초록 ▼

A fluid dispensing apparatus and method is disclosed. Systems include an in-line or linear bladder apparatus array configured to expand to collect a charge of fluid, and contract to assist with fluid delivery and dispensing. The bladder array is disposed within a chamber of pressure control fluid co

A fluid dispensing apparatus and method is disclosed. Systems include an in-line or linear bladder apparatus array configured to expand to collect a charge of fluid, and contract to assist with fluid delivery and dispensing. The bladder array is disposed within a chamber of pressure control fluid common to exterior surfaces of each bladder in the bladder array. Simultaneously, some bladders within the array of linear bladders can be dispensing fluid or maintaining fluid while some bladders are collecting fluid. A given filtration rate can be less than a dispense rate and thus the system herein compensates for filter-lag that often accompanies fluid filtering for microfabrication, while providing a generally linear configuration that reduces chances for defect creation. With multiple bladders, multiple different types of fluid can be readied for selective dispense.

대표청구항 ▼

1. An apparatus for fluid delivery, the apparatus comprising: a pressurized fluid housing defining a pressure-control chamber, the pressurized fluid housing configured to contain a common pressure-control fluid;a plurality of bladders positioned within the pressure-control chamber, the plurality of

1. An apparatus for fluid delivery, the apparatus comprising: a pressurized fluid housing defining a pressure-control chamber, the pressurized fluid housing configured to contain a common pressure-control fluid;a plurality of bladders positioned within the pressure-control chamber, the plurality of bladders having respective bladder process fluid inlets and bladder process fluid outlets, each respective bladder process fluid inlet connected to a corresponding chamber process fluid inlet of the pressure-control chamber, each respective bladder process fluid outlet connected to a corresponding chamber process fluid outlet of the pressure-control chamber, each bladder defining a linear flow path between a respective bladder process fluid inlet and a corresponding bladder process fluid outlet, each bladder being configured to expand and contract within the pressure-control chamber such that a volume defined by each bladder is changeable, each bladder configured to receive process fluid from a respective pressure-control delivery system configured to controllably adjust fluid pressure of process fluid delivered to each bladder;the pressure-control chamber configured to contain a common pressure-control fluid such that when the pressure-control chamber is filled with the common pressure-control fluid, the common pressure-control fluid is in contact with an exterior surface of each bladder of the plurality of bladders, the pressure-control chamber including a chamber pressure-control mechanism that selectively increases or decreases a fluid pressure of the common pressure-control fluid resulting in an increase or decrease in pressure exerted on exterior surfaces of each bladder; anda controller configured to activate the chamber pressure-control mechanism and selectively increase or decrease the fluid pressure of the pressure-control fluid exerted on each bladder such that the volume defined by each bladder selectively increases or decreases according to process fluid pressure within each bladder. 2. The apparatus of claim 1, further comprising: a bladder expansion constraint configured to physically limit expansion of each bladder to a respective maximum bladder volume. 3. The apparatus of claim 2, wherein the bladder expansion constraint defines one or more openings that permit common pressure-control fluid to travel between each bladder and bladder-facing surfaces of the bladder expansion constraint. 4. The apparatus of claim 2, wherein the bladder expansion constraint defines a surface for contact with an exterior surface of each bladder. 5. The apparatus of claim 4, wherein the pressure-control chamber defines bladder-facing surfaces that surround each bladder and define a bladder expansion shape with sufficient bladder contact surface area to physically restrain bladder expansion. 6. The apparatus of claim 2, wherein the bladder expansion constraint has an elongated shape with a center portion defining a larger cavity diameter as compared to end portions of the bladder expansion constraint. 7. The apparatus of claim 2, wherein the bladder expansion constraint includes bladder sleeves with a respective bladder sleeve positioned around each bladder, each respective bladder sleeve approximately conforming to a shape of a corresponding expanded bladder. 8. The apparatus of claim 2, wherein the bladder expansion constraint is configured with sufficient surface area and rigidity such that after a respective bladder fully contacts the bladder expansion constraint, additional volumetric expansion of the bladder is limited to less than 1 percent of bladder volume at time of full contact with the bladder expansion constraint. 9. The apparatus of claim 1, wherein at least one of the bladders from the plurality of bladders is configured for use as the chamber pressure-control mechanism. 10. The apparatus of claim 1, wherein the controller is configured to selectively expand a first portion of the bladders without expanding a second portion of the bladders. 11. The apparatus of claim 10, wherein the controller is configured to adjust the fluid pressure of the common pressure-control fluid to simultaneously dispense from one or more bladders while accumulating a charge of process fluid in one or more remaining bladders. 12. The apparatus of claim 1, wherein the controller is configured to selectively contract one or more bladders without contracting a second portion of the bladders. 13. The apparatus of claim 1, wherein the controller is configured to selectively control each respective pressure-control delivery system for each bladder. 14. The apparatus of claim 12, wherein the controller is configured to increase the fluid pressure of the pressure-control fluid while simultaneously causing a corresponding increase of process fluid pressure within each bladder of the second portion of bladders via respective pressure-control delivery systems. 15. An apparatus for fluid delivery, the apparatus comprising: a pressurized fluid housing defining a pressure-control chamber, the pressurized fluid housing configured to contain a common pressure-control fluid;a plurality of bladders positioned within the pressure-control chamber, the plurality of bladders having respective bladder process fluid inlets and bladder process fluid outlets, each respective bladder process fluid inlet connected to a corresponding chamber process fluid inlet of the pressure-control chamber, each respective bladder process fluid outlet connected to a corresponding chamber process fluid outlet of the pressure-control chamber, each bladder defining a linear flow path between a respective bladder process fluid inlet and a corresponding bladder process fluid outlet, each bladder being configured to expand and contract within the pressure-control chamber such that a volume defined by each bladder is changeable, each bladder configured to receive process fluid from a respective pressure-control delivery system configured to controllably adjust fluid pressure of process fluid delivered to each bladder;the pressure-control chamber configured to contain a common pressure-control fluid such that when the pressure-control chamber is filled with the common pressure-control fluid, the common pressure-control fluid is in contact with an exterior surface of each bladder of the plurality of bladders, the pressure-control chamber including a chamber pressure-control mechanism that selectively increases or decreases a fluid pressure of the common pressure-control fluid resulting in an increase or decrease in pressure exerted on exterior surfaces of each bladder;a bladder expansion constraint configured to physically limit expansion of each bladder to a respective maximum bladder volume, the bladder expansion constraint defining one or more openings that permit common pressure-control fluid to travel between each bladder and bladder-facing surfaces of the bladder expansion constraint; anda controller configured to activate the chamber pressure-control mechanism and selectively increase or decrease the fluid pressure of the pressure-control fluid exerted on each bladder such that the volume defined by each bladder selectively increases or decreases according to process fluid pressure within each bladder.