초록

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Abstract ▼ AI-Helper

The morphology variat~on of diamond thin films, grown by microwave plasma chem~cal vapor deposition, was investigated. With increasing substrate temperature from $550^{\circ}C$ to $750^{\circ}C$, the film morphology was changed from {111} to {100}, and then to cauliflower. The ...

The morphology variat~on of diamond thin films, grown by microwave plasma chem~cal vapor deposition, was investigated. With increasing substrate temperature from $550^{\circ}C$ to $750^{\circ}C$, the film morphology was changed from {111} to {100}, and then to cauliflower. The nondiamond components in the film increased with increasing temperature. Micro Raman spectrum suggested that the nondiamond components might exist along the boundaries of d~amond particles. The texture of diamond films, analyzed by X-ray diffraction, was varied from random orientation to , and finally to with increasing substrate temperature.