysical property or a set of thermophysical properties of a sample. A method comprises measuring the amplitude and/or phase of a beam of radiation reflected from a sample surface, while a heat source applied to the sample is modulated at at least two modulation frequencies simultaneously. Such measurement can be reiterated as a probe beam is scanned across the sample surface or a portion thereof. A 2D image or map of a thermophysical property or a set of thermophysical properties can be generated from data processing. Also provided herein is an apparatus for performing FDTR imaging.
대표청구항▼
1. A method of performing a frequency domain thermoreflectance measurement, the method comprising: (i) projecting a first beam of radiation onto a sample while a heat source is applied to the sample, wherein the heat source is modulated at a modulation frequency;(ii) measuring reflected radiation fr
1. A method of performing a frequency domain thermoreflectance measurement, the method comprising: (i) projecting a first beam of radiation onto a sample while a heat source is applied to the sample, wherein the heat source is modulated at a modulation frequency;(ii) measuring reflected radiation from the first beam of radiation at at least two modulation frequencies simultaneously, wherein amplitude and/or phase data of the reflected radiation are obtained, and wherein the modulation frequencies are determined from sensitivity of amplitude and/or phase of the reflected radiation to a given thermophysical property;(iii) repeating steps (i) and (ii) at a plurality of spots in the sample; and(iv) producing a two-dimensional (2D) image of at least one thermophysical property of the sample based on the measurements. 2. The method of claim 1, wherein the measurement is at six modulation frequencies simultaneously. 3. The method of claim 1, wherein one modulation frequency is at or near maximum sensitivity to the given thermophysical property. 4. The method of claim 1, wherein the modulation frequencies are spaced to fit a desired set of thermophysical properties using a sensitivity function. 5. The method of claim 1, wherein the modulation frequencies are in the range of 1 kHz to 50 MHz. 6. The method of claim 1, wherein the measurement is done using a lock-in amplifier. 7. The method of claim 1, further comprising moving the sample relative to the first beam of radiation, thereby scanning the first beam of radiation across the sample. 8. The method of claim 1, wherein the thermophysical property is determined through fitting of data obtained from the measurement. 9. The method of claim 1, wherein the thermophysical property is selected from the group consisting of film thickness, density, heat capacity, thermal conductivity, in-plane thermal conductivity, cross-plane thermal conductivity, and thermal interface conductance. 10. The method of claim 1, wherein the 2D image exhibits a maximum spatial resolution of about 200 nm. 11. The method of claim 1, wherein the first beam of radiation is a laser beam. 12. The method of claim 1, comprising producing a 2D image of two or more thermophysical properties of the sample. 13. The method of claim 12, wherein the two or more thermophysical properties are in-plane thermal conductivity and cross-plane thermal conductivity. 14. The method of claim 1, wherein the sample is a bulk sample or a multilayered sample. 15. The method of claim 14, wherein the sample is coated with a layer of metal. 16. The method of claim 1, wherein the heat source is produced by a second beam of radiation projected onto the sample. 17. The method of claim 3, wherein the second beam of radiation is aligned coaxially with the first beam of radiation. 18. The method of claim 16, wherein the second beam of radiation is modulated via a sine wave for each modulation frequency. 19. The method of claim 16, wherein the second beam of radiation is a laser beam. 20. A method of performing a frequency domain thermoreflectance measurement, the method comprising: (i) projecting a first beam of radiation onto a sample while a heat source is applied to the sample, wherein the heat source is modulated at a modulation frequency;(ii) measuring reflected radiation from the first beam of radiation at at least two modulation frequencies simultaneously, wherein amplitude and/or phase data of the reflected radiation are obtained, and wherein the modulation frequencies are spaced to fit a desired set of thermophysical properties using a sensitivity function;(iii) repeating steps (i) and (ii) at a plurality of spots in the sample; and(iv) producing a two-dimentional (2D) image of at least one thermophysical property of the sample based on the measurements.
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