최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
DataON 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Edison 바로가기다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
Kafe 바로가기국가/구분 | United States(US) Patent 등록 |
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국제특허분류(IPC7판) |
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출원번호 | US-0260834 (2016-09-09) |
등록번호 | US-10054959 (2018-08-21) |
발명자 / 주소 |
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출원인 / 주소 |
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대리인 / 주소 |
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인용정보 | 피인용 횟수 : 0 인용 특허 : 329 |
A device that includes a flow controller system that comprises one or more sensors, a flow measurement sensor that comprises one or more sensors. The flow measurement sensor is configured to generate a signal based on determine the difference between the flow as measured by the flow controller syste
A device that includes a flow controller system that comprises one or more sensors, a flow measurement sensor that comprises one or more sensors. The flow measurement sensor is configured to generate a signal based on determine the difference between the flow as measured by the flow controller system and the flow measurement system in real time.
1. A device, comprising: a primary sensor and a secondary sensor located along a flow path within a flow device; the primary sensor and the second sensor configured to generate a signal that is indicative of a flow rate of material through the flow path;an alternate sensor located on a bypass path o
1. A device, comprising: a primary sensor and a secondary sensor located along a flow path within a flow device; the primary sensor and the second sensor configured to generate a signal that is indicative of a flow rate of material through the flow path;an alternate sensor located on a bypass path of the flow path within a flow device; the alternate sensor configured to generate a signal that is indicative of the flow rate of material shunted through the bypass path and to return the material back to the flow path;an outside sensor located outside the flow device to measure the flow of material received from the flow device; andthe flow device configured to compare a signal from the outside sensor with the signal from the primary or secondary or alternate sensor to determine that at least one of the primary or secondary or alternate sensor is malfunctioning. 2. The device of claim 1, wherein the flow device is configured to generate at least one signal based on a difference in flow rate between an actual flow rate determined by the outside sensor and the signal generated by the primary or the secondary sensor. 3. The device of claim 2, wherein the flow device is configured to generate an alarm signal that the actual flow rate and the indicated flow rate are out of preset parameter boundary. 4. The device of claim 1, wherein the secondary sensor is a temperature sensor that is configured to measure a change in temperature of the material flowing through the flow path. 5. The device of claim 4, wherein the primary sensor is a pressure sensor that is configured to measure a change in pressure of the material flowing through the flow path. 6. A method for controlling a mass flow controller, comprising: generating signals that are indicative of a flow rate of material through the flow path using a primary sensor and a secondary sensor;shunting of a portion of the material through a bypass path;generating signals that are indicative of the flow rate of material through the bypass path of the flow path using an alternate sensor;returning the portion of the material back to the flow path;measuring the flow of material received from the flow path using an outside sensor; andcomparing a signal from the outside sensor with the signal from the primary or secondary sensor anddetermining that at least one of the primary or secondary sensors is malfunctioning. 7. The method of claim 6, further comprising, generating at least one signal based on a difference in flow rates between an actual flow rate determined by the outside sensor and the signal generated by the primary or the secondary sensor. 8. The method of claim 6, further comprising, generating by the mass flow controller, an alarm signal that the actual flow rate and the indicated flow rates are out of preset parameter boundary. 9. The method of claim 6, wherein the secondary sensor is a temperature sensor that is measuring a change in temperature of the material flowing through the flow path. 10. The method of claim 6, wherein the primary sensor is a pressure sensor that is measuring a change in pressure of the material flowing through the flow path. 11. An apparatus, comprising: a primary sensor means and a secondary sensor means for generating a signal that is indicative of a flow rate of material through the flow path;an alternate sensor means for generating a signal that is indicative of a flow rate of material shunted through a bypass path and to return the material back to the flow path;an outside sensor means for measuring the flow of material received from the flow path; anda mass flow controller means for comparing a signal from the outside sensor means with the signals from the primary sensor means or secondary sensor means to determine that at least one of the primary or secondary sensor means is malfunctioning. 12. The apparatus of claim 11, wherein the mass flow controller means for generating at least one signal is based on a difference in flow rates between an actual flow rate and an indicated flow rate. 13. The apparatus of claim 11, wherein the mass flow controller means is generating an alarm signal that the actual flow rate and the indicated flow rates are out of preset parameter boundary. 14. The apparatus of claim 11, wherein the secondary sensor means is a temperature sensor that is configured to measure a change in temperature of the material flowing through the flow path. 15. The apparatus of claim 11, wherein the primary sensor means is a pressure sensor that is configured to measure a change in pressure of the material flowing through the flow path.
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