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NTIS 바로가기한국세라믹학회지 = Journal of the Korean Ceramic Society, v.42 no.5 = no.276, 2005년, pp.359 - 365
고철호 (경남대학교 대학원 재료공학과) , 김봉섭 (경남대학교 대학원 재료공학과) , 윤존도 (경남대학교 신소재공학부) , 김광호 (부산대학교 재료공학부)
Silicon nitride coating films with various ratios of nitrogen to silicon contents were prepared and characterized. The film was coated on silicon substrate by sputtering method with changing nitrogen gas flow rate in a chamber. The nitrogen to silicon ratio was found to have values in a range from 0...
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