[논문]<tex>$NF_3$</tex>-와 <tex>$O_2$</tex> 리모트 플라즈마 노출에 따른 니트릴 가교 과불소고무와 과산화물 가교 과불소고무의 무게 손실과 모폴로지 특성

이경원; 김태호

doi:10.7317/pk.2011.35.2.136

[국내논문] $NF_3$-와 $O_2$ 리모트 플라즈마 노출에 따른 니트릴 가교 과불소고무와 과산화물 가교 과불소고무의 무게 손실과 모폴로지 특성
Weight Loss and Morphology of Nitrile Curable PFE and Peroxide Curable PFE after Exposing to $NF_3$ and $O_2$ Remote Plasmas 원문보기

폴리머 = Polymer (Korea), v.35 no.2, 2011년, pp.136 - 140

이경원 (성균관대학교 고분자시스템공학과) , 김태호 (성균관대학교 고분자시스템공학과)

초록
AI-Helper

니트릴 가교 과불소고무와 과산화물 가교 과불소고무의 내플라즈마 특성을 평가하기 위해 고온상태에서 $NF_3$, $O_2$ 리모트 플라즈마에 노출된 과불소 고무 재질의 오링(O-ring)에 대해 각각의 무게 손실 및 표면 특성을 확인하였다. 이를 위해 컴파운드는 반도체 및 LCD 생산라인에서 적용되고 있는 오링/씰 제조를 위한 전형적인 처방에 맞춰 설계하고 오픈 롤을 사용하여 혼련작업을 실시하였으며, 이후 열프레스로 작업한 후 오븐을 이용한 후가교 공정을 거쳐 최종 오링 형태로 제조하였다. 가교된 과불소고무 오링을 고온 플라즈마 환경에 노출시킨 후 무게 감량 및 표면 특성 변화를 전자 저울 및 주사전자현미경을 사용해 관찰하였다. 그 결과, 과불소고무의 가교타입, 필러 시스템, 플라즈마의 종류에 따라 무게 손실과 표면 상태의 변화가 상당한 수준으로 발생되는 것을 확인하였다.

Abstract ▼ AI-Helper

The plasma resistances of nitrile curable perfluoro elastomer (NT PFE) and peroxide curable PFE (PO PFE) after exposing to $NF_3$ and $O_2$ remote plasmas were investigated by analyzing weight loss and morphology of O-ring made of PFE. The compounds were designed following the typical formulations of O-ring/seal which were applied in semiconductor and LCD production site. They were blended by an open roll mill, and then, O-ring was finally made by hot press molding and oven curing. The weight loss was calculated and morphology was observed for each atmosphere and temperature by a digital weighing machine and SEM. As results, it was confirmed the weight loss and related morphology were meaningfully different according to the cure type of PFE, filler system, and the species of remote plasma.

주제어

AI 본문요약
AI-Helper

* AI 자동 식별 결과로 적합하지 않은 문장이 있을 수 있으니, 이용에 유의하시기 바랍니다.

문제 정의

Most of all, it is known that weight loss and particle generation ar샨 most important issues because they are directly related with the productivity in the production lin연. Therefore, this study focuses on the weight loss and surface change after harsh and intensive remote plasma treatment at high temperatures for simulating the environment of real production line.

제안 방법

In order to investigate the remote plasma resistance and temperature resistance of PFE, we evaluated the weight loss and carried out the surface analysis using SEM (scanning electron microscop순) after exposure in diverse gas and temperature conditions.
NT PFE 1 was just raw gums consisted of TFE (tetrafluoroethylene) and PMVE (perfluoro methyl vinyl ether), but NT PFE 2 contains originally fluorine fillers in it. The specimens were prepared by adding carbon black, silica, and BaSO₄ to make a compound, if needed, and then, it was blended using 8” roll mill and O-ring was made using hot press (1st cure) and hot oven (2nd cure). NT PFE O-ring was 1st cured at 180 ℃ for 10 min.

대상 데이터

The O-rings made of NT PFE (3M Dyneon PFE 131TX. and 132TBX) and peroxide cirable PFE (3M Dyneon PFE 80X) were prepared with their typical formulations and under processing conditions. Table 1 lists the materials evaluated in this experiment.

성능/효과

plasma, at 200 ℃ and 300 ℃. All specimens showed clean surface morphology at 200 ℃ even though it was exposed to O₂ remote plasma, especially NT1 natural was most excellent surface smoothness. But as the temperature was increased, the difference between specimen were evident.
By EDS analysis, we could find out the change of elements for each samples, that is, the amounts of oxygen elements were increased, however, the amounts of carbon and fluorine elements were decreased. As the propagation of crack is going on much, the loss of carbon and fluorine elaments were increased and it means plasma exposure at high temperature cause the dissociation of C~F bond, the degradation and oxidation for PFE products.
Test was performed for every specimens and some general observations can be made. It showed slight weight loss difference between each specimens at 200 ℃, but at 300 ℃, NT PFE showed excellent weight loss values compared to PO PFE and NT1 natural showed best performance. From this result, It can be inferred that NT PFE would b운 more effective product which can resists in harsh O₂ atmosphere.

참고문헌 (8)

A. L. Logothetis, Prog. Polym. Sci., 14, 293 (1989).
M. Apostolo and F. Triulzi, J. Fluorine Chem., 125, 303 (2004).

상세보기
S. Wang and J. M. Legare, J. Fluorine Chem., 122, 113 (2003).

상세보기
M. Heller and J. M. Legare, et al., J. Vacuum Sci. Technol., A17, 2119 (1999).
M. P. Easton and E. W. Fournier, et al., Polymer, 34, 1405 (1993).
A. Berman, Vacuum, 47, 329 (1996).
G. F. Weston, Vacuum, 34, 619 (1984).

상세보기
D. J. Jim and Y. B. Yun, et al., Microelectr. Eng., 84, 561 (2007).

내보내기 구분	파일저장 인쇄 메일전송
구성항목	기본정보 상세정보 관리번호, 논문명, 저널/프로시딩명, 저자 , 발행년, 권, 호, 시작페이지, 끝페이지, 발행기관 관리번호, 논문명, 대등논문명, 저자 , 저널/프로시딩명, 발행기관, 발행년, 발행언어, 권, 호, 시작페이지, 끝페이지, ISBN, ISSN, 주제분야, 키워드, 초록(한글), 초록(영문), 저자(소속기관)
저장형식	Text(ASCII format) Excel format RefWorks Direct Export RIS format (for Reference Manager, ProCite, EndNote), Scholar's Aids, Mendeley
메일정보	받는사람 (필수) @ 보내는사람 (선택) @ 제목 내용 KISTI 검색결과 이메일 서비스
안내	총 건의 자료가 검색되었습니다. 다운받으실 자료의 인덱스를 입력하세요. (1-10,000) 검색결과의 순서대로 최대 10,000건 까지 다운로드가 가능합니다. 데이타가 많을 경우 속도가 느려질 수 있습니다.(최대 2~3분 소요) 다운로드 파일은 UTF-8 형태로 저장됩니다. 파일의 내용이 제대로 보이지 않을실 때는 웹브라우저 상단의 보기 -> 인코딩 -> 자동선택 여부를 확인하십시오. ~ Text(ASCII format) Excel format