Laser drilling devices are disclosed which include a laser beam source and a laser drilling head. The laser drilling head includes a beam manipulator system in which the only dynamically moving optical element is a mirror. The mirror is dynamically and reciprocally translatable along the direction o
Laser drilling devices are disclosed which include a laser beam source and a laser drilling head. The laser drilling head includes a beam manipulator system in which the only dynamically moving optical element is a mirror. The mirror is dynamically and reciprocally translatable along the direction of the incoming laser beam and is also dynamically and reciprocally tiltable about an axis that is perpendicular to the nominal optical axis of the drilling head. The drilling head also includes a spinnable laser beam rotating system, a simplified compensation system, and a focusing system. The compensation system includes as its only laser beam path shifting optical elements one or two wedge plates which, if two, are fixably rotatable relative to one another in planes which are perpendicular to the nominal optical axis of the laser drilling device.
대표청구항▼
1. A laser drilling device comprising: a) a laser source; andb) a laser drilling head having a nominal optical axis and i) a beam manipulator system having a mirror as its sole dynamically controllable optical element, the mirror being adapted, in response to one or more signals from a control syste
1. A laser drilling device comprising: a) a laser source; andb) a laser drilling head having a nominal optical axis and i) a beam manipulator system having a mirror as its sole dynamically controllable optical element, the mirror being adapted, in response to one or more signals from a control system, to dynamically and reciprocally translate along the path of a laser beam coming from the laser source and to dynamically and reciprocally tilt around a first axis, the first axis being perpendicular to the nominal optical axis,ii) a laser beam rotating system having an image rotation element, the image rotation element being spinnably supported to permit the image rotation element to rotate about the nominal optical axis and, in response to one or more signals from the control system, being adapted to spin about the nominal optical axis at a preselected angular speed;iii) a compensation system comprising a first wedge plate and a second wedge plate as its only laser beam path shifting optical elements, the first wedge plate being spinnably supported to permit the first wedge plate to rotate about the nominal optical axis independently from the second wedge plate, and adapted to rotate synchronously with the image rotation element, andiv) a focusing system comprising a lens;wherein during the operation of the device, the laser beam coming from the laser source passes through the laser drilling head to impinge upon a workpiece at an impingement point, the impingement point at any given instant of time being determined by the position of the mirror, the angular speed of the image rotation element and the first wedge plate, and the lens. 2. The laser drilling device of claim 1, wherein the lens is mounted to dynamically and reciprocally translate along the nominal optical axis. 3. The laser drilling device of claim 1, the second wedge plate being spinnably supported to permit the second wedge plate to rotate about the nominal optical axis independently from the first wedge plate, and adapted to rotate synchronously with the image rotation element. 4. The laser drilling device of claim 3, wherein only one of the first and second wedge plates is rotatably adjustable about the nominal optical axis. 5. The laser drilling device of claim 1, wherein the mirror is also adapted to dynamically and reciprocally tilt about a second axis, the second axis being perpendicular to the first axis. 6. The laser drilling device of claim 1, wherein the image rotation element is one selected from the group consisting of a prism and a mirror arrangement. 7. The laser drilling device of claim 1, wherein the image rotation element is a Dove prism. 8. The laser drilling device of claim 1 further comprising at least one fractional wavelength plate positioned in the laser beam path to adjust the polarity of the laser beam. 9. The laser drilling device of claim 1, wherein the laser beam rotating system is adapted to rotate the laser beam about the nominal optical axis at an angular speed that is greater than 1,000 revolutions per second. 10. The laser drilling device of claim 1, further comprising at least one of an enclosure cabinet and a worktable. 11. A laser drilling head having a nominal optical axis and comprising: i) a beam manipulator system having a mirror as its sole dynamically controllable optical element, the mirror being adapted, in response to one or more signals from a control system, to dynamically and reciprocally translate along the path of a laser beam coming from a laser source and to dynamically and reciprocally tilt around a first axis, the first axis being perpendicular to the nominal optical axis,ii) a laser beam rotating system having an image rotation element, the image rotation element being spinnably supported to permit the image rotation element to rotate about the nominal optical axis and, in response to one or more signals from the control system, being adapted to spin about the nominal optical axis at a preselected angular speed;iii) a compensation system comprising a first wedge plate and a second wedge plate as its only laser beam path shifting optical elements, the first wedge plate being spinnably supported to permit the first wedge plate to rotate about the nominal optical axis independently from the second wedge plate, and adapted to rotate synchronously with the image rotation element, andiv) a focusing system comprising a lens;wherein during the operation of the device, the laser beam coming from the laser source passes through the laser drilling head to impinge upon a workpiece at an impingement point, the impingement point at any given instant of time being determined by the position of the mirror, the angular speed of the image rotation element and the first wedge plate, and the lens. 12. The laser drilling head of claim 11, wherein the lens is mounted to dynamically and reciprocally translate along the nominal optical axis. 13. The laser drilling head of claim 11, the second wedge plate being spinnably supported to permit the second wedge plate to rotate about the nominal optical axis independently from the first wedge plate, and adapted to rotate synchronously with the image rotation element. 14. The laser drilling head of claim 13, wherein only one of the first and second wedge plates is rotatably adjustable about the nominal optical axis. 15. The laser drilling head of claim 11, wherein the mirror is also adapted to dynamically and reciprocally tilt about a second axis, the second axis being perpendicular to the first axis. 16. The laser drilling head of claim 11, wherein the image rotation element is one selected from the group consisting of a prism and a mirror arrangement. 17. The laser drilling head of claim 11, wherein the image rotation element is a Dove prism. 18. The laser drilling head of claim 11 further comprising at least one fractional wavelength plate positioned in the laser beam path to adjust the polarity of the laser beam. 19. The laser drilling head of claim 11, wherein the laser beam rotating system is adapted to rotate the laser beam about the nominal optical axis at an angular speed that is greater than 1,000 revolutions per second. 20. The laser drilling head of claim 11, further comprising at least one of an enclosure cabinet and a worktable.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (35)
Kessler, Ralf; Loesel, Frieder; Sauter, Thomas, Beam steering system for corneal laser surgery.
Akasaka, Akira; Ito, Toshifumi; Takahashi, Kikuo, Laser processing device, processing method, and method of producing circuit substrate using the method.
Corfe Arthur G. (Bristol GB2) Stroud David (Bristol GB2) Towill Jonathan P. W. (Cardiff GB7), Method and apparatus for drilling a shaped hole in a workpiece.
Crawford ; Ian Drummond ; Marshall ; Henry Bruce ; Cormack ; Robert Jo hn, Optical apparatus for controlling the direction of a beam of optical radiation.
Frangineas, George, Optical system having aberrations for transforming a Gaussian laser-beam intensity profile to a quasi-flat-topped intensity profile in a focal region of the optical system.
Naiman Charles S. (160 Lancaster Ter. Brookline MA 02146) Lamson Arthur (16 Middle St. Westnewbury MA 01895), System and assemblage for producing microtexturized substrates and implants.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.