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Ultrasonic device, probe, electronic device, and ultrasonic imaging apparatus 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B06B-001/06
  • G01S-007/52
  • H01L-041/08
  • G01S-015/89
  • A61B-008/00
출원번호 US-0495145 (2014-09-24)
등록번호 US-10042044 (2018-08-07)
우선권정보 JP-2013-203478 (2013-09-30)
발명자 / 주소
  • Kiyose, Kanechika
  • Matsuda, Hiroshi
  • Nakanishi, Daisuke
출원인 / 주소
  • Seiko Epson Corporation
인용정보 피인용 횟수 : 0  인용 특허 : 74

초록

An ultrasonic device includes a base in which a base layer of a vibrating film is formed in every opening that is disposed in an array; an interconnect layer, which is a conductor, formed on the base layer; an insulating film that is formed on the interconnect layer, and forms a laminated structure

대표청구항

1. An ultrasonic device comprising: a base which defines a plurality of openings disposed in an array, and in which a base layer is formed and arranged respectively corresponding to each one of the openings;an interconnect layer which is a conductor, and is formed on the base layer in a thickness di

이 특허에 인용된 특허 (74)

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