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센서학회지 = Journal of the Korean Sensors Society, v.14 no.5, 2005년, pp.357 - 361
손영수 (대구경북과학기술연구원)
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Low-stress silicon nitride (LSN) thin films with embedded metal line have been developed as free standing structures to keep microspheres in proper locations and localized heat source for application to a chip-based sensor array for the simultaneous and near-real-time detection of multiple analytes ...
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