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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.19 no.9 = no.138, 2002년, pp.172 - 178
김민석 (한국과학기술원 기계공학과) , 김승우 (한국과학기술원 기계공학과)
One of the ever-increasing demands on the performances of heterodyne interferometers is to improve the measurement resolution, of which current state -of-the-art reaches the region of sub-nanometers. So far, the demand has been met by increasing the clock speed that drives the electronics involved f...
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