초록

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Abstract ▼ AI-Helper

The temperature difference occurs at the test points of chamber, because the traditional Test Handler consists of a heater and a fan. To reduce the temperature variation at different points in the chamber, we divided the heater to three parts which are controlled independently. First, we identified ...

The temperature difference occurs at the test points of chamber, because the traditional Test Handler consists of a heater and a fan. To reduce the temperature variation at different points in the chamber, we divided the heater to three parts which are controlled independently. First, we identified the chamber's parameter and then designed a LQG controllers by the identification model. RTD sensors and VME system were used to construct the temperature control system. In our experiment for the proposed control system, the temperature variation was reduced from ${\pm}1.5^{\circ}C$ to ${\pm}0.35^{\circ}C$ at 50$^{\circ}C$ ${\cdot}$ 80$^{\circ}C$ and 120$^{\circ}C$.