[특허]Methods for producing improved crystallinity group III-nitride crystals from initial group III-nitride seed by ammonothermal growth

Methods for producing improved crystallinity group III-nitride crystals from initial group III-nitride seed by ammonothermal growth 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H01L-029/20 C30B-007/10 C30B-029/40 H01L-021/02
출원번호	US-0192715 (2014-02-27)
등록번호	US-9985102 (2018-05-29)
발명자 / 주소	Letts, Edward Hashimoto, Tadao Ikari, Masanori
출원인 / 주소	SixPoint Materials, Inc.
대리인 / 주소	Strategic Innovation IP Law Offices, P.C.
인용정보	피인용 횟수 : 0 인용 특허 : 42

초록 ▼

The present invention discloses methods to create higher quality group III-nitride wafers that then generate improvements in the crystalline properties of ingots produced by ammonothermal growth from an initial defective seed. By obtaining future seeds from carefully chosen regions of an ingot produced on a bowed seed crystal, future ingot crystalline properties can be improved. Specifically the future seeds are optimized if chosen from an area of relieved stress on a cracked ingot or from a carefully chosen N-polar compressed area. When the seeds are sliced out, miscut of 3-10° helps to improve structural quality of successive growth. Additionally a method is proposed to improve crystal quality by using the ammonothermal method to produce a series of ingots, each using a specifically oriented seed from the previous ingot. When employed, these methods enhance the quality of Group III nitride wafers and thus improve the efficiency of any subsequent device.

대표청구항 ▼

1. A method of growing group III-nitride crystals, comprising: (a) growing a first ingot on a c-facet of a first seed crystal by an ammonothermal method to a thickness greater than 5 mm;(b) slicing the first ingot along an a-plane or a semi-polar plane to form a second seed crystal that contains original material of the first seed crystal;(c) using the second seed crystal to grow a second ingot;(d) slicing the second ingot along an a-plane or a semi-polar plane of the second ingot to form a third seed crystal not containing any of the original material of the first seed crystal;(e) using the third seed crystal to grow a third ingot. 2. The method of claim 1, wherein the first ingot is sliced only along the a-plane. 3. The method of claim 1, wherein the group III-nitride is GaN. 4. The method of claim 1, further comprising slicing the third ingot to produce one or more c-plane wafers. 5. The method of claim 1, wherein bowing of a crystallographic lattice along a slicing direction to create the third seed crystal is improved from bowing of the first seed crystal. 6. The method of claim 1, wherein strain in the third seed crystal is reduced from strain in the first seed crystal. 7. The method of claim 1, wherein crystallinity of the third seed crystal is improved from crystallinity of the first seed crystal. 8. The method of claim 1, wherein the first ingot is sliced only along the semipolar plane. 9. The method of claim 8, wherein the group III-nitride is GaN. 10. The method of claim 8, wherein bowing of a crystallographic lattice along a slicing direction to create the third seed crystal is improved from bowing of the first seed crystal. 11. The method of claim 8, wherein strain in the third seed crystal is reduced from strain in the first seed crystal. 12. The method of claim 8, wherein crystallinity of the third seed crystal is improved from crystallinity of the first seed crystal. 13. The method of claim 1, wherein the second ingot is grown using an ammonothermal method. 14. The method of claim 13, wherein the third ingot is grown using an ammonothermal method. 15. The method of claim 1, wherein the third ingot is grown using an ammonothermal method.

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Methods for producing improved crystallinity group III-nitride crystals from initial group III-nitride seed by ammonothermal growth 원문보기

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