Multi-layer extraordinary optical transmission filter systems, devices, and methods
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01L-027/146
G02B-005/28
G02B-026/00
출원번호
US-0949734
(2015-11-23)
등록번호
US-10050075
(2018-08-14)
발명자
/ 주소
Creazzo, Timothy
Zablocki, Mathew
출원인 / 주소
LUMILANT, INC.
대리인 / 주소
Muir Patent Law, PLLC
인용정보
피인용 횟수 :
0인용 특허 :
11
초록▼
Systems, devices, and methods for an extraordinary optical transmission (EOT) image capture system comprising optical components to capture light corresponding to an object, an EOT filter device to receive the captured light and transmit wavelengths of interest, and an image sensor to receive the wa
Systems, devices, and methods for an extraordinary optical transmission (EOT) image capture system comprising optical components to capture light corresponding to an object, an EOT filter device to receive the captured light and transmit wavelengths of interest, and an image sensor to receive the wavelengths of interest and capture an image corresponding to the object. The EOT filter device comprising a first EOT film with thickness TEOT1 and including upper and lower surfaces and a plurality of apertures having a pitch P1, a second EOT film with thickness TEOT2 and including upper and lower surfaces and a plurality of apertures having a pitch P2; and an optical cavity disposed between the first and second EOT films, the optical cavity having a thickness TOC and a refractive index RIOC, wherein the EOT filter device transmits wavelengths of interest based on thicknesses TEOT1 and TEOT2, pitches P1 and P2, and thickness TOC.
대표청구항▼
1. An extraordinary optical transmission (EOT) image capture system comprising: one or more lenses configured to capture light corresponding to an object;an EOT filter device configured to receive the light captured by the one or more lenses, the EOT filter device comprising: a first EOT film having
1. An extraordinary optical transmission (EOT) image capture system comprising: one or more lenses configured to capture light corresponding to an object;an EOT filter device configured to receive the light captured by the one or more lenses, the EOT filter device comprising: a first EOT film having a first EOT film thickness TEOT1, the first EOT film including: a first upper surface,a first lower surface, anda plurality of first apertures having a first pitch P1 and a first aperture width;a second EOT film having a second EOT film thickness TEOT2, the second EOT film including: a second upper surface,a second lower surface, anda plurality of second apertures having a second pitch P2 and a second aperture width; andan optical cavity disposed between the first EOT film and the second EOT film, the optical cavity having a thickness TOC, which is measured from the first lower surface to the second upper surface,wherein the EOT filter device uses surface plasmon resonance to allow wavelengths of interest to pass through based on the first EOT film thickness TEOT1, the second EOT film thickness TEOT2, the first pitch P1, the second pitch P2, the first aperture width, and the second aperture width; andan image sensor configured to capture an image corresponding to the object based on the wavelengths of interest received from the EOT filter device,wherein the optical cavity is configured to cause destructive interference of a first portion of the light transmitted through the first EOT film, the first portion of the light having a first frequency bandwidth, so that only a part of the first portion of the light is transmitted through the second EOT film, the part of the first portion of the light transmitted through the second EOT film having a second frequency bandwidth within and less than the first frequency bandwidth. 2. The EOT filter device of claim 1, the optical cavity further having a refractive index RIOC, wherein an optical path length of light through the optical cavity is a function of the optical cavity thickness TOC and the refractive index RIOC. 3. The EOT filter device of claim 2, further comprising: a plurality of actuators, wherein the plurality of actuators are configured to change the wavelengths of interest by changing the optical path length of the light. 4. The EOT filter device of claim 3, wherein the plurality of actuators change the wavelengths of interest by changing the optical cavity thickness TOC. 5. The EOT filter device of claim 4, wherein the optical cavity thickness TOC is measured from the first lower surface to the second upper surface. 6. The EOT image capture system of claim 1, further comprising: a first buffer layer formed between the first EOT film and the optical cavity; anda second buffer layer formed between the second EOT film and the optical cavity. 7. The EOT image capture system of claim 6, wherein the first EOT film and the second EOT film are comprised of a semiconductor. 8. The EOT image capture system of claim 1, wherein the first EOT film and the second EOT film are comprised of a metal. 9. The EOT image capture system of claim 1, wherein the first EOT film is configured to transmit via extraordinary optical transmission a portion of the light received from the one or more lenses that falls within a first frequency bandwidth and substantially prevent transmission of a second portion of the light received from the one or more lenses that falls outside the first frequency bandwidth. 10. The EOT image capture system of claim 1, wherein the wavelengths of interest comprise a first wavelength of interest,where each of the plurality of apertures have a width smaller than the first wavelength, andwherein the thickness TOC of the optical cavity is an integer multiple of one half of the first wavelength of interest within the optical cavity. 11. The EOT image capture system of claim 10, wherein the first pitch P1 is less than the first wavelength of interest. 12. The EOT image capture system of claim 10, wherein the second pitch P2 is less than the first wavelength of interest. 13. The EOT image capture system of claim 1, wherein the wavelengths of interest comprise a first wavelength of interest and the optical cavity is configured to cause constructive interference of light having the first wavelength of interest. 14. An extraordinary optical transmission (EOT) imaging system comprising: one or more lenses;an EOT filter device configured to receive light from the one or more lenses, the EOT filter device comprising: a first EOT film having a first EOT film thickness TEOT1, the first EOT film including: a first upper surface,a first lower surface, anda plurality of first apertures having a first aperture width smaller than wavelengths of the light received from the one or more lenses, the first apertures spaced at a first pitch P1 such that the first EOT film is configured to transmit via extraordinary optical transmission a first portion of the light received from the one or more lenses that falls within a first frequency bandwidth and substantially prevent transmission of a second portion of the light received from the one or more lenses that falls outside the first frequency bandwidth;a second EOT film having a second EOT film thickness TEOT2, the second EOT film including: a second upper surface,a second lower surface, anda plurality of second apertures having a second aperture width smaller than the wavelengths of the light received from the one or more lenses, the second apertures spaced at a second pitch P2, andwherein the first and second EOT films form an optical cavity having a thickness TOC, which is measured from the first lower surface to the second upper surface, and a refractive index RIOC, wherein an optical path length of light through the optical cavity is a function of the optical cavity thickness TOC and the refractive index RIOC,wherein the optical cavity is configured to cause destructive interference of the first portion of the light transmitted through the first EOT film so that only a part of the first portion of the light is transmitted through the second EOT film, the part of the first portion of the light transmitted through the second EOT film having a second frequency bandwidth within and less than the first frequency bandwidth; andan image sensor configured to receive and sense the part of the first portion of the light transmitted through the second EOT film to capture an image corresponding to the light received from the one or more lenses. 15. The EOT imaging system of claim 14, wherein the first frequency bandwidth and the second frequency bandwidth comprises a first targeted frequency associated with a first targeted wavelength of light,where each of the plurality of apertures have a width smaller than the first targeted wavelength, andwherein the thickness TOC of the optical cavity is an integer multiple of one half of the first targeted wavelength the light within the optical cavity. 16. The EOT imaging system of claim 15, wherein the first pitch P1 is less than the first targeted wavelength. 17. The EOT imaging system of claim 14, wherein the optical cavity is configured to cause constructive interference of light having a first frequency within the second frequency bandwidth. 18. An extraordinary optical transmission (EOT) image capture system comprising: optical components configured to capture wavelengths of light corresponding to an object;an EOT filter device configured to receive the light captured by the optical components and transmit wavelengths of interest, the EOT filter device comprising: a first EOT film having a first EOT film thickness TEOT1 and including a plurality of first apertures having a first pitch P1;a second EOT film having a second EOT film thickness TEOT2 and including a plurality of second apertures having a second pitch P2; andan optical cavity disposed between the first EOT film and the second EOT film, the optical cavity having a thickness TOC and a refractive index RIOC, wherein an optical path length of light through the optical cavity is a function of the optical cavity thickness TOC and the refractive index RIOC,wherein the EOT filter device is configured to transmit the wavelengths of interest based on the first EOT film thickness TEOT1, the second EOT film thickness TEOT2, the first pitch P1, the second pitch P2, and the optical cavity thickness TOC; andan image sensor configured to receive the wavelengths of interest from the EOT filter device and capture an image corresponding to the object,wherein the first EOT film is configured to transmit via extraordinary optical transmission a first portion of the light received from the optical components that falls within a first frequency bandwidth and substantially prevent transmission of a second portion of the light received from the optical components that falls outside the first frequency bandwidth, andwherein the optical cavity is configured to cause destructive interference of the first portion of the light transmitted through the first EOT film so that only a part of the first portion of the light is transmitted through the second EOT film, and the part of the first portion of light transmitted through the second EOT film has a frequency bandwidth within and less than the first frequency bandwidth. 19. The EOT image capture system of claim 18, wherein the plurality of first apertures have a first aperture width, and the first pitch P1 and the first aperture width are smaller than the wavelengths of the light received from the optical components. 20. The EOT image capture system of claim 18, wherein the image sensor is further configured to receive and sense the part of the first portion of light transmitted through the second EOT film to capture an image corresponding to the object. 21. The EOT image capture system of claim 18, wherein the first EOT film further comprises a first upper surface and a first lower surface, the second EOT film further comprises a second upper surface and a second lower surface, and the optical cavity thickness TOC is measured from the first lower surface to the second upper surface. 22. The EOT image capture system of claim 18, further comprising: a first buffer layer formed between the first EOT film and the optical cavity; anda second buffer layer formed between the second EOT film and the optical cavity. 23. The EOT image capture system of claim 22, wherein the first EOT film and the second EOT film are comprised of a semiconductor. 24. The EOT image capture system of claim 18, wherein the first EOT film and the second EOT film are comprised of a metal. 25. The EOT image capture system of claim 18, wherein the optical components include one or more lenses. 26. The EOT image capture system of claim 18, wherein the wavelengths of interest comprise a first wavelength of interest,where each of the plurality of apertures have a width smaller than the first wavelength of interest, andwherein the thickness TOC of the optical cavity is an integer multiple of one half of the first wavelength of interest within the optical cavity. 27. The EOT image capture system of claim 26, wherein the first pitch P1 is less than the first wavelength of interest. 28. The EOT image capture system of claim 26, wherein the second pitch P2 is less than the first wavelength of interest. 29. The EOT image capture system of claim 18, wherein the wavelengths of interest comprise a first wavelength of interest and the optical cavity is configured to cause constructive interference of light having the first wavelength of interest.
Ebbesen Thomas W. ; Grupp Daniel E. ; Thio Tineke ; Lezec Henri J.,FRX, Enhanced optical transmission apparatus utilizing metal films having apertures and periodic surface topography.
Kim Tae Jin ; Thio Tineke ; Ebbesen Thomas Wren, Optical transmission control apparatus utilizing metal films perforated with subwavelength-diameter holes.
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