초록

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Abstract ▼ AI-Helper

A phase evil method and spectrum analysis were instrument error which is originated from measurement system and the form error of standard specimens. An instrument with a rotating table supported by an air bearing is calibrated using standard specimens. The phase of standard specimens was measured 1...

A phase evil method and spectrum analysis were instrument error which is originated from measurement system and the form error of standard specimens. An instrument with a rotating table supported by an air bearing is calibrated using standard specimens. The phase of standard specimens was measured 12 times on the rotating table with rotating 30 in turn and its measurement magnification was set by 100000 times. As a result of data analysis of all the observations, read out at each of 144 orientations(per 2.5) from recorded datafiles, the error of the performance of the instrument and those of the standard specimens are evaluated and a systematic deviation of the instrument is determined. In the particular instrument used in the present experiment, the deviation of the instrument is determined with the accuracy of 15nm and those of standard specimens with the accuracy of 23, 13 n, respectively. The reproducibility of the instrument is investigated, too. If the instrument is calibrated by using the above standard specimens, then the accuracy of the measurement of roundness error can be improved to about 15nm.

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