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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.21 no.6 = no.159, 2004년, pp.153 - 159
박상후 (한국과학기술원 기계공학과 대학원) , 임태우 (한국과학기술원 기계공학과 대학) , 양동열 (한국과학기술원 기계공학) , 공홍진 (한국과학기술원 물리학과)
In this study, a new process to pattern directly on a thin metal layer using improved nano replication printing (nRP) process is suggested to evaluate the possibilities of fabricating a stamp for nano-imprinting. In the nRP process, any figure can be replicated from a bitmap figure file in the range...
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