Method for treating graphene sheets for large-scale transfer using free-float method
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
C23C-016/26
C23C-016/01
C23C-016/56
C23F-001/18
출원번호
US-0099464
(2016-04-14)
등록번호
US-10017852
(2018-07-10)
발명자
/ 주소
Heise, Scott E.
Bedworth, Peter V.
Swett, Jacob L.
Sinton, Steven W.
출원인 / 주소
Lockheed Martin Corporation
대리인 / 주소
Foley & Lardner LLP
인용정보
피인용 횟수 :
2인용 특허 :
233
초록▼
A method for transferring a graphene sheet from a copper substrate to a functional substrate includes forming the graphene sheet on the copper substrate using chemical vapor deposition, and irradiating the graphene sheet disposed on the copper substrate with a plurality of xenon ions using broad bea
A method for transferring a graphene sheet from a copper substrate to a functional substrate includes forming the graphene sheet on the copper substrate using chemical vapor deposition, and irradiating the graphene sheet disposed on the copper substrate with a plurality of xenon ions using broad beam irradiation to form a prepared graphene sheet. The prepared graphene sheet is resistant to forming unintentional defects induced during transfer of the prepared graphene sheet to the functional substrate. The method further includes removing the copper substrate from the prepared graphene sheet using an etchant bath, floating the prepared graphene sheet in a floating bath, submerging the functional substrate in the floating bath, and decreasing a fluid level of the floating bath to lower the prepared graphene sheet onto the functional substrate.
대표청구항▼
1. A method for transferring a graphene sheet from a copper substrate to a functional substrate comprising: forming the graphene sheet on the copper substrate using chemical vapor deposition;irradiating the graphene sheet formed on the copper substrate with a plurality of xenon ions using broad beam
1. A method for transferring a graphene sheet from a copper substrate to a functional substrate comprising: forming the graphene sheet on the copper substrate using chemical vapor deposition;irradiating the graphene sheet formed on the copper substrate with a plurality of xenon ions using broad beam irradiation to form a prepared graphene sheet;removing the copper substrate from the prepared graphene sheet using an etchant bath;floating the prepared graphene sheet in a floating bath;submerging the functional substrate in the floating bath; anddecreasing a fluid level of the floating bath to lower the prepared graphene sheet onto the functional substrate. 2. The method of claim 1, wherein the graphene sheet comprises an area of 1 cm2 or larger. 3. The method of claim 1, wherein the broad beam irradiation is collimated. 4. The method of claim 1, wherein the plurality of xenon ions is applied at a voltage in a range of about 100 V to about 1500 V. 5. The method of claim 1, wherein the plurality of xenon ions is applied at a voltage in a range of about 250 V to about 750 V. 6. The method of claim 1, wherein the plurality of xenon ions is applied at a voltage of about 500 V. 7. The method of claim 1, further comprising heating the graphene sheet formed on the copper substrate to a temperature ranging from about 50° C. to about 100° C. 8. The method of claim 1, further comprising heating the graphene sheet disposed on the copper substrate to a temperature of about 80° C. 9. The method of claim 1, wherein the plurality of xenon ions is provided at a flux of about 6.24×1011 Xe−1/cm2/s to about 6.24×1014 Xe+/cm2/s. 10. The method of claim 1, wherein the plurality of xenon ions is provided at a flux of about 6.24×1012 Xe+/cm2/s to about 6.24×1013 Xe+/cm2/s. 11. The method of claim 1, wherein the plurality of xenon ions is provided at a flux of about 3.75×1013 Xe+/cm2/s. 12. The method of claim 1, wherein the graphene sheet formed on the copper substrate is irradiated with the plurality of xenon ions for a contact time resulting in a total fluence of about 6.24×1012 Xe+/cm2 to about 2.5×1013 Xe+/cm2. 13. The method of claim 1, wherein the graphene sheet formed on the copper substrate is irradiated with the plurality of xenon ions for a contact time resulting in a total fluence of about 1.25×1013 Xe+/cm2. 14. A method for transferring a graphene sheet from a copper substrate to a functional substrate comprising: forming the graphene sheet on the copper substrate using chemical vapor deposition;irradiating the graphene sheet formed on the copper substrate with a plurality of neon ions using broad beam irradiation to form a prepared graphene sheet;removing the copper substrate from the prepared graphene sheet using an etchant bath;floating the prepared graphene sheet in a floating bath;submerging the functional substrate in the floating bath; anddecreasing a fluid level of the floating bath to lower the prepared graphene sheet onto the functional substrate. 15. The method of claim 14, further comprising heating the graphene sheet formed on the copper substrate to a temperature of about 50° C. to about 100° C. 16. The method of claim 14, wherein the graphene sheet formed on the copper substrate is irradiated with the plurality of neon ions for a contact time resulting in a total fluence of about 6.24×1012 ions/cm2 to about 7.5×1013 ions/cm2. 17. The method of claim 14, wherein the graphene sheet formed on the copper substrate is irradiated with the plurality of neon ions for a contact time resulting in a total fluence of up to 2×1014 ions/cm2. 18. A method for transferring a graphene sheet from a growth substrate to a functional substrate comprising: forming the graphene sheet on the growth substrate;irradiating the graphene sheet formed on the growth substrate with a plurality of ions to form a prepared graphene sheet;removing the growth substrate from the prepared graphene sheet using an etchant bath;floating the prepared graphene sheet in a floating bath;submerging the functional substrate in the floating bath; anddecreasing a fluid level of the floating bath to lower the prepared graphene sheet onto the functional substrate. 19. The method of claim 18, wherein the graphene sheet comprises an area of 1 cm2 or larger. 20. The method of claim 18, wherein the growth substrate is a copper substrate. 21. The method of claim 18, wherein the growth substrate is a nickel substrate. 22. The method of claim 20, wherein the graphene sheet is formed on the copper substrate using chemical vapor deposition. 23. The method of claim 21, wherein the graphene sheet is formed on the nickel substrate using chemical vapor deposition. 24. The method of claim 18, wherein the plurality of ions comprises noble gas ions. 25. The method of claim 24, wherein the noble gas ions comprise xenon ions. 26. The method of claim 24, wherein the noble gas ions comprise neon ions. 27. The method of claim 24, wherein the noble gas ions comprise argon ions. 28. The method of claim 18, wherein the plurality of ions is applied to the graphene sheet formed on the growth substrate using broad beam irradiation. 29. The method of claim 28, wherein the broad beam irradiation is collimated. 30. The method of claim 18, wherein the plurality of ions is applied to the graphene sheet formed on the growth substrate at a voltage of about 100 V to about 1500 V. 31. The method of claim 18, wherein the plurality of ions is applied at a flux of about 1 nA/mm2 to about 1000 nA/mm2. 32. The method of claim 18, wherein the plurality of ions is applied at a flux of about 10 nA/mm2 to about 100 nA/mm2. 33. The method of claim 18, wherein the plurality of ions is applied at a flux of about 40 nA/mm2 to about 80 nA/mm2. 34. The method of claim 18, wherein the plurality of ions is applied at a flux of about 60 nAs/mm2. 35. The method of claim 18, wherein the graphene sheet formed on the growth substrate is irradiated with the plurality of ions for a contact time resulting in a total fluence of about 10 nAs/mm2 to about 120 nAs/mm2. 36. The method of claim 18, wherein the graphene sheet formed on the growth substrate is irradiated with the plurality of ions for a contact time resulting in a total fluence of about 10 nAs/mm2 to about 40 nAs/mm2. 37. The method of claim 18, wherein the graphene sheet formed on the growth substrate is irradiated with the plurality of ions for a contact time resulting in a total fluence of about 20 nAs/mm2.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (233)
Light Nicholas D. (Doune GBX) MacGregor James (Glasgow GBX) Harvey Wilson (Gargunnock GBX) Watt Paul W. (Broomridge GBX), Absorbable structures for ligament and tendon repair.
Peyman Gholam A. (New Orleans LA) Yang Dachuan (New Orleans LA) Khoobehi Bahram (New Orleans LA), Biodegradable porous device for long-term drug delivery with constant rate release and method of making the same.
LaSalle David L. (Woonsocket RI) Flynn Timothy M. (Norton MA) Caldarise Salvatore (Hanson MA) Manginelli Richard P. (Milton MA), Bone prostheses with direct cast macrotextured surface regions and method for manufacturing the same.
LaSalle David L. ; Flynn Timothy M. ; Caldarise Salvatore ; Manginelli Richard P., Bone prostheses with direct cast macrotextured surface regions and method for manufacturing the same.
Caldarise Salvatore ; Besemer John W. ; Ritchie Allan,GBX ; Foley Frank R.,GBX, Bone prosthesis with protected coating for penetrating bone intergrowth.
Clarke Robert A (Libertyville IL) Pauley Robin G. (Ingleside IL) Hill Ronald S. (Grayslake IL) Brauker James H. (Harvard IL) Sternberg Shmuel (Northbrook IL) Boggs Daniel R. (Libertyville IL), Closed porous chambers for implanting tissue in a host.
Baetge Edward E. (Barrington RI) Hammang Joseph P. (Barrington RI) Gentile Frank T. (Warwick RI) Lindner Mark D. (Bristol RI) Winn Shelley R. (Smithfield RI) Emerich Dwaine F. (Providence RI), Delivery of biologically active molecules using cells contained in biocompatible immunoisolatory capsules.
Fendya Thomas J. (Homer NY) Hurwitz Mark F. (Ithaca NY) Musto Edward M. (Homer NY) Miller John D. (Ithaca NY) Ryan ; Jr. John E. (Cortland NY), Dynamic filter system.
Kaschmitter James L. (Pleasanton CA) Tran Tri D. (Livermore CA) Feikert John H. (Livermore CA) Mayer Steven T. (San Leandro CA), Fabricating solid carbon porous electrodes from powders.
Kahlbaugh Brad E. (Roseville MN) Reinhart Susan B. (Minneapolis MN) Dudrey Denis J. (Bloomington MN) Herman John T. (Dellwood MN), Filtration arrangement and method.
Pugh, Randall B.; Flitsch, Frederick A.; Otts, Daniel B.; Riall, James D.; Toner, Adam, Full rings for a functionalized layer insert of an ophthalmic lens.
Frewin, Christopher Leroy; Saddow, Stephen E.; Coletti, Camilla, Graphene electrodes on a planar cubic silicon carbide (3C-SiC) long term implantable neuronal prosthetic device.
Baker, Richard W.; Pinnau, Ingo; He, Zhenjie; Amo, Karl D.; Da Costa, Andre R.; Daniels, Ramin, Hydrogen gas separation using organic-vapor-resistant membranes.
Caldarise Salvatore (Hanson MA) Manginelli Richard P. (Milton MA) LaSalle David L. (Woonsocket RI) Flynn Timothy M. (Norton MA), Implantable articles with as-cast macrotextured surface regions and method of manufacturing same.
Caldarise Salvatore (Hanson MA) Manginelli Richard P. (Milton MA) LaSalle David L. (Woonsocket RI) Flynn Timothy M. (Norton MA), Implantable articles with as-cast macrotextured surface regions and method of manufacturing the same.
Caldarise Salvatore ; Manginelli Richard P. ; LaSalle David L. ; Flynn Timothy M., Implantable articles with as-cast macrotextured surface regions and method of manufacturing the same.
Dionne Keith E. ; Emerich Dwaine F. ; Hoffman Diane ; Sanberg Paul R. ; Christenson Lisa ; Hegre Orion D. ; Scharp David W. ; Lacy Paul E. ; Aebischer Patrick,CHX ; Vasconcellos Alfred V. ; Lysaght M, Implantable biocompatible immunoisolatory vehicle for delivery of selected therapeutic products.
Chen, Guorong; Zhamu, Aruna; Wang, Xiging; Jang, Bor Z.; Wang, Yanbo; Fang, Qing, Lithium-ion cell having a high-capacity anode and a high-capacity cathode.
Buchman, Alisa; Payne, Raymond G.; Mendes, David G.; Sibony, Simha; Bryant, Robert G., Medical implants made of wear-resistant, high-performance polyimides, process of making same and medical use of same.
Tran Tri D. ; Farmer Joseph C. ; Murguia Laura, Method and apparatus for capacitive deionization and electrochemical purification and regeneration of electrodes.
Pugh, Randall B.; Otts, Daniel B.; Riall, James Daniel; Snook, Sharika; Putt, Karson S.; Kernick, Edward R.; Flitsch, Frederick A.; Higham, Camille, Method and apparatus for encapsulating a rigid insert in a contact lens for correcting vision in astigmatic patients.
Kaali Steven (88 Ashford Ave. Dobbs Ferry NY 10522) Schwolsky Peter M. (20 Haslet Ave. Princeton NJ 08540), Method and system for treatment of blood and/or other body fluids and/or synthetic fluids using combined filter elements.
Caldwell, Joshua D.; Hobart, Karl D.; Anderson, Travis; Kub, Francis J., Method for the reduction of graphene film thickness and the removal and transfer of epitaxial graphene films from SiC substrates.
Pugh, Randall B.; Flitsch, Frederick A.; Otts, Daniel B.; Riall, James Daniel; Toner, Adam, Method of forming a functionalized insert with segmented ring layers for an ophthalmic lens.
Light Nicholas D. (Doune GBX) McGregor James (Bishopbriggs GBX) Harvey Wilson (Gargunnock GBX) Watt Paul W. (Broomridge GBX), Method of making absorbable structures for ligament and tendon repair.
Pugh, Randall B.; Flitsch, Frederick A.; Otts, Daniel B.; Riall, James Daniel; Toner, Adam, Methods and apparatus for an ophthalmic lens with functional insert layers.
Pugh, Randall Braxton; Higham, Camille A., Methods of using and smartphone event notification utilizing an energizable ophthalmic lens with a smartphone event indicator mechanism.
Pugh, Randall B.; Flitsch, Frederick A.; Otts, Daniel B.; Riall, James Daniel; Toner, Adam, Multiple energization elements in stacked integrated component devices.
Yang, Seung Yun; Hahn, Sei Kwang; Kim, Jin Kon; Yang, Jung-A, Nanoporous membrane, process of fabricating the same and device for controlled release of biopharmaceuticals comprising the same.
Pugh, Randall Braxton; Otts, Daniel B.; Flitsch, Frederick A.; Toner, Adam; Humphreys, Scott Robert, Ophthalmic lens assembly having an integrated antenna structure.
Pugh, Randall B.; Flitsch, Frederick A.; Otts, Daniel B.; Riall, James Daniel; Toner, Adam, Ophthalmic lens with segmented ring layers in a functionalized insert.
McKnight, Timothy E.; Melechko, Anatoli V.; Griffin, Guy D.; Guillorn, Michael A.; Merkulov, Vladimir L.; Simpson, Michael L., Parallel macromolecular delivery and biochemical/electrochemical interface to cells employing nanostructures.
Matthews Frank D. ; Caldarise Salvatore, Precision powder injection molded implant with preferentially leached texture surface and method of manufacture.
Fedor Robert J. (Westlake OH) Peckham Peter (Concord OH) Young Sharon K. (Tucson AZ) Eamon Michael A. (Tucson AZ) Wright Roger N. (Rexford NY) Kohut Stephen J. (Chandler AZ) Hasegawa Craig J. (Willou, Process for making wire.
Lambino,Danilo; Loh,Christine; Estanislao,Roderico; Khaiat,Alain, Product for treating the skin comprising a polyamine microcapsule wall and a skin lightening agent.
Lih-Ren Shiue TW; Chia-Chann Shiue TW; S-Yen Wang TW; Fei-Chen Hsieh TW; Chin-Hui Lee TW; Wan-Ting Lo TW; Yu-His Hsieh TW, Replaceable flow-through capacitors for removing charged species from liquids.
Pitkänen, Juha-Pekka; Hokkanen, Ari; Heimala, Päivi; Kauhaniemi, Jari; Kolari, Kai; Savolahti, Pekka; Uusitalo, Jaana, Sample port, multi-layer filter, sampling method, and use of a sample port in sampling.
Barr James P. ; Alary Marc,CAX ; Brisebois Henri,CAX ; Lefebvre Paul,DEX ; Dupressoir Anita,CAX, Sanitary absorbent article with an adhesive positioning system covered by release strips linked to one another and meth.
Dimitrakopoulos, Christos D.; Grill, Alfred; McArdle, Timothy J., Semiconductor structure and circuit including ordered arrangement of graphene nanoribbons, and methods of forming same.
Sinton, Steven W.; Bedworth, Peter V.; Moloney, Padraig; Swett, Jacob L., Separation membranes formed from perforated graphene and methods for use thereof.
Spinelli Harry J. (Wilington DE) Anton Waifong L. (Claymont DE) Coleman Henry D. (Brooklyn NY), Silicone-containing acrylic star polymers, block copolymers and macromonomers.
Seidner Leonard (Brooklyn NY) Spinelli Harry J. (Wilington DE) Ali Mohammed I. (Aberdeen NJ) Weintraub Lester (Mount Laurel NJ), Silicone-containing contact lens polymers, oxygen permeable contact lenses and methods for making these lenses and treat.
Seidner Leonard (Brooklyn NY) Spinelli Harry J. (Wilington DE) Ali Mohammed I. (Aberdeen NJ) Weintraub Lester (Mount Laurel NJ), Silicone-containing contact lens polymers, oxygen permeable contact lenses and methods for making these lenses and treat.
Anton Waifong L. (Claymont DE) Coleman Henry D. (Brooklyn NY) Ali Mohammed I. (Aberdeen NJ) Weintraub Lester (Mount Laurel NJ), Silicone-containing polymers, compositions and improved oxygen permeable hydrophilic contact lenses.
Spinelli Harry J. (Wilmington DE) Anton Waifong L. (Claymont DE) Seidner Leonard (Brooklyn NY) Coleman Henry D. (Brooklyn NY) Ali Mohammed I. (Aberdeen NJ) Weintraub Lester (Mount Laurel NJ) White Pa, Silicone-containing polymers, oxygen permeable hydrophilic contact lenses and methods for making these lenses and treati.
Kim, Taesung; Hong, Byung Hee; Choi, Jaeboong; Kulkarni, Atul; Kim, Hyeong Keun, Surface plasmon resonance sensor using metallic graphene, preparing method of the same, and surface plasmon resonance sensor system.
Jue-Chen Liu ; Jonas C. T. Wang ; Mohammed Yusuf ; Norihiro Yamamoto JP; Satoshi Kazama JP; Christopher R. Stahl ; Jean P. Holland ; Kamran Mather ; Margaret A. Aleles ; Sachio Hamada GB; C, Topical compositions.
Liu Jue-Chen ; Wang Jonas C. T. ; Yusuf Mohammed ; Yamamoto Norihiro,JPX ; Kazama Satoshi,JPX ; Stahl Christopher R. ; Holland Jean P. ; Mather Kamran ; Aleles Margaret A. ; Hamada Sachio,FRX ; Cole , Topical compositions.
Liu Jue-Chen ; Wang Jonas C. T. ; Yusuf Mohammed ; Yamamoto Norihiro,JPX ; Kazama Satoshi,JPX ; Stahl Christopher R. ; Holland Jean P. ; Mather Kamran ; Aleles Margaret A. ; Hamada Sachio,FRX ; Cole , Topical oil-in-water emulsions containing retinoids.
Bedell, Stephen W.; Dimitrakopoulos, Christos D.; Fogel, Keith E.; Hannon, James B.; Kim, Jeehwan; Park, Hongsik; Pfeiffer, Dirk; Sadana, Devendra K., Wafer scale epitaxial graphene transfer.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.