In some embodiments, a maintenance apparatus is provided for maintaining semiconductor processing equipment. The maintenance apparatus has an articulated member having a first member with a handle engagement portion and a second member with a first tool engagement portion. The first member is rotati
In some embodiments, a maintenance apparatus is provided for maintaining semiconductor processing equipment. The maintenance apparatus has an articulated member having a first member with a handle engagement portion and a second member with a first tool engagement portion. The first member is rotationally coupled to the first member about an articulation axis. A first tool member in selective engagement with the first tool engagement portion of the second member.
대표청구항▼
1. A maintenance apparatus for maintaining semiconductor processing equipment, the maintenance apparatus comprising: a handle member comprising a blow-off device;an articulated member comprising: a first member having a handle engagement portion configured to selectively engage the handle member, wh
1. A maintenance apparatus for maintaining semiconductor processing equipment, the maintenance apparatus comprising: a handle member comprising a blow-off device;an articulated member comprising: a first member having a handle engagement portion configured to selectively engage the handle member, wherein the handle member is configured to provide a stream of fluid to at least the first member; anda second member having a first tool engagement portion, wherein the first member is rotationally coupled to the second member about an articulation axis; anda first tool member in selective engagement with the first tool engagement portion of the second member. 2. The maintenance apparatus of claim 1, wherein the handle engagement portion comprises a handle engagement hole defined in the first member, wherein the handle engagement hole has a handle engagement axis associated therewith, wherein the handle engagement axis is generally perpendicular to the articulation axis, and wherein the handle engagement hole is configured to accept a distal end of the handle member therein. 3. The maintenance apparatus of claim 2, wherein the handle engagement portion further comprises a threaded handle fastening hole and a threaded handle fastener, wherein the threaded handle fastening hole intersects the handle engagement hole, wherein the threaded handle fastener is configured to threadingly engage the threaded handle fastener hole and selectively intersect the handle engagement hole. 4. The maintenance apparatus of claim 3, wherein the threaded handle fastener is configured to selectively secure the distal end of the handle member to the first member. 5. The maintenance apparatus of claim 1, wherein the first tool member comprises one of a pick, a brush, a scraper, and a nozzle. 6. The maintenance apparatus of claim 1, wherein the first tool engagement portion comprises a first tool engagement hole defined in the second member, wherein the first tool engagement hole has a first tool engagement axis associated therewith, wherein the first tool engagement axis is generally perpendicular to the articulation axis, and wherein the first tool engagement hole is configured to accept a distal end of the first tool member therein. 7. The maintenance apparatus of claim 6, wherein the first tool engagement portion further comprises a first threaded tool fastening hole and a first threaded tool fastener, wherein the first threaded tool fastening hole intersects the first tool engagement hole, wherein the first threaded tool fastener is configured to threadingly engage the first threaded tool fastener hole and selectively intersect the first tool engagement hole, therein selectively securing the distal end of the first tool member to the second member. 8. The maintenance apparatus of claim 6, wherein the first tool member comprises an extension member and an engagement pin, wherein the engagement pin is in selective engagement with the first tool engagement portion of the second member, therein selectively operably coupling the extension member to the second member, and wherein the extension member comprises a second tool engagement hole defined therein, wherein the second tool engagement hole has a second tool engagement axis associated therewith, wherein the second tool engagement axis is offset from the first tool engagement axis, and wherein the second tool engagement hole of the extension member is configured to accept a distal end of a second tool member therein. 9. The maintenance apparatus of claim 8, wherein the second tool member comprises one of a pick, a brush, a scraper, and a nozzle. 10. The maintenance apparatus of claim 8, wherein the extension member further comprises a third tool engagement hole defined therein, wherein the third tool engagement hole has a third tool engagement axis associated therewith, wherein the third tool engagement axis is offset from the first tool engagement axis, and wherein the third tool engagement hole of the extension member is configured to accept a distal end of a third tool member therein. 11. The maintenance apparatus of claim 10, wherein the second tool member and third tool member are selected from a list comprising a pick, a brush, a scraper, and a nozzle. 12. The maintenance apparatus of claim 10, wherein the second tool engagement axis and third tool engagement axis are collinear. 13. The maintenance apparatus of claim 8, wherein the extension member comprises an engagement hole, wherein the engagement pin comprises a threaded portion configured to threadingly engage the engagement hole. 14. The maintenance apparatus of claim 1, wherein the first member is rotationally coupled to the second member via an articulation member operably coupled to the first member and second member. 15. The maintenance apparatus of claim 1, wherein the first tool member comprises a nozzle, wherein the blow-off device is further configured to provide the stream of fluid to at least the nozzle. 16. A maintenance apparatus for maintaining semiconductor processing equipment, the maintenance apparatus comprising: a handle member comprising a blow-off device;an articulated member comprising: a first member having a handle engagement portion comprising a handle engagement hole defined in the first member, wherein the handle engagement hole is configured to accept a distal end of the handle member therein, and wherein the handle member is configured to provide a stream of fluid to at least the first member;a second member having a first tool engagement portion comprising a first tool engagement hole defined in the second member, the first tool engagement hole having a first tool engagement axis associated therewith, wherein the first member is rotationally coupled to the second member about an articulation axis, wherein the first tool engagement axis is generally perpendicular to the articulation axis; anda first tool member, wherein the first tool engagement hole is configured to selectively engage a distal end of the first tool member therein. 17. The maintenance apparatus of claim 16, wherein the first tool member comprises an extension member and an engagement pin, wherein the engagement pin is in selective engagement with the first tool engagement portion of the second member, therein selectively operably coupling the extension member to the second member, and wherein the extension member comprises a second tool engagement hole defined therein, wherein the second tool engagement hole has a second tool engagement axis associated therewith, wherein the second tool engagement axis is offset from the first tool engagement axis, and wherein the second tool engagement hole of the extension member is configured to accept a distal end of a second tool member therein. 18. The maintenance apparatus of claim 17, wherein the second tool member and third tool member are selected from a list comprising a pick, a brush, a scraper, and a nozzle. 19. A maintenance apparatus for maintaining semiconductor processing equipment, the maintenance apparatus comprising: an articulated member comprising: a first member having a handle engagement portion comprising a handle engagement hole, a threaded handle fastening hole and a threaded handle fastener, wherein the handle engagement hole is configured to accept a distal end of a handle member therein, wherein the handle member comprises a blow-off device and wherein the threaded handle fastening hole intersects the handle engagement hole, wherein the threaded handle fastener is configured to threadingly engage the threaded handle fastener hole and selectively intersect the handle engagement hole, therein selectively securing the distal end of the handle member to the first member; anda second member having a first tool engagement portion comprising a first tool engagement hole, a first threaded tool fastening hole and a first threaded tool fastener, wherein the first threaded tool fastening hole intersects the first tool engagement hole, wherein the first member is rotationally coupled to the second member about an articulation axis; anda first tool member, wherein the first tool engagement hole is configured to selectively engage a distal end of the first tool member therein, wherein the first threaded tool fastener is configured to threadingly engage the first threaded tool fastener hole and selectively intersect the first tool engagement hole, therein selectively securing the distal end of the first tool member to the second member, and wherein the first tool member comprises a nozzle, and wherein the blow-off device is configured to provide a stream of fluid to the nozzle. 20. The maintenance apparatus of claim 19, wherein one or more of the first member and second member comprise a passage fluidly coupling the nozzle to the blow-off device.
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이 특허에 인용된 특허 (6)
Franklin Ronald D. (5266 L St. Sacramento CA 95819), Articulating positioning device for tools.
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