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고세장비 미세채널 기반의 마이크로 히트파이프 설계 및 제조

Design and Fabrication of a Micro-Heat Pipe with High-Aspect-Ratio Microchannels


The cooling capacity of a micro-heat pipe is mainly governed by the magnitude of capillary pressure induced in the wick structure. For microchannel wicks, a higher capillary pressure is achievable for narrower and deeper channels. In this study, a metallic micro-heat pipe adopting high-aspect-ratio microchannel wicks is fabricated. Micromachining of high-aspect-ratio microchannels is done using the laser-induced wet etching technique in which a focused laser beam irradiates the workpiece placed in a liquid etchant along a desired channel pattern. Because of the direct writing characteristic of the laser-induced wet etching method, no mask is necessary and the fabrication procedure is relatively simple. Deep microchannels of an aspect ratio close to 10 can be readily fabricated with little heat damage of the workpiece. The laser-induced wet etching process for the fabrication of high-aspect-ratio microchannels in 0.5mm thick stainless steel foil is presented in detail. The shape and size variations of microchannels with respect to the process variables, such as laser power, scanning speed, number of scans, and etchant concentration are closely examined. Also, the fabrication of a flat micro-heat pipe based on the high-aspect-ratio microchannels is demonstrated.

참고문헌 (16)

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  2. Moon, S. H., Hwang, G, Ko, S. C. and Kim, Y. T., 'Experimental study on the thermal performance of micro-heat pipe with cross-section of polygon,' Microelectronics Reliability, Vol. 44, pp. 315-321, 2004 
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  5. Hopkins, R., Faghri, A. and Khrustalev, D., 'Flat miniature heat pipes with micro capillary grooves,' Journal of Heat Transfer, Vol. 121, pp. 102-109, 1999 
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  7. Berre, M. L., Launay, S., Sartre, V. and Lallemand, M., 'Fabrication and experimental investigation of silicon micro heat pipes for cooling electronics,' Journal of Micromechanics and Microengineering, Vol. 13, pp. 436-441, 2003 
  8. Suh, J. S., Greif, R. and Grigoropoulos, C. P., 'Friction in micro-channel flows of a liquid and vapor in trapezoidal and sinusoidal grooves,' International Journal of Heat and Mass Transfer, Vol. 44, pp. 3103-3109,2001 
  9. Kim, S. J., Seo, J. K. and Do, K. H., 'Analytical and experimental investigation on the operational characteristics and the thermal optimization of a miniature heat pipe with a grooved wick structure,' International Journal of Heat and Mass Transfer, Vol. 46,pp.2051-2063, 2003 
  10. Gillot, C., Avenas, Y., Cezac, N., Poupon, G., Schaeffer, C. and Fournier, E., 'Silicon heat pipes used as thermal spreaders,' IEEE Transactions on Components and Packaging Technologies, Vol. 26, No. 2, pp. 332-339, 2003 
  11. Chi, S. W., 'Heat Pipe Theory and Practice, A Sourcebook,' Hemisphere Publishing Corporation, Chap. 1-2, 1976 
  12. Lu, Y. F. and Ye, K. D., 'Laser-induced etching of polycrystalline $Al_2O_3TiC$ in KOH aqueous solution,' Applied Physics A, Vol. 63, pp. 43-49, 1996 
  13. Nowak, R. and Metev, S., 'Thermochemical laser etching of stainless steel and titanium in liquids,' Applied Physics A, Vol. 63, pp. 133-138, 1996 
  14. Shin, Y. S., Son, S. W. and Jeong, S. H., 'Laserinduced thermochemical wet etching of titanium foil for fabrication of microstructures,' Journal of the Korean Society of Precision Engineering, Vol. 21, No. 4, pp. 32-38, 2004 
  15. Hussey, B. W., Haba, B. and Gupta, A., 'Role of bubbles in laser-assisted wet etching,' Applied Physics Letters, Vol. 58, No. 24, pp. 2851-2853, 1991 
  16. Son, S. W. and Jeong, S. H., 'Fabrication of metallic micro channels of high aspect ratio using laserassisted thermochemical wet etching,' Proceedings of the 23'd International Congress on Applications of Lasers and Electro-Optics (ICALEO 2004), Paper M303,2004 

이 논문을 인용한 문헌 (3)

  1. 2009. "" International journal of precision engineering and manufacturing, 10(3): 155~160 
  2. 2009. "" International journal of precision engineering and manufacturing, 10(4): 101~105 
  3. Jeong, Sung-Ho ; Lee, Seok-Hee 2011. "Effects of Process Parameters on Laser Ablation Based Machining and Measurements" 한국정밀공학회지 = Journal of the Korean Society of Precision Engineering, 28(12): 1359~1365 


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