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NTIS 바로가기電子工學會論文誌. Journal of the Institute of Electronics Engineers of Korea. SD, 반도체, v.41 no.1 = no.319, 2004년, pp.15 - 20
The interfacial layer between the oxide film and the metal film according to RTP annealing temperature of metal film has been studied. Two types of oxides, BPSG and PETEOS, were used as a bottom layer under multi-layered metal films. We observed the interface between oxide and metal films using SEM ...
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M. Igarashi, A. Harada, H. Kawashima, N. Morimoto, Y. Kusumi, T. Saito, A. Ohsaki, T. Mori, T. Fukuda, Y. Toyonealing temperature of metal films.
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