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NTIS 바로가기열처리공학회지 = Journal of the Korean society for heat treatment, v.18 no.5, 2005년, pp.281 - 287
Titanium aluminium nitride((TiAl)N) film is anticipated as an advanced coating film with wear resistance used for drills, bites etc. and with corrosion resistance at a high temperature. In this study, (TiAl)N thin films were deposited both at room temperature and at elevated substrate temperatures o...
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