Air-stable alkali or alkaline-earth metal dispensers
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B65D-081/22
H01J-007/20
H01J-007/18
출원번호
US-0526307
(2008-02-12)
등록번호
US-10109446
(2018-10-23)
우선권정보
IT-MI2007A0301 (2007-02-16)
국제출원번호
PCT/IB2008/000307
(2008-02-12)
§371/§102 date
20090807
(20090807)
국제공개번호
WO2008/099256
(2008-08-21)
발명자
/ 주소
Longoni, Giorgio
Amiotti, Marco
출원인 / 주소
SAES GETTERS S.P.A.
대리인 / 주소
Steinfl + Bruno LLP
인용정보
피인용 횟수 :
0인용 특허 :
19
초록▼
There are described dispensers (10; 20; 30; 40; 50; 60) of alkali or alkaline-earth metals, comprising deposits of getter materials (13; 23; 33; 43; 53; 63) and alkali or alkaline-earth metal sources (12, 22; 32; 42; 53; 63), in which the sources of alkali or alkaline-earth metal are protected from
There are described dispensers (10; 20; 30; 40; 50; 60) of alkali or alkaline-earth metals, comprising deposits of getter materials (13; 23; 33; 43; 53; 63) and alkali or alkaline-earth metal sources (12, 22; 32; 42; 53; 63), in which the sources of alkali or alkaline-earth metal are protected from environmental gases by said deposits of getter materials.
대표청구항▼
1. A dispenser of an alkali or alkaline-earth metal stable to environmental gases, wherein the dispenser comprises a support carrying a deposit of a getter material and wherein the dispenser contains a deposit of an alkali or alkaline-earth metal and releases the alkali or alkaline-earth metal, and
1. A dispenser of an alkali or alkaline-earth metal stable to environmental gases, wherein the dispenser comprises a support carrying a deposit of a getter material and wherein the dispenser contains a deposit of an alkali or alkaline-earth metal and releases the alkali or alkaline-earth metal, and wherein the alkali or alkaline-earth metal is in a form of elemental metal in contact with and completely covered by said deposit of getter material, wherein the alkali or alkaline-earth metal is mechanically and chemically protected from the environment by being in contact with said deposit of getter material, and wherein said getter material is selected from the group consisting of hafnium, niobium, vanadium, titanium, zirconium, and titanium- and/or zirconium-based alloys with one or more elements selected from transition elements, Rare Earths and aluminum. 2. The dispenser according to claim 1, wherein the support comprises a material selected from the group consisting of metals, metal alloys, semiconductors, glasses and ceramic materials. 3. The dispenser according to claim 2, wherein said material is selected from the group consisting of kovar, silicon, germanium, silicon carbide, sapphire, quartz, glass, pyrex, indium phosphide and gallium arsenide. 4. The dispenser according to claim 1, wherein said alkali or alkaline-earth metal is selected from the group consisting of lithium, sodium, potassium, rubidium, cesium, magnesium, calcium, strontium and barium. 5. The dispenser according to claim 1, further comprising a barrier layer between said deposit of alkali or alkaline-earth metal and said support. 6. The dispenser according to claim 5, wherein said barrier layer comprises a material selected from the group consisting of tantalum, platinum, gold, combinations of these metals, titanium nitride, silicon nitride and a getter material. 7. The dispenser according to claim 1, wherein a thickness of said deposit of alkali or alkaline-earth metal is comprised between 1 and 100 nm. 8. The dispenser according to claim 7, wherein said thickness is comprised between 10 and 50 nm. 9. The dispenser according to claim 1, wherein a thickness of said deposit of getter material is comprised between 100 nm and 1 μm. 10. The dispenser according to claim 5, wherein said barrier layer has a thickness comprised between 100 nm and 1 μm. 11. The dispenser according to claim 5, wherein said deposit of getter material and said barrier layer have the same lateral dimensions. 12. The dispenser according to claim 5, wherein said deposit of alkali or alkaline-earth metal and said barrier layer have the same lateral dimensions. 13. The dispenser according to claim 1, wherein the getter material and its thickness are selected so that the getter material will fracture prior to deposition of the alkali or alkaline-earth metal. 14. The dispenser according to claim 4, wherein the alkali or alkaline-earth metal is cesium.
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이 특허에 인용된 특허 (19)
Van Der Marel Cornelis (Both of Eindhoven NLX) Smoorenburg Arnoldus D. J. (Both of Eindhoven NLX), Alkali metal vapor dispenser.
Ward Thomas H. (Bay Village OH) Costanzo Phillip A. (Parma OH) Pietrasz Vincent (Cleveland OH) Soeder Edmund J. (Parma Hts. OH), Getter assembly providing increased getter yield.
Hatterer Andre (Riedisheim FR) Oberlin Claude (Avon FR) Strobel Pierre (Mulhouse FR), Method of fabrication of an alloy containing an alkali metal and/or an alkaline-earth metal.
Boffito Claudio (Milan ITX) Barosi Aldo (Milan ITX) Figini Alessandro (Milan ITX), Non-evaporable ternary gettering alloy and method of use for the sorption of water, water vapor and other gases.
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