A breather assembly mounted to the purge port of a substrate carrier for coupling with a tool port. In various embodiments, the breather assembly comprises a grommet that presents either a planar or a concave mounting face for coupling to the tool port. In one embodiment, the grommet is of a “solid
A breather assembly mounted to the purge port of a substrate carrier for coupling with a tool port. In various embodiments, the breather assembly comprises a grommet that presents either a planar or a concave mounting face for coupling to the tool port. In one embodiment, the grommet is of a “solid compliant” construction, wherein the mounting face complies with the mouth of the tool port without substantially changing shape. In other embodiments, the grommet is of a “flexible compliant” construction, wherein the grommet changes shape when engaged with the tool port. The grommet can be configured so that the force (pressure-area product) exerted in the direction towards the tool port is greater than the force exerted in the direction away from the tool port, thereby enhancing the seal between the grommet and the tool port.
대표청구항▼
1. A substrate container that defines an interior chamber, the substrate container comprising: a port for passage of a purge gas into or out of said interior chamber; a breather assembly disposed in said port, said breather assembly including:a body; anda grommet disposed in said body, said grommet
1. A substrate container that defines an interior chamber, the substrate container comprising: a port for passage of a purge gas into or out of said interior chamber; a breather assembly disposed in said port, said breather assembly including:a body; anda grommet disposed in said body, said grommet including a tubular portion and an annular disk portion, said tubular portion having an inner diameter at a distal end, said annular disk portion extending radially inward from said tubular portion and being proximate said distal end of said tubular portion, said annular disk portion defining a central aperture having an inner diameter, said inner diameter of said aperture being less than said inner diameter of said distal end of said tubular portion, said annular disk portion presenting a distal face of said grommet,wherein said distal face of said grommet presents one of a planar geometry and a concave geometry, said distal face being adapted to contact a tool port that has an inner diameter that is greater than said inner diameter of said aperture and less than said inner diameter of said distal end of said tubular portion, said annular disk portion of said grommet being of a compliant material for formation of a seal between said tool port and said distal face of said grommet. 2. The substrate container of claim 1, further comprising a check valve disposed in said grommet. 3. The substrate container of claim 2, wherein said grommet further comprises an interior ledge portion for registration of said check valve to separate said check valve from said annular disk portion. 4. The substrate container of claim 1, wherein said grommet is a flexible compliant grommet. 5. The substrate container of claim 4, wherein said compliant material has a shore D hardness greater than or equal to 20 and less than or equal to 40. 6. The substrate container of claim 1, wherein said grommet is a solid compliant grommet with a shore A hardness greater than or equal to 40 and less than or equal to 70. 7. The substrate container of claim 1, wherein: said body includes an interior surface and structure defining an undercut on said interior surface; andsaid grommet includes one of a rib and a lip dimensioned and positioned to mate with said undercut when said grommet is disposed in said body. 8. The substrate container of claim 1, wherein said tubular portion of said grommet comprises a bellows. 9. The substrate container of claim 1, wherein said tubular portion and said annular disk portion are an integrally formed component. 10. A breather assembly for a substrate container, comprising: a support structure adapted for insertion into a purge port of a substrate container, said support structure defining an inner diameter; andan annular disk coupled with said support structure proximate said inner diameter, said annular disk including a proximal face and a distal face and including structure that defines a central aperture having a diameter,wherein said distal face of said annular disk presents one of a planar geometry and a concave geometry, said distal face being adapted to contact a tool pOrt that has an inner diameter that is greater than said diameter of said aperture and less than said inner diameter of said support structure, said annular disk comprising a compliant material for formation of a seal between said tool port and said distal face of said grommet. 11. The breather assembly of claim 10, wherein said support structure and said annular disk are an integrally formed component. 12. The breather assembly of claim 10, wherein said annular disk is a solid compliant structure. 13. The breather assembly of claim 10, wherein said annular disk is an overmolded component. 14. The breather assembly of claim 10, wherein said support structure includes a tubular portion, said tubular portion having an inner diameter at a distal end, said annular disk extending radially inward and being proximate said distal end of said tubular portion, said inner diameter of said distal end of said tubular portion being greater than said diameter of said central aperture. 15. The breather assembly of claim 14, wherein said tubular portion includes an interior ledge portion proximate said distal end of said tubular portion. 16. The breather assembly of claim 14, wherein said tubular portion comprises a resilient material. 17. The breather assembly of claim 14, further comprising a check valve disposed in said tubular portion of said support structure. 18. The breather assembly of claim 17, wherein said check valve is disposed in a check valve housing, said check valve housing being disposed in said tubular portion of said support structure. 19. A substrate container that defines an interior chamber, the substrate container comprising: a purge port for passage of a purge gas into or out of said interior chamber;a breather assembly disposed at said purge port, said breather assembly including:a grommet secured at said purge port by a body, said grommet comprising an annular disk portion, said annular disk portion extending radially inward and defusing a central aperture having an inner diameter, said annular disk portion anchored at said purge port radially outward from said central aperture and presenting a distal face of said annular disk portion,wherein said distal face of said annular disk portion presents one of a planar geometry and a concave geometry, said distal face for contacting a tool port that has a diameter that is greater than said inner diameter of said aperture and less than where said annular disk portion is anchored, said annular disk portion being of a compliant material and deflectable inwardly for formation of a seal between said tool port and said distal face of said annular disk portion, anda check valve positioned inwardly of the annular disk portion at the purge port. 20. A method for purging the substrate container of claim 19, said method comprising: providing a tool port for supply of a purge gas, said tool port including a mouth; providing the substrate container of claim 19 having the purge port, said purge port including the annular disk portion suspended therein, said annular disk portion being concentric about a central axis and adapted to engage said mouth of said tool port; translating said substrate carrier in a first direction that is parallel to said central axis, thereby bringing said annular disk portion into an initial contact with said mouth of said tool port; and causing said annular disk portion to stretch over said mouth of said tool port as said annular disk portion is further translated in said first direction beyond said initial contact.
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이 특허에 인용된 특허 (12)
Fosnight William J. ; Bonora Anthony C. ; Martin Raymond S. ; Tatro Jay, Evacuation-driven SMIF pod purge system.
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