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NTIS 바로가기電子工學會論文誌. Journal of the Institute of Electronics Engineers of Korea. SD, 반도체, v.37 no.8 = no.278, 2000년, pp.17 - 27
이정철 (韓國에너지技術硏究所 代替에너지硏究部) , 송진수 (韓國에너지技術硏究所 代替에너지硏究部) , 박이준 (韓國에너지技術硏究所 代替에너지硏究部)
This paper presents deposition and characterization of hydrogenated microcrystalline silicon (
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