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NTIS 바로가기전기학회논문지. The transactions of the Korean Institute of Electrical Engineers. C/ C, 전기물성·응용부문, v.52 no.3, 2003년, pp.109 - 115
박창균 (한양대 전자전기제어계측공학과) , 장석모 (한양대 전자전기제어계측공학과) , 엄현석 (한양대 전자전기제어계측공학과) , 서수형 (한양대 무기재료공학과) , 박진석 (한양대 전자컴퓨터공학부)
Diamond-like carbon (DLC) films are deposited at room temperature using a filtered cathodic vacuum arc (FCVA) technique. The influence of negative bias voltage (applied to the substrate from 0 to -250V) on the
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