This thesis studies on the reliability of flatness measuring system using air bearing, LM Guide and fiber optics sensor. This work is to be carried out with the experiment after obtaining the one dimensional reference data using straightness edge to calibrate the LM guide. However, at the beginning ...
This thesis studies on the reliability of flatness measuring system using air bearing, LM Guide and fiber optics sensor. This work is to be carried out with the experiment after obtaining the one dimensional reference data using straightness edge to calibrate the LM guide. However, at the beginning of the test, a precision straightness edge was not found. And, in this study, a precision granite table is used for the calibration of the LM guide and air bearing. To measure the glass surface profile, a non contact fiber optics sensor was used, which moves on a LM guide in the x-axis and an air bering in the θ-axis. The experimental steps are as follows ; 1) Calibration of the fiber optics sensor using a precision LVDT which is to be a reference gage, and the gain value is to be used in the measured surface data 2) Measure the surface profile of a granite table which is as a reference plane 3) Measure the surface profile of a glass surface 4) Calculation of the reference plane from the each measured surface profile data, using the leasts square method, that is necessary to remove the inclined influence of the measuring surface 5) For the reference plane, actual three dimensional profile is calculated for each data, the granite table (Gr_data) and glass surface (Gl_data) 6) Finally, the flatness of the glass surface is calculated with subtracting the granite table data (Gr_data) from the glass surface profile data (Gl_data) The profile data was measured in 30mm steps in the x-axis (270mm full range) and 5 degree steps in the θ-axis (60 degree full range) of the polar coordinate. Using this experimental system, air bearing and LM guide with the fiber optics sensor, about ±10μm measuring accuracy is expected. Using the non contact sensor is necessary to protect the fragile surface measuring material, glass. However, there was a problem that the fiber optics sensor used in this test was not sensitive and the data measure was not reliable due to the rough glass surface, that seems to be the irregular reflection from the glass surface. To improve the measuring accuracy using this system, more precision reference table is required. Or, the surface error of the granite table could be calibrated from the measured data.
This thesis studies on the reliability of flatness measuring system using air bearing, LM Guide and fiber optics sensor. This work is to be carried out with the experiment after obtaining the one dimensional reference data using straightness edge to calibrate the LM guide. However, at the beginning of the test, a precision straightness edge was not found. And, in this study, a precision granite table is used for the calibration of the LM guide and air bearing. To measure the glass surface profile, a non contact fiber optics sensor was used, which moves on a LM guide in the x-axis and an air bering in the θ-axis. The experimental steps are as follows ; 1) Calibration of the fiber optics sensor using a precision LVDT which is to be a reference gage, and the gain value is to be used in the measured surface data 2) Measure the surface profile of a granite table which is as a reference plane 3) Measure the surface profile of a glass surface 4) Calculation of the reference plane from the each measured surface profile data, using the leasts square method, that is necessary to remove the inclined influence of the measuring surface 5) For the reference plane, actual three dimensional profile is calculated for each data, the granite table (Gr_data) and glass surface (Gl_data) 6) Finally, the flatness of the glass surface is calculated with subtracting the granite table data (Gr_data) from the glass surface profile data (Gl_data) The profile data was measured in 30mm steps in the x-axis (270mm full range) and 5 degree steps in the θ-axis (60 degree full range) of the polar coordinate. Using this experimental system, air bearing and LM guide with the fiber optics sensor, about ±10μm measuring accuracy is expected. Using the non contact sensor is necessary to protect the fragile surface measuring material, glass. However, there was a problem that the fiber optics sensor used in this test was not sensitive and the data measure was not reliable due to the rough glass surface, that seems to be the irregular reflection from the glass surface. To improve the measuring accuracy using this system, more precision reference table is required. Or, the surface error of the granite table could be calibrated from the measured data.
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