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NTIS 바로가기International journal of precision engineering and manufacturing, v.7 no.3, 2006년, pp.56 - 59
Shin Bo-Sung (ERC) , Kim Jae-Gu (Nanoprocess Group, Korea Institute of Machinery and Materials) , Chang Won-Suk (Nanoprocess Group, Korea Institute of Machinery and Materials) , Whang Kyung-Hyun (Nanoprocess Group, Korea Institute of Machinery and Materials)
UV laser micromachining is generally used to create microstructures for micro-products through a sequence of lithography-based photo-patterning steps. However, the micromachining process is not suitable for rapid realization of complex 3D micro-products because it depends on worker experience. In ad...
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