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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.26 no.6 = no.219, 2009년, pp.50 - 58
김상인 (고등기술연구원 로봇) , 김호상 (고등기술연구원 로봇)
Micro laser fabrication techniques can potentially be used for the manufacture of microstructures on the thin flat surfaces with large diameter that are frequently used in semiconductor industries. However, the large size of wafers can cause the degraded machining accuracy of the surface because it ...
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Li, C., Shi, X., Si, J., Chen, T., Chean, F., Liang, S., Wua, Z. and Hou, X., "Alcohol-assisted photoetching of silicon carbide with a femtosecond laser," Optics Communications, Vol. 282, No. 1, pp. 78-80, 2009
Kimura, S. and Wilson, T., "Confocal scanning optical microscope using single-mode fiber for signal detection," Applied Optics, Vol. 30, No. 16, pp. 2143-2150, 1991
Lin, Q., Bai, L., Xue, S. and Chen, L., "Autofocus system for Microscope," Optical Engineering, Vol. 41, No. 6, pp. 1289-1294, 2002
Lee, J. S., Sohn, Y. I., Park, K. Y. and Lee, K. D., "Development of intelligent filler wire feeding device for improvement of weld quality," Journal of the Korean Society of Precision Engineering, Vol. 23, No. 7, pp. 59-66, 2006
Yoo, H. K., Kang, D. K., Lee, S. W. and Gweon, D. G., "Error analysis and alignment tolerancing for confocal scanning microscope using Monte Carlomethod," J. of KSPE, Vol. 21, No. 2, pp. 92-99, 2004
Kang, Y. J., Song, D. H., Ryu, W. J. and Baik, S. H., "A study on the con-focal microscope for the surface measurements," Journal of the Korean Society ofPrecision Engineering, Vol. 20, No. 5, pp. 73-81, 2003
Kim, S. I., Lee, K. I., Kim, H. S. and Lee, K. D., "Autofocus system for off-line error compensation in micro laser fabrication process," Proceedings of KSPE Spring Conference, pp. 603-604, 2008
Neumann, B., Damon, A., Hogenkamo, D., Beckmann, E. and Kollmann, J., "A laser-autofocus for automatic microscopy and metrology," Sensors and Actuators, Vol. 17, No. 1-2, pp. 267-272, 1989
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