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전기전자재료학회논문지 = Journal of the Korean institute of electronic material engineers, v.21 no.9, 2008년, pp.808 - 811
윤덕용 (성균관대학교 정보통신공학부) , 박용섭 (성균관대학교 정보통신공학부) , 최원석 (한밭대학교 전기공학과) , 홍병유 (성균관대학교 정보통신공학부)
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Optical and mechanical properties of diamond-like carbon (DLC) films synthesized by RF plasma enhanced chemical vapor deposition were investigated as a function the C/H ratio in gas mixture. The C/H ratio was varied from 6 to 10 %, adjusting the amount of
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