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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.26 no.8 = no.221, 2009년, pp.112 - 118
A pressure rise is generated while air bearing stages are moving in high vacuum environment. This study analyzed this pressure rise phenomenon theoretically and verified it experimentally using two different kinds of stages - linear and rotary air bearing stages. Results indicate that the pressure r...
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