[특허]Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists

Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	H01L-021/677 B65G-001/04
출원번호	US-0080590 (2013-11-14)
등록번호	US-10147627 (2018-12-04)
발명자 / 주소	Doherty, Brian J. Mariano, Thomas R. Sullivan, Robert P.
출원인 / 주소	Murata Machinery Ltd.
대리인 / 주소	Fish & Richardson P.C.
인용정보	피인용 횟수 : 0 인용 특허 : 104

초록 ▼

A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The AMHS includes an overhead hoist transport subsystem and at least one vertical carousel stocker having a plurality of storage bins. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route, which runs adjacent to the carousel stocker, thereby allowing the overhead hoist transport vehicle to access a WIP part directly from one of the storage bins. At least one of the storage bins includes a movable shelf operative to move laterally from a first position along the carousel path to a second position near the overhead hoist transport vehicle.

대표청구항 ▼

1. A method of operating an overhead hoist transport vehicle, the method comprising: extending a translating stage to carry an overhead hoist to at least one of a first position proximate to a load port and a second position proximate to a fixed shelf and moving the overhead hoist transport vehicle along a stationary overhead rail;from the at least one of the first position and the second position: vertically moving a gripper downward to at least one of a third position above the load port and a fourth position above the fixed shelf; andloading a material unit on at least one of the load port and the fixed shelf;wherein the load port is beneath the stationary overhead rail; andwherein fixed shelf is disposed lateral to the overhead rail;wherein the translating stage is configured to extend along a horizontal axis and move the overhead hoist to exterior positions on either side of a body of the overhead hoist transport vehicle and to retract the overhead hoist into the body of the overhead hoist transport vehicle;wherein the translating stage is further configured to pick and place a cassette pod on either side of the body of the overhead transport vehicle. 2. The method of claim 1, wherein the material unit comprises a cassette pod. 3. The method of claim 1, further comprising: retracting the gripper to a starting position after loading the material unit on the at least one of the load port and the fixed shelf. 4. The method of claim 1, wherein the load port is disposed on an integrated circuit chip manufacturing floor. 5. The method of claim 1, wherein loading the material unit comprises: placing the material unit on the fixed shelf by releasing the material unit from the gripper. 6. The method of claim 1, wherein loading the material unit comprises: placing the material unit on the load port by releasing the material unit from the gripper. 7. An overhead hoist transport vehicle comprising: a body;an overhead hoist that is configured for movement to at least one of a first position proximate to a load port and a second position proximate to a fixed shelf;a translating stage coupled to the overhead hoist and the body; anda gripper that is configured to be vertically moved downward from the at least one of the first position and the second position to at least one of a third position above the load port and a fourth position above the fixed shelf; andwherein the overhead hoist transport vehicle is configured to load a material unit on at least one of the load port and the fixed shelf;wherein the overhead hoist transport vehicle is configured to move beneath an overhead rail;wherein the load port is beneath the stationary overhead rail;wherein at least a portion of the fixed shelf is disposed lateral to the overhead rail; andwherein the translating stage is configured to extend along a horizontal axis and move the overhead hoist to exterior positions on either side of a body of the overhead hoist transport vehicle and to retract the overhead hoist into the body of the overhead hoist transport vehicle;wherein the translating stage is further configured to pick and place a cassette pod on either side of the body of the overhead transport vehicle. 8. The overhead hoist transport vehicle of claim 7, wherein the material unit comprises a cassette pod. 9. The overhead hoist transport vehicle of claim 7, wherein the overhead hoist transport vehicle is configured to perform operations comprising: retracting the gripper to a starting position after loading the material unit on the at least one of the load port and the fixed shelf. 10. The overhead hoist transport vehicle of claim 7, wherein the load port is disposed on an integrated circuit chip manufacturing floor. 11. The overhead hoist transport vehicle of claim 7, wherein the overhead hoist transport vehicle being configured to place the material unit on the fixed shelf by releasing the material unit from the gripper. 12. The overhead hoist transport vehicle of claim 7, wherein the overhead hoist transport vehicle being configured place the material unit on the load port by releasing the material unit from the gripper.

이 특허에 인용된 특허 (104)

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상세보기
Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
상세보기
Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
상세보기
Doherty, Brian J.; Mariano, Thomas R.; Sullivan, Robert P., Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists.
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IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
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메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

연합인증

Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists 원문보기

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연구과제 타임라인

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연합인증

Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists 원문보기

초록 ▼

대표청구항 ▼

연구과제 타임라인

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