초록

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Abstract ▼ AI-Helper

Silicon alkoxides are used as a raw materials of silica fibers, coating films and fine ceramics. Specially, the alkoxides have been confirmed the best raw material for VLSI thin film of computors in recent years. Because, the impotance of silicon alkoxides are increasing more and more now a days. An...

Silicon alkoxides are used as a raw materials of silica fibers, coating films and fine ceramics. Specially, the alkoxides have been confirmed the best raw material for VLSI thin film of computors in recent years. Because, the impotance of silicon alkoxides are increasing more and more now a days. And so, in thls report the synthetic methods, reaction mechanism, application fields of silicon alkoxides are summerized. Also, the results of our research and technical problems of silicon alkoxide preparation are introduced briefly.