Processing of thin film organic ferroelectric materials using pulsed electromagnetic radiation
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G11C-011/22
C09D-127/16
H01G-004/002
H05K-001/03
H01L-041/04
H01L-027/11507(2017.01)
H01L-027/1159
C09D-005/24
출원번호
US-0315503
(2015-05-19)
등록번호
US-10035922
(2018-07-31)
국제출원번호
PCT/US2015/031522
(2015-05-19)
국제공개번호
WO2015/191254
(2015-12-17)
발명자
/ 주소
Almadhoun, Mahmoud N.
Odeh, Ihab N.
Khan, Mohd Adnan
출원인 / 주소
SABIC Global Technologies B.V.
대리인 / 주소
Norton Rose Fulbright US LLP
인용정보
피인용 횟수 :
0인용 특허 :
2
초록▼
Disclosed is a method for producing a polymeric ferroelectric material. The method can include (a) obtaining a polymeric ferroelectric precursor material, and (b) subjecting the polymeric ferroelectric precursor material to pulsed electromagnetic radiation sufficient to form a polymeric ferroelectri
Disclosed is a method for producing a polymeric ferroelectric material. The method can include (a) obtaining a polymeric ferroelectric precursor material, and (b) subjecting the polymeric ferroelectric precursor material to pulsed electromagnetic radiation sufficient to form a polymeric ferroelectric material having ferroelectric hysteresis properties, wherein the polymeric ferroelectric precursor material, prior to step (b), has not previously been subjected to a thermal treatment for more than 55 minutes.
대표청구항▼
1. A method for producing a polymeric ferroelectric material, the method comprising the steps of: (a) obtaining a polymeric ferroelectric precursor material; and(b) subjecting the polymeric ferroelectric precursor material to pulsed ultraviolet radiation sufficient to form the polymeric ferroelectri
1. A method for producing a polymeric ferroelectric material, the method comprising the steps of: (a) obtaining a polymeric ferroelectric precursor material; and(b) subjecting the polymeric ferroelectric precursor material to pulsed ultraviolet radiation sufficient to form the polymeric ferroelectric material having ferroelectric hysteresis properties,wherein the polymeric ferroelectric precursor material, prior to step (b), has not previously been subjected to a thermal treatment for more than 55 minutes;wherein steps (a) and (b) are performed in a roll-to-roll process, and the method further comprises:(i) obtaining a substrate uncoiled from a roll;(ii) disposing a back electrode onto at least a portion of a surface of the substrate;(iii) disposing the polymeric ferroelectric precursor material onto at least a portion of a surface of the back electrode such that the ferroelectric precursor material comprises a first surface and an opposing second surface that is in contact with the back electrode;(iv) subjecting at least a portion of the first surface to pulsed ultraviolet radiation sufficient to form the polymeric ferroelectric material having ferroelectric hysteresis properties, wherein the polymeric ferroelectric precursor material, prior to step (iv), has not previously been subjected to a thermal treatment for more than 55 minutes, more than 30 minutes, more than 5 minutes, or has not previously been subjected to the thermal treatment; and(v) disposing a front electrode onto at least a portion of the first surface of the ferroelectric material having the ferroelectric hysteresis properties. 2. The method of claim 1, wherein the pulse length is 25 μs to 10,000 μs. 3. The method of claim 1, wherein step (a) further comprises disposing the polymeric ferroelectric precursor material onto a substrate such that the polymeric ferroelectric precursor material has a first surface and an opposing second surface, wherein the second surface is in contact with the substrate surface. 4. The method of claim 1, wherein the polymeric ferroelectric precursor material in step (a) comprises a ferroelectric polymer. 5. The method of claim 4, wherein the ferroelectric polymer is a polyvinylidene fluoride (PVDF)-based polymer or a blend comprising a PVDF-based polymer. 6. The method of claim 5, wherein the PVDF-based polymer is PVDF, a poly(vinylidene fluoride-tetrafluoroethylene) (P(VDF-TrFE)), or a poly(vinylidene-fluoride-co-hexafluoropropene) (P(VDF-HFP)), poly(vinylidene fluoride-co-chlorotrifluoro ethylene) (PVDF-CTFE), poly(vinylidene fluoride-co-chlorofluoroethylene) (PVDF-CFE), poly(vinylidene fluoride-co-chlorodifluoroethylene) (PVDF-CDFE), poly(vinylidene fluoride-co-trifluoroethylene-co-chlorofluoroethylene) (PVDF-TrFE-CFE), poly(vinylidene fluoride-co-trifluoroethylene-co-chlorotrifluoroethylene) (PVDF-TrFE-CTFE), poly(vinylidene fluoride-co-trifluoroethylene-co-hexafluoropropylene) (PVDF-TrFE-HFP), poly(vinylidene fluoride-co-trifluoroethylene-co-chlorodifluoroethylene) (PVDF-TrFE-CDFE), poly(vinylidene fluoride-co-tetrafluoroethylene-co-chlorofluoroethylene) (PVDF-TFE-CFE), poly(vinylidene fluoride-co-tetrafluoroethylene-co-chlorotrifluoroethylene) (PVDF-TFE-CTFE), poly(vinylidene fluoride-co-tetrafluoroethylene-co-hexafluoropropylene) (PVDF-TFE-HFP), and poly(vinylidene fluoride-co-tetrafluoroethylene-co-chlorodifluoroethylene) (PVDF-TFE-CD FE), or a polymeric blend thereof. 7. The method of claim 1, wherein no curing agent is used or contained in the polymeric ferroelectric precursor material in step (a). 8. The method of claim 1, wherein the polymeric ferroelectric precursor material, prior to step (b), has not previously been subjected to a thermal treatment for more than 30 minutes. 9. The method of claim 1, wherein the polymeric ferroelectric precursor material, prior to step (b), has not been subjected to a thermal treatment for more than 5 minutes. 10. The method of claim 1, wherein the polymeric ferroelectric precursor material comprises a ferroelectric polymer and an inorganic material. 11. The method of claim 1, further comprising subjecting the polymeric ferroelectric precursor material to an electric field. 12. A ferroelectric capacitor or thin film transistor comprising the ferroelectric material having ferroelectric hysteresis properties produced from the method of claim 1, wherein the ferroelectric capacitor or thin film transistor includes a first conductive material and a second conductive material, wherein at least a portion of the ferroelectric material is disposed between at least a portion of the first conductive material and at least a portion of the second conductive material. 13. A printed circuit board comprising the ferroelectric material produced by the method of claim 1. 14. An integrated circuit comprising the ferroelectric material produced by the method of claim 1. 15. An electronic device comprising the ferroelectric material produced by the method of claim 1. 16. A method of decoupling a circuit from a power supply with any one of the ferroelectric capacitors or thin film transistors comprising the ferroelectric material having ferroelectric hysteresis properties produced from the method of claim 1, the method comprising disposing the ferroelectric capacitor or thin film transistor between a power voltage line and a ground voltage line, wherein the ferroelectric capacitor or thin film transistor is coupled to the power voltage line and to the ground voltage line, wherein a reduction in power noise generated by the power voltage and the ground voltage is achieved, and wherein the ferroelectric capacitor or thin film transistor includes a first conductive material and a second conductive material, wherein at least a portion of the ferroelectric material is disposed between at least a portion of the first conductive material and at least a portion of the second conductive material. 17. A method for operating an energy storage circuit comprising any one of the ferroelectric capacitors or thin film transistors comprising the polymeric ferroelectric material made by the method of claim 1, which provides electrical power to a consuming device when electrical power from a primary source is unavailable, said method comprising: (a) defining a target energy level for the ferroelectric capacitor or thin film transistor;(b) charging the ferroelectric capacitor or thin film transistor;(c) measuring a first amount of energy that is stored in the ferroelectric capacitor or thin film transistor during charging;(d) terminating charging of the ferroelectric capacitor or thin film transistor when the first amount of energy stored in the capacitor or thin film transistor reaches the target energy level; and(e) discharging the capacitor or thin film transistor into the consuming device when electrical power from the primary source becomes unavailable, and wherein the ferroelectric capacitor or thin film transistor includes a first conductive material and a second conductive material, wherein at least a portion of the ferroelectric material is disposed between at least a portion of the first conductive material and at least a portion of the second conductive material. 18. A method for operating a piezoelectric sensor, a piezoelectric transducer, or a piezoelectric actuator using any one of the ferroelectric capacitors or thin film transistors comprising the ferroelectric material having ferroelectric hysteresis properties produced from the method of claim 1, wherein the ferroelectric capacitor or thin film transistor includes a first conductive material and a second conductive material, wherein at least a portion of the ferroelectric material is disposed between at least a portion of the first conductive material and at least a portion of the second conductive material. 19. A method for reading and restoring data to a nonvolatile memory cell comprising a ferroelectric capacitor or a thin film transistor comprising a polymeric ferroelectric material made by: (a) obtaining a polymeric ferroelectric precursor material; and(b) subjecting the polymeric ferroelectric precursor material to pulsed ultraviolet radiation sufficient to form the polymeric ferroelectric material, the polymeric ferroelectric material having ferroelectric hysteresis properties,wherein the polymeric ferroelectric precursor material, prior to step (b), has not previously been subjected to a thermal treatment for more than 55 minutes,wherein the ferroelectric capacitor the thin film transistor includes a first conductive material and a second conductive material, andwherein at least a portion of the polymeric ferroelectric material is disposed between at least a portion of the first conductive material and at least a portion of the second conductive material, the method comprising:(i) applying a voltage to the ferroelectric capacitor or the thin film transistor;(ii) increasing the voltage by a predetermined amount;(iii) detecting a charge signal that results from increasing the voltage, wherein the charge signal having at least a certain minimum amplitude indicates a change in a previously set polarization state representing a first binary logic level; and(iv) restoring said previously set polarization state in the ferroelectric capacitor or the thin film transistor when the polarization state has been changed, by altering a polarity of the voltage applied to the ferroelectric capacitor or the thin film transistor. 20. A method for writing to a nonvolatile memory cell comprising a ferroelectric capacitor or a thin film transistor comprising a polymeric ferroelectric material made by: (a) obtaining a polymeric ferroelectric precursor material; and(b) subjecting the polymeric ferroelectric precursor material to pulsed ultraviolet radiation sufficient to form the polymeric ferroelectric material, the polymeric ferroelectric material having ferroelectric hysteresis properties,wherein the polymeric ferroelectric precursor material, prior to step (b), has not previously been subjected to a thermal treatment for more than 55 minutes,wherein the ferroelectric capacitor or the thin film transistor includes a first conductive material and a second conductive material, wherein at least a portion of the polymeric ferroelectric material is disposed between at least a portion of the first conductive material and at least a portion of the second conductive material, the method comprising:(i) applying a voltage to the ferroelectric capacitor or the thin film transistor;(ii) increasing said voltage by a predetermined amount;(iii) detecting a charge signal that results from increasing said voltage, wherein a charge signal having at least a certain minimum amplitude indicates a change to a second polarization state representing a second binary logic level;(iv) maintaining said second polarization state if said nonvolatile memory cell represents said second binary logic level; and(v) restoring to a first polarization state representing a first binary logic level when the nonvolatile memory cell represents a first binary logic level, by altering a polarity of the voltage applied to the ferroelectric capacitor or the thin film transistor.
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이 특허에 인용된 특허 (2)
Ma Tso-Ping ; Han Jin-Ping, Ferroelectric dynamic random access memory.
Schroder, Kurt A.; Martin, Karl M.; Jackson, Doug K.; McCool, Steven C., Method and apparatus for curing thin films on low-temperature substrates at high speeds.
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