최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
DataON 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Edison 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0050159 (2016-02-22) |
등록번호 | US-9960072 (2018-05-01) |
발명자 / 주소 |
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출원인 / 주소 |
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대리인 / 주소 |
|
인용정보 | 피인용 횟수 : 6 인용 특허 : 614 |
A vertical adjustment assembly is disclosed in order to provide for matching vertical positions of two substrates within separate chambers or cavities of a reaction system for processing of semiconductor substrates. The vertical adjustment assembly, in cooperation with a main lift driver, can provid
A vertical adjustment assembly is disclosed in order to provide for matching vertical positions of two substrates within separate chambers or cavities of a reaction system for processing of semiconductor substrates. The vertical adjustment assembly, in cooperation with a main lift driver, can provide for a more accurate positioning of the substrates to account for a tolerance stack-up error.
1. A system for adjusting a vertical position of a substrate holding assembly, comprising: a reference bar configured to have a fixed position relative to a horizontal bar;a movable tie bar configured to move in a vertical position relative to the reference bar;a first movable block coupled to the m
1. A system for adjusting a vertical position of a substrate holding assembly, comprising: a reference bar configured to have a fixed position relative to a horizontal bar;a movable tie bar configured to move in a vertical position relative to the reference bar;a first movable block coupled to the movable tie bar;a first set of sliding brackets mounted to the first movable block, the first set of sliding brackets configured to hold a bottom plate and a first bellows mounting plate;a first susceptor in a first chamber cavity, the first susceptor connected to the bottom plate and configured to hold a first substrate;a set of rails for guiding movement of the first movable block; anda jacking screw mounted within the reference bar and the movable tie bar, wherein a rotation of the jacking screw causes movements of the moveable tie bar, resulting in movement of the first set of sliding brackets, which in turn results in a vertical movement of the first susceptor, relative to the reference bar. 2. The system of claim 1, wherein the jacking screw raises or lowers the first susceptor to match a position of the first substrate in the first chamber cavity with a position of a second substrate in a second chamber cavity. 3. The system of claim 1, further comprising a lower threaded nut, a thrust bearing race and an upper threaded nut disposed within the reference bar in contact with the jacking screw. 4. The system of claim 1, wherein the rotation of the jacking screw is performed by one of a human operator, a programmable robot, a pneumatic linear actuator, or a pneumatic rotary actuator. 5. The system of claim 1, further comprising a heater mount disposed within the first bellows mounting plate to provide heat to the first susceptor. 6. The system of claim 5, further comprising a set of cooling tubes attached to the first bellows mounting plate and configured to remove heat from the heater mount. 7. The system of claim 1, further comprising a set of micrometers to provide a tripod leveling to the first bellows mounting plate. 8. The system of claim 1, further comprising a set of adjusters to provide an x-y adjustment to the first bellows mounting plate and the bottom plate. 9. The system of claim 1, further comprising a first bellows attached to the first bellows mounting plate, the first bellows configured to envelope a first susceptor rod attached to the first susceptor and configured to expand and contract depending upon a position of the first susceptor. 10. The system of claim 1, further comprising a fixed tie bar connected to the horizontal bar. 11. The system of claim 1, further comprising a main lift assembly configured to move the first susceptor and a second susceptor in a vertical direction.
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