초록 ▼

An improved vaporizer for vaporizing a liquid precursor is provided. The vaporizer may include one or more channels with a relatively large wall-area-to-cross-sectional-flow-area ratio and may be equipped with one or more heater elements configured to heat the channels above the vaporization tempera

An improved vaporizer for vaporizing a liquid precursor is provided. The vaporizer may include one or more channels with a relatively large wall-area-to-cross-sectional-flow-area ratio and may be equipped with one or more heater elements configured to heat the channels above the vaporization temperature of the precursor. At least some of the channels may be heated above the vaporization temperature but below the Leidenfrost temperature of the precursor. In some implementations, a carrier gas may be introduced at high speed in a direction generally transverse to the precursor flow to mechanically shear the precursor into droplets. Multiple vaporizers may be ganged together in series to achieve complete vaporization, if necessary. The vaporizers may be easily disassembleable for cleaning and maintenance.

대표청구항 ▼

1. An apparatus comprising: a first vaporizer plate that is nominally planar, the first vaporizer plate including: a first side,a second side that is opposite the first side, anda plurality of first holes that extend through the first vaporizer plate;a plurality of first radial spoke channels bounde

1. An apparatus comprising: a first vaporizer plate that is nominally planar, the first vaporizer plate including: a first side,a second side that is opposite the first side, anda plurality of first holes that extend through the first vaporizer plate;a plurality of first radial spoke channels bounded at least in part by the first side;a plurality of second radial spoke channels bounded at least in part by the second side;a first inlet area bounded at least in part by the first side; anda first outlet area bounded at least in part by the second side, wherein: the plurality of first holes are arranged in a radial pattern around the first inlet area and around the first outlet area, and are offset from the first inlet area and the first outlet area in a direction parallel to the first side,a majority of the first vaporizer plate is interposed between the first inlet area and first outlet area,each first radial spoke channel extends outward from the first inlet area to a corresponding first hole such that each of the first radial spoke channels fluidically connects the first inlet area to one of the first holes,each second radial spoke channel extends outward from the first outlet area to a corresponding the first hole such that each of the second radial spoke channels fluidically connects the first outlet area to one of the first holes, andeach first hole fluidically connects one first radial spoke channel with one second radial spoke channel. 2. The apparatus of claim 1, further comprising a first heating assembly that includes: a first heating platen that is in thermally-conductive contact with the first side of the first vaporizer plate, anda first heating element configured to heat the first heating platen. 3. The apparatus of claim 2, wherein the first heating element is a heating plate in thermally-conductive contact with the first heating platen. 4. The apparatus of claim 2, wherein: the first heating platen further includes a platen inlet hole, andthe platen inlet hole is fluidically connected with the first inlet area. 5. The apparatus of claim 2, further comprising a second heating assembly that includes: a second heating platen that is in thermally-conductive contact with the second side of the first vaporizer plate, anda second heating element configured to heat the second heating platen, wherein the first vaporizer plate is interposed between the first heating platen and the second heating platen. 6. The apparatus of claim 5, wherein: the second heating platen further includes a platen outlet hole; andthe platen outlet hole is fluidically connected with the first outlet area. 7. The apparatus of claim 1, wherein the first vaporizer plate is an assembly that includes a heating element between the first side and the second side. 8. The apparatus of claim 1, further comprising one or more carrier gas injector flow channels, wherein: each of the carrier gas injector flow channels includes a carrier gas injector flow channel first end and a carrier gas injector flow channel second end;each of the carrier gas injector flow channels is configured to flow a carrier gas; andeach of the carrier gas injector flow channel second ends terminates into one of the first radial spoke channels, one of the second radial spoke channels, or one of the first holes. 9. The apparatus of claim 8, further comprising a carrier gas injector, the carrier gas injector configured to inject carrier gas into the one or more carrier gas injector flow channels. 10. The apparatus of claim 1, further comprising: one or more gas injector flow channels, each gas injector flow channel configured to flow carrier gas into one of the first holes in a direction having a component normal to the first side. 11. The apparatus of claim 10, further comprising: a gas plenum; anda gas inlet, wherein: the gas plenum fluidically connects the gas inlet with the one or more gas injector flow channels, andthe gas inlet is configured to be fluidically connected with a gas supply. 12. The apparatus of claim 1, wherein each of the one or more first channels has a length to a major cross-sectional width of at least 10:1. 13. The apparatus of claim 12, wherein each of the one or more second channels has a length to a major cross-sectional width of at least 10:1. 14. The apparatus of claim 1, wherein: the length of each of the first radial spoke channels are equal; andthe length of each of the second radial spoke channels are equal. 15. The apparatus of claim 1, further comprising: a second vaporizer plate that is nominally planar, the second vaporizer plate including: a third side,a fourth side that is opposite the third side, anda plurality of second holes that extend through the second vaporizer plate;a plurality of third channels bounded at least in part by the third side;a plurality of fourth channels bounded at least in part by the fourth side; a second inlet area that is bounded at least in part by the third side and that is fluidically connected to the first outlet area;a second outlet area bounded at least in part by the second side, wherein: the plurality of second holes are arranged in a radial pattern around the second inlet area and around the second outlet area, and are offset from the second inlet area and the second outlet area in a direction parallel to the third side,a majority of the second vaporizer plate is interposed between the second inlet area and second outlet area,each third radial spoke channel extends outward from the second inlet area to a corresponding second hole such that such that each of the third radial spoke channels fluidically connects the second inlet area to one of the second holes,each fourth radial spoke channel extends outward from the second outlet area to a corresponding second hole such that each of the fourth radial spoke channels fluidically connects the second outlet area to one of the second holes, andeach second hole fluidically connects one third radial spoke channel with one fourth radial spoke channel. 16. The apparatus of claim 15, further comprising a couple, the couple fluidly connecting the first outlet area with the second inlet area. 17. The apparatus of claim 16, wherein the couple further comprises a couple heater element thermally connected to the couple and configured to deliver heat to gas, fluid, or mixtures thereof that flow through the couple. 18. The apparatus of claim 1, wherein the apparatus includes between 12 and 36 first radial spoke channels.