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Power switching system for ESC with array of thermal control elements

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/67
  • H01L-021/66
  • H01L-021/683
출원번호 US-0690745 (2012-11-30)
등록번호 US-10049948 (2018-08-14)
발명자 / 주소
  • Gaff, Keith William
  • Anderson, Tom
  • Comendant, Keith
  • Lu, Ralph Jan-Pin
  • Robertson, Paul
  • Pape, Eric A.
  • Benjamin, Neil
출원인 / 주소
  • LAM RESEARCH CORPORATION
인용정보 피인용 횟수 : 1  인용 특허 : 61

초록

A semiconductor substrate support for supporting a semiconductor substrate in a plasma processing chamber includes a heater array comprising thermal control elements operable to tune a spatial temperature profile on the semiconductor substrate, the thermal control elements defining heater zones each

대표청구항

1. A semiconductor substrate support for supporting a semiconductor substrate in a plasma processing chamber, comprising: a heater array comprising thermal control elements operable to tune a spatial temperature profile on the semiconductor substrate, the thermal control elements configured to be po

이 특허에 인용된 특허 (61)

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이 특허를 인용한 특허 (1)

  1. R��mer,Hildegard; Leister,Michael; Kolberg,Uwe; Mennemann,Karl; R��ke,Guido; Sch��fer,Ernest Walter; N��ttgens,Sybill; Ohmstede,Volker, Method and device for melting glass using an induction-heated crucible with cooled crust.
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