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NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.27 no.8, 2010년, pp.84 - 90
한민희 (연세대학교 기계공학과) , 한진 (연세대학교 기계공학과) , 김태곤 (연세대학교 기계공학과) , 민병권 (연세대학교 기계공학과) , 이상조 (연세대학교 기계공학과)
In focused ion beam (FIB) fabrication processes the ion beam intensity with Gaussian profile has a drawback for high resolution machining. In this paper, the fabrication method to modify the beam profile at substrate using silt mask is proposed to increase the machining resolution at high current. S...
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