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센서학회지 = Journal of the Korean Sensors Society, v.13 no.2, 2004년, pp.101 - 109
고형호 (서울대학교 전기.컴퓨터공학부) , 김종팔 (서울대학교 전기.컴퓨터공학부) , 박상준 (서울대학교 전기.컴퓨터공학부) , 곽동훈 (서울대학교 전기.컴퓨터공학부) , 송태용 (서울대학교 전기.컴퓨터공학부) , 조동일 (서울대학교 전기.컴퓨터공학부) , 허건수 (한양대학교 기계공학부) , 박장현 (한양대학교 기계공학부)
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This paper presents a novel z-axis accelerometer with perfectly aligned vertical combs fabricated using the extended sacrificial bulk micromachining (extended SBM) process. The z-axis accelerometer is fabricated using only one (111) SOI wafer and two photo masks without wafer bonding or CMP processe...
J. Lee, Y. Ko, H. Jeong, B. Choi, I. Kim, and D. Jeon, 'SOl-Based Fabrication Processes of the Scanning Mirror Having Vertical Comb Fingers', Sensors and Actuators A, vol. 102, pp. 11-18, 2002
R.A. Conant, J.T. Nee, K.Y. Lau, and R.S. Muller, 'A Flat High-Frequency Scanning Micromirror', Tech. Dig. Solid-state Sensor and Actuator Workshop, pp. 6-13, 2000
A. Hanneborg, 'Silicon Wafer Bonding Techniques for Assembly of Micromechanical Elements', Micro Electro Mechanical Systems, pp. 92-98, 1991
J. Kim, S. Park, and D. Cho, 'A Novel Electrostatic Vertical Actuator Fabricated in One Homogeneous Silicon Wafer Using Extended SBM Technology', Transducers 2001, pp. 756-759, 2001
J. Kim, S. Park, and D. Cho, 'An Extended DoubleSBM Process for Vertical Actuation and Sensing Using One Single-crystalline Silicon Wafer', International MEMS Workshop 2001, pp. 291-298, 2001
J. Kim, S. Park, and D. Cho, 'A Novel Electrostatic Vertical Actuator Fabricated in One Homogeneous Silicon Wafer Using Extended SBM Technology', Sensors and Actuators A, pp. 653-658, 2002
A. Selvakumar, F. Ayazi, and K. Najafi, 'A High Sensitivity z-axis Torsional Silicon Accelerometer', The International Electron Devices Meeting 96, 1996
S. Lee, B. Lee, K. Jung, J. Choi, T. Chung, and Y. Cho, 'Extension of SurfacelBulk Micromachining: One-mask Fabrication Technology Enabling the Integration of 6-DOF Inertial Sensors on a Single Wafer', Transducers'OI, pp. 1136-1139,2001
D. Kwak,J. Kim, S. Park, H. Ko, and D. Cho, 'Why is (Ⅲ) Silicon a better Mechanical Material for MEMS: Torsion Case', 2003 ASME International Mechanical Engineering Congress, pp. 15-21,2003
S. Lee, S. Park, and D. Cho, 'The Surface/Bulk Micromachining (SBM) rocess: A New Method for Fabricating Released Microelectromechanical Systems in Single Crystal Silicon', IEEElASME JMEMS, vol. 8, pp. 409-416, 1999
D. Cho, S. Lee, and S. Park, 'SurfacelBulk Micromachined High Performance Silicon Micro-gyroscope', Hilton Head 2000, 2000
S. Lee, S. Park, J. Kim, S. Yi, and D. Cho, 'Surfacel Bulk Micromachined Single-crystalline Silicon Microgyroscope', IEEElASME JMEMS, vol. 8, no. 4, pp. 557-567, 2000
J. Kim, S. Park, D. Kwak, H. Ko, W. Carr, J. Buss, and D. Cho, 'Robust SOl Process without Footing for Ultra High-Performance Microgyroscopes', Transducers' 03, pp. 1691-1694,2003
S. Park, J. Kim, D. Kwak, H. Ko, D. Cho, W. Carr, and J. Buss, 'A New Isolation Method for Single Crystal Silicon MEMS and Its Application to Z-axis Microgyroscope', The Intemational Electron Devices Meeting 2003, Washington D.C., pp. 969-972, 2003
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