[특허]Systems and processes that singulate materials

Systems and processes that singulate materials 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	B23K-026/00 B23K-026/14 B23K-026/16 B23K-026/38 B23K-026/359 C03B-033/02 B23K-026/364 B23K-026/40 B23K-101/40 B23K-103/00
출원번호	US-0239323 (2011-09-21)
등록번호	US-10239160 (2019-03-26)
발명자 / 주소	Mielke, Michael Srinivas, Ramanujapuram A. Booth, Tim Wilbanks, Thor
출원인 / 주소	Coherent, Inc.
대리인 / 주소	Morrison & Foerster LLP
인용정보	피인용 횟수 : 0 인용 특허 : 251

초록 ▼

Systems and methods for material singulation. According to some embodiments, methods for material singulation may include applying a first laser output to the material, the first laser output causing a modification of a material property of the material when exposed to the first laser output; and applying a second laser output to the material that was exposed to the first laser output to cause singulation of the material in such a way that surfaces created by the singulation of the material are substantially free from defects.

대표청구항 ▼

1. A method for material singulation, the method comprising: focusing a first laser output from a first laser device to a depth within a material, the depth being located between a top surface of the material and a bottom surface of the material, the focused first laser output having a beam width in the material, the first laser output comprising ultrafast laser pulses having a duration less than or equal to 50 picoseconds, the first laser output having a wavelength selected from near-infrared and visible wavelengths;applying the focused first laser output to the material along a beam path, an electric field of the ultrafast lasers pulses in the focused first laser output causing rapid acceleration of electrons, the focused first laser output thereby causing a permanent change in refractive index, optical absorption, density, or mechanical stress of the material exposed to the focused first laser output while the material exposed to the focused first laser output remains in a solid phase; andsequentially applying a second laser output from a second laser device to the material along and directly adjacent to the beam path, the second laser output heating the material or generating an acoustic shockwave in the material, thereby separating the material along the beam path while reducing impartation of defects into the material, the second laser output having a beam width larger than the beam width of the focused first laser output, the second laser output having a higher average power and a lower peak power relative to the first laser output. 2. The method according to claim 1, wherein the ultrafast laser pulses of the first laser output have a duration less than or equal to about one picosecond. 3. The method according to claim 1, wherein the material exposed to the first laser output is modified by any of: separating molecular bonds in material lattice;geometrical reorientation of molecular constituents; andspatial movement of molecular species. 4. The method according to claim 1, wherein the second laser output heats the material and causes a discontinuous stress gradient in the material. 5. The method according to claim 1, wherein the second laser output comprises a wavelength selected from a range of three to fifty micrometers, inclusive. 6. The method according to claim 1, wherein the second laser output comprises a wavelength selected from a range of 0.78 to three micrometers, inclusive. 7. The method according to claim 1, wherein a laser pulse duration of the second laser output is greater than or equal to ten picoseconds. 8. The method according to claim 1, wherein the second laser output includes a continuous wave output. 9. The method according to claim 1, wherein the steps of applying the first laser output and applying the second laser output occur within a second. 10. The method of claim 1, wherein the applying the second laser output to the body that was exposed to the first laser output causes complete separation of the material into two or more pieces. 11. The method of claim 1, wherein the first laser output and the second laser output are performed by using a single motion control. 12. The method of claim 1, further comprising selectively adjusting an amount of electronic energy excitation by varying parameters of a laser device including a beam delivery speed and a beam energy level. 13. The method of claim 1, further comprising inspecting the material by applying a light. 14. The method of claim 1, wherein the second laser output comprises a wavelength in a range of 11 micrometers to 50 micrometers.

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Okumura,Hiroshi, Method of forming semiconductor thin-film and laser apparatus used therefore.
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Varming, Poul, Method of inducing refractive index structures in a micro-structured fiber, a micro-structured fiber and an article.
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Cheng, Chen-Hsiung; Liu, Xinbing, Method of laser milling using constant tool path algorithm.
상세보기
Li, Ming; Hogan, Daniel; Liu, Xinbing; Ishizuka, Makoto, Method of temporarily adjusting the index of refraction of ring resonator with precision laser micromachining.
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Liu, Xinbing; Cheng, Chen-Hsiung; Cronin, John; Edwards, Nancy; Rose, Christopher, Method of using a computer with a laser drilling system.
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Stephen A. Boppart ; Gary J. Tearney ; Brett E. Bouma ; Mark E. Brezinski ; James G. Fujimoto ; Eric A. Swanson, Methods and apparatus for forward-directed optical scanning instruments.
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Dagenais,Mario; Wilson,Stewart W; Yu,Anthony W.; Heim,Peter J. S., Methods and devices for amplifying optical signals using a depolarizer.
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Gomez, Sinue; Moore, Lisa Anne; Tsuda, Sergio, Methods for laser cutting articles from ion exchanged glass substrates.
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Li, Xinghua, Methods for laser scribing and separating glass substrates.
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Adams Wilmer L. (Fridley MN) Kidder Kenneth B. (Coon Rapids MN) Landis William R. (Bloomington MN), Microcomputer fuel burner control having safety interlock means.
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Wang,Yulun; Ghodoussi,Modjtaba; Uecker,Darrin; Wright,James; Mangaser,Amante; Mukherjee,Ranjan, Minimally invasive surgical training using robotics and telecollaboration.
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Shan Xuekang (Ipswich GB2), Mode-locked fibre ring laser stabilization.
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Abedin, Kazi Sarwar, Mode-locked laser apparatus.
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August ; Jr. John L. (Schenectady NY) Kukla Mark J. (Ballston Spa NY) Chernoch Joseph P. (Scotia NY), Modular slab assembly for a face-pumped laser.
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Wang, Yulun; Ghodoussi, Modjtaba; Uecker, Darrin; Wright, James; Mangaser, Amante, Modularity system for computer assisted surgery.
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Wang,Yulun; Jordan,Charles S.; Uecker,Darrin R., Multi-functional surgical control system and switching interface.
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Kensky E. Thomas (Miamisburg OH), Multi-system laser safety shutter controller.
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Miyake Charles I., Multifunction solid state laser system.
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Theodoras ; II James T. ; Nati ; Jr. Salvatore F., Multiple field of view detector with background cancellation.
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Delfyett Peter J. ; Shi Hong, Multiwavelength modelocked semiconductor diode laser.
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Masamitsu Haruna JP, Nanosecond gate spectroscopic diagnostic device.
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Efimov, Oleg, Narrow band transmitting-receiving telescope system.
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Bucholz, Richard D.; McDurmont, Leslie, Networking infrastructure for an operating room.
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Schwaiger Max (Ostermiething ATX) Rieder Heinz (St. Pantaleon ATX), Non-contacting measuring apparatus for measuring a displacement in dependence on the incidence of a laser beam on a lase.
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Dogariu, Aristide, Non-invasive method and low-coherence apparatus system analysis and process control.
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Madey John M. J. (2120 Amherst St. Palo Alto CA 94306) Benson Stephen V. (624 Leksich Ave. Mountain View CA 94041) Schultz John F. (3834 Nimitz St. Eau Claire WI 54701) Cutolo Antonello (Via Claudio , Non-linear intractivity optical devices for free electron lasers.
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Pang Kian Tiong,SGX, Ocular microcirculation examination and treatment apparatus.
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Jonathan Drake GB; Barrie Flintham GB; Graeme A Henderson GB, Optical amplifier gain control.
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Gerrish, Kevin S.; Lelic, Muhidin, Optical amplifiers with a simple gain/output control device.
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Sakai,Yoshitsugu, Optical apparatus and laser display apparatus having laser beam scanner each.
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Nogiwa Seiji (Tokyo JPX) Aida Kazuo (Yokohama JPX) Nakagawa Kiyoshi (Miura-gun JPX), Optical fiber amplifier.
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Mikiya Suzuki JP; Sigeru Shikii JP, Optical fiber amplifier and a method for controlling the same.
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Bonnedal, Dag; Sandell, Johan; Forsberg, Gunnar, Optical fiber amplifier control.
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Goldberg, Lew; Le Flohic, Marc, Optical fiber amplifiers and lasers and optical pumping device therefor.
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Snitzer Elias (Wellesley MA) Po Hong (Sherborn MA) Tumminelli Richard P. (Ashland MA) Hakimi Farhad (Watertown MA), Optical fiber lasers and amplifiers.
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Maroney, Andrew V, Optical fibre monitoring system.
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Ortiz ; Jr. Angel L. (Scotia NY), Optical sensor safety system for monitoring laser crystals and optical components.
상세보기
Bendett Mark (Ann Arbor MI), Optical sensor utilizing rare-earth-doped integrated-optic lasers.
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Williams Guy L. (Yamhill OR) Jenness Timothy A. (Beaverton OR) Wilson Scott E. (Sherwood OR), Optical-scanning system employing laser and laser safety control.
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Dembeck Lars,DEX ; Schmitz Jorg,DEX ; Lach Eugen,DEX, Optically controlled optical switching module, method of optically controlling an optical switching network, and optica.
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Levinson,Frank H.; Farley,Mark, Optoelectronic device capable of participating in in-band traffic.
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Sun, Yunlong; Hainsey, Robert F.; Sun, Lei, Passivation processing over a memory link.
상세보기
Vogler, Klaus Wolfgang; Heist, Peter, Performance control system and method for gas discharge lasers.
상세보기
Temelkuran,Burak; Anastassiou,Charalambos; Torres,David; Shapira,Gil; Shurgalin,Max; Dellemann,Gregor; Weisberg,Ori; Jacobs,Steven A.; Wang,Tairan; Kolodny,Uri; Payne,Robert; Fink,Yoel; Ulu,Gokhan, Photonic crystal fibers and medical systems including photonic crystal fibers.
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Scalora, Michael; Bloemer, Mark J.; Centini, Marco; D'Aguanno, Giuseppe, Photonic signal frequency up and down-conversion using a photonic band gap structure.
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Hodgkinson Terence G. (Woodbridge GB2) Smith David W. (Woodbridge GB2), Polarization insensitive optical signal reception.
상세보기
Garnier Steven F. (Denver CO) Doran John (Littleton CO), Portable electronically controlled laser engraving machine.
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Stoltz, Richard; Bullington, Jeff, Portable optical ablation system.
상세보기
Pasciak Robert L. (Decatur TX), Positioning device and method.
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Runge Hartmut (Kirchseeon DEX), Process for gettering semiconductor components and integrated semiconductor circuits.
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Delfyett, Peter; Park, Eric; Croeze, Trino, Programmable multiwavelength modelocked laser.
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Axel Kneip DE; Ruediger von Elm DE, Pulsed diode-pumped solid-state laser.
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Niwano, Motoki; Sakanishi, Shoichi; Okamoto, Takeshi; Hayashi, Hideyuki; Tanaka, Hiroshi, Pulsed laser control system.
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O\Harra ; II Dale G. (Belmont CA), Pulsed laser system.
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Richardson, David J; Nilsson, Lars Johan Albinsson; Lefort, Laurent; Price, Jonathan Hugh Vaughan; Malinowski, Andrew; Ibsen, Morten, Pulsed light sources.
상세보기
Kennedy, John T.; Hart, Richard A.; Laughman, Lanny; Fontanella, Joel; Demaria, Anthony J.; Newman, Leon A.; Henschke, Robert, Q-switched cavity dumped CO2 laser for material processing.
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Galvanauskas Almantas ; Hariharan Anand ; Harter Donald J., Quasi-phase-matched parametric chirped pulse amplification systems.
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Galvanauskas Almantas ; Harter Donald ; Sucha Gregg, Quasi-phase-matched parametric chirped pulse amplification systems.
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Huang, Bin; Freeman, Abigail; Castro, Daniel; Gale, David C., Reduced temperature sterilization of stents.
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Gabl Edward F. (Saline MI) Walker David R. (Ann Arbor MI) Pang Yang (Ann Arbor MI), Regenerative amplifier incorporating a spectral filter within the resonant cavity.
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Gabl Edward F. (Saline MI) Walker David R. (Ann Arbor MI) Pang Yang (Ann Arbor MI), Regenerative amplifier incorporating a spectral filter within the resonant cavity.
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Egitto Frank D. (Binghamton) Moring Cynthia J. (Binghamton) Van Hart Daniel C. (Conklin NY), Removal of excimer laser debris using carbon dioxide laser.
상세보기
Jiang, Min; Harter, Donald J.; Sucha, Gregg D.; Fermann, Martin E., Resonant fabry-perot semiconductor saturable absorbers and two photon absorption power limiters.
상세보기
Hermann, Gerald F.; Leybzun, Mark S., Robotically operated laser head.
상세보기
Brockman Robert C. ; Eisler Paul ; Jander Ralph B., Safety interlocking system for an optical fiber amplifier and pump source.
상세보기
Edwards Stanley A. (Wallesey GB2) Hunt Robert (Orpington GB2) Lobb Daniel R. (Chislehurst GB2), Safety system for a laser-utility facility.
상세보기
Sucha Gregg D. ; Fermann Martin E. ; Harter Donald J., Scanning temporal ultrafast delay methods and apparatuses therefor.
상세보기
Lowery Arthur J. (Kew AUX) Tucker Rodney S. (Hawthorn AUX) Onodera Noriaki (Elsternwick AUX), Self-tuned mode-locked laser.
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Sone Haruo (Kanagawa JPX) Umezawa Isao (Kanagawa JPX) Yoneyama Osamu (Kanagawa JPX), Semiconductor laser chip.
상세보기
Shimada Kazuyuki (Tokyo JPX) Shibata Isamu (Fuchu JPX), Semiconductor laser control circuit.
상세보기
Cutler, Donald R., Simulated laser spot enlargement.
상세보기
Treacy Edmond B. (Richland WA), Single pulse injection locking.
상세보기
Ma Fred S. F. (Scarborough CAX) Kamasz Stacy R. (Waterloo CA CAX) Farrier Michael G. (Redwood Shores CA) Bendett Mark P. (Ann Arbor MI) Leonard Carl (Dexter MI), Split pixel interline transfer imaging device.
상세보기
Bauer James D. ; Laux Donald W., Surgeon's command and control.
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Scott, Bentley N.; Shortes, Samuel R., System and method for monitoring substances and reactions.
상세보기
Klug, Michael Anthony; Holzbach, Mark E., System and method for producing and displaying a one-step, edge-lit hologram.
상세보기
Liu, Xinbing, System and method of laser drilling using a continuously optimized depth of focus.
상세보기
Stummer, Alan D.; Friedrich, Lars, Systems and methods for detecting fault conditions and detecting and preventing potentially dangerous conditions in an optical system.
상세보기
Biocca, Frank; Rolland, Jannick P., Teleportal face-to-face system.
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Koh Wei H. (Irvine CA), Thin substrate micro-via interconnect.
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Delfyett, Peter J.; Yilmaz, Tolga; Depriest, Christopher M., Ultralow noise optical clock for high speed sampling applications.
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Neev Joseph ; Da Silva Luiz B. ; Matthews Dennis L. ; Glinsky Michael E. ; Stuart Brent C. ; Perry Michael D. ; Feit Michael D. ; Rubenchik Alexander M., Ultrashort pulse high repetition rate laser system for biological tissue processing.
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Aoshima Shinichiro,JPX ; Ito Haruyasu,JPX ; Tsuchiya Yutaka,JPX, Ultrashort pulse laser apparatus.
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Perry, Michael D.; Stuart, Brent C., Ultrashort pulse laser machining of metals and alloys.
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Ngoi, Bryan Kok Ann; Venkatakrishnan, Krishnan, Ultrashort pulsed laser micromachining/submicromachining using an acoustooptic scanning device with dispersion compensation.
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Hariharan Anand (Ann Armbor MI) Harter Donald J. (Ann Armbor MI), Ultrashort pulsewidth laser ranging system employing a time gate producing an autocorrelation and method therefore.
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Perry, Michael D., Ultrashort-pulse laser machining system employing a parametric amplifier.
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Galvanauskas, Almantas; Wong, Ka K.; Harter, Donald J., Ultrashort-pulse source with controllable multiple-wavelength output.
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Galvanauskas, Almantas; Arbore, Mark A.; Fejer, Martin M.; Harter, Donald J., Ultrashort-pulse source with controllable wavelength output.
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Baird,Brian W.; Wolfe,Michael J.; Harris,Richard S.; Fahey,Kevin P.; Zou,Lian Cheng; McNeil,Thomas R., Ultraviolet laser ablative patterning of microstructures in semiconductors.
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Galvanauskas Almantas ; Harter Donald J., Use of Chirped Quasi-phase-matched materials in chirped pulse amplification systems.
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Anderson Steven M. ; Chetlur Sundar S., Use of a getter layer to improve metal to metal contact resistance at low radio frequency power.
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Mead, Roy D.; Pierce, Jeffrey W., Use of multiple laser sources for rapid, flexible machining and production of vias in multi-layered substrates.
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Chin See Leang,CAX ; Naderi Nader,CAX ; Lagace Simon,CAX, Use of ultrafast intense laser for processing lignocellulosic material.
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Benjamin Robert F. (Los Alamos NM) Mitchell Kenneth B. (Los Alamos NM), Vacuum aperture isolator for retroreflection from laser-irradiated target.
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Li, Ming; Liu, Xinbing; Sakai, Hiroyuki; Nishijima, Masaaki; Ueda, Daisuke, Via hole machining for microwave monolithic integrated circuits.
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Wills Kendall S. (Farmers Branch TX) Rodriguez Paul A. (Lewisville TX) Brewer Melvin (Plano TX), Wafer scribe technique using laser by forming polysilicon.
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Moore Gregory Scott ; Rozelle David Michael ; Michal Ronald James, Wavelength stabilized laser light source.
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Mehuys David G. (Sunnyvale CA) Welch David F. (Menlo Park CA) Lang Robert J. (Pleasanton CA) Scifres Donald R. (San Jose CA), Wavelength-stabilized, high power semiconductor laser.
상세보기
Liu, Xinbing; Li, Ming; Cheng, Chen-Hsiung, Workpiece stabilization with gas flow.
상세보기

IPC	Description
A	생활필수품
A62	인명구조; 소방(사다리 E06C)
A62B	인명구조용의 기구, 장치 또는 방법(특히 의료용에 사용되는 밸브 A61M 39/00; 특히 물에서 쓰이는 인명구조 장치 또는 방법 B63C 9/00; 잠수장비 B63C 11/00; 특히 항공기에 쓰는 것, 예. 낙하산, 투출좌석 B64D; 특히 광산에서 쓰이는 구조장치 E21F 11/00)
A62B-1/08	.. 윈치 또는 풀리에 제동기구가 있는 것

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표IPC 관리번호, 국가코드, 자료구분, 상태, 출원번호, 출원일자, 공개번호, 공개일자, 공고번호, 공고일자, 등록번호, 등록일자, 발명명칭(한글), 발명명칭(영문), 출원인(한글), 출원인(영문), 출원인코드, 대표출원인, 출원인국적, 출원인주소, 발명자, 발명자E, 발명자코드, 발명자주소, 발명자 우편번호, 발명자국적, 대표IPC, IPC코드, 요약, 미국특허분류, 대리인주소, 대리인코드, 대리인(한글), 대리인(영문), 국제공개일자, 국제공개번호, 국제출원일자, 국제출원번호, 우선권, 우선권주장일, 우선권국가, 우선권출원번호, 원출원일자, 원출원번호, 지정국, Citing Patents, Cited Patents
저장형식	Text(ASCII format) Excel format PIAS분석(.xls)
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format

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