Abstract ▼

Ⅲ. Contents and Scope
1. Development of advanced instruments for optical measurements
◦ Polishing of reference flat and concave surfaces with 1.2 m and 1.5 m in diameter, respectively
◦ Gravity compensation of space aspheric mirror assembly
◦ Development of infrared laser interfer

Ⅲ. Contents and Scope
1. Development of advanced instruments for optical measurements
◦ Polishing of reference flat and concave surfaces with 1.2 m and 1.5 m in diameter, respectively
◦ Gravity compensation of space aspheric mirror assembly
◦ Development of infrared laser interferometer
◦ Development of silver coating technology for space optics
◦ Development of a high-speed and high-accuracy multichannel ellipsometer and software for analysis of nano pattered samples
◦ Analysis of optical constants of gold samples for nanobio technology
2. Development of advanced instruments using charged particles
◦ Development of UHV FE-gun, design of electron beam lens for SEM and TEM, image sensor for TEM
◦ Development of quadrupole mass filter for LCMS which shows assembly precision less than 0.002 mm and evaluation of RGA system and ion source by comparison with a commercial ion source
◦ Development of tungsten tip source for ion microscope
◦ Development of FESEM-based UHV chamber and measurement technique to image surface magnetic domain
◦ Development of core parts of the high temperature TR-holder to control and measure in the rang of high temperature
3. Development of advanced instruments using intelligent probes
◦ Development of cross-sectional AFM based on tungsten filament SEM and field emission SEM
◦ Development of fluorescence resonance energy transfer (FRET) device
◦ Development of short- and long-range scanner with nanoscale resolution and evaluation
◦ Synthesis of single-sized quantum dots, quatum dot-organic dye FRET pair construction, nanoscopic detection of FRET between biomolecules, and simultaneous measurements of near-field spectrum and molecular force

목차 Contents

• 표지 ... 1
• 제 출 문 ... 3
• 보고서 요약서 ... 5
• 요 약 문 ... 7
• SUMMARY ... 12
• CONTENTS ... 17
• 목 차 ... 18
• 제 1 장 연구개발 과제의 개요 ... 19
• 제 2 장 광학 측정장비 요소기술 개발 ... 22
• 제 1 절 대구경 비구면 광학계 평가기술 개발 ... 22
• 제 2 절 비등방성 시료 편광기반 나노측정 기술 ... 55
• 참고문헌 ... 82
• 제 3 장 하전입자 측정장비 요소기술 개발 ... 84
• 제 1 절 전자광학 요소기술 개발 ... 84
• 제 2 절 이온광학 요소기술 개발 ... 117
• 제 3 절 나노자성 이미징기술 개발 ... 134
• 제 4 절 정밀 시편이동 요소기술 개발 ... 155
• 참고문헌 ... 167
• 제 4 장 탐침 측정장비 요소기술 개발 ... 168
• 제 1 절 xAFM 개발 ... 168
• 제 2 절 생분자 분광 미세검출 요소기술 개발 (A) ... 188
• 제 3 절 분광이미징 핵심요소기술 개발 ... 197
• 제 4 절 생분자 분광 요소기술 개발 (B) ... 219
• 참고문헌 ... 228
• 제 5 장 결 론 ... 230