A vacuum pump comprises a vacuum exhaust section, the vacuum exhaust section including a stator, and a rotor having a rotor cylindrical section, the rotor cylindrical section discharging gas in cooperation with the stator, a suction port; a base; an exhaust port disposed on the base, wherein at leas
A vacuum pump comprises a vacuum exhaust section, the vacuum exhaust section including a stator, and a rotor having a rotor cylindrical section, the rotor cylindrical section discharging gas in cooperation with the stator, a suction port; a base; an exhaust port disposed on the base, wherein at least a part of the exhaust port faces an outer peripheral surface of the stator, and gas sucked through the suction port by the vacuum exhaust section is discharged through the exhaust port; and a conductance increasing function section formed on at least one of the outer peripheral surface of the stator and an inner peripheral surface of the base, the outer peripheral surface and the inner peripheral surface facing an exhaust path for gas discharged by the rotor cylindrical section and the stator leading to the exhaust port.
대표청구항▼
1. A vacuum pump comprising: a vacuum exhaust section, the vacuum exhaust section includinga drag pump including a stator and a rotor having a rotor cylindrical section, the rotor cylindrical section discharging gas in cooperation with the stator,a suction port;a base;an exhaust port disposed on the
1. A vacuum pump comprising: a vacuum exhaust section, the vacuum exhaust section includinga drag pump including a stator and a rotor having a rotor cylindrical section, the rotor cylindrical section discharging gas in cooperation with the stator,a suction port;a base;an exhaust port disposed on the base, wherein at least a part of the exhaust port faces an outer peripheral surface of the stator, and gas sucked through the suction port by the vacuum exhaust section is discharged through the exhaust port; whereina gap is formed between the outer peripheral surface of the stator and an inner peripheral surface of the base from a suction port side end portion of the exhaust port toward the suction port,an outer diameter of the stator is uniform so that a size of the gap measured radially between the outer peripheral surface of the stator and the inner peripheral surface of the base is uniform in a first area of the stator, the first area is from a side towards the suction port to an intermediate position in a rotor axial direction,the vacuum pump further comprises a conductance increasing function section formed on the outer peripheral surface of the stator in a second area of the stator, the second area is from the intermediate position to a side towards the exhaust port, the outer peripheral surface facing an exhaust path for gas discharged by the drag pump leading to the exhaust port, andthe conductance increasing function section has a configuration such that the outer diameter of the stator in the second area is smaller than the outer diameter of the stator in the first area. 2. The vacuum pump according to claim 1, wherein a shape of the outer peripheral surface of the stator allows a distance between the outer peripheral surface of the stator in a region facing the exhaust port and the inner peripheral surface of the base to be larger than a distance between the outer peripheral surface of the stator in a region located on the side toward the suction port and not facing the exhaust port and the inner peripheral surface of the base. 3. The vacuum pump according to claim 2, wherein the stator includes a tapered structure formed on the whole circumference of the second area of the stator from the region facing the exhaust port to a tip of the stator. 4. The vacuum pump according to claim 2, wherein the outer peripheral surface of the stator includes a large-diameter section formed in the first area and a small-diameter section formed in the second area, and the small-diameter section faces the exhaust port. 5. The vacuum pump according to claim 1, wherein an additional conductance increasing function section is formed on the inner peripheral surface of the base, and a groove recessed on the inner peripheral surface of the base is formed in a predetermined angle range in a circumferential direction including a region where the exhaust port is open. 6. The vacuum pump according to claim 1, wherein an annular groove is formed on a bottom surface of the base, the bottom surface facing the exhaust path. 7. The vacuum pump according to claim 1, wherein the entire exhaust port faces the outer peripheral surface of the stator.
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이 특허에 인용된 특허 (1)
Varennes, Nicolas; Dauvillier, Olivier, Fixing device for a vacuum pump.
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