[논문]Progress in the co-evaporation technologies developed for high performance REBa2Cu3O7-δ films and coated conductors

Lee, J.W.; Yoo, S.I.

doi:10.9714/sac.2012.14.4.005

Progress in the co-evaporation technologies developed for high performance REBa2Cu3O7-δ films and coated conductors 원문보기

한국초전도·저온공학회논문지 = Superconductivity and cryogenics, v.14 no.4, 2012년, pp.5 - 11

Lee, J.W. (Department of Materials Science and Engineering, Research Institute of Advanced Materials (RIAM), Seoul National University) , Yoo, S.I. (Department of Materials Science and Engineering, Research Institute of Advanced Materials (RIAM), Seoul National University)

Abstract ▼ AI-Helper

In this review article, we focus on various co-evaporation technologies developed for the fabrication of high performance $REBa_2Cu_3O_{7-{\delta}}$ (RE: Y and Rare earth elements, REBCO) superconducting films. Compared with other manufacturing technologies for REBCO films such as sputtering, pulsed laser deposition (PLD), metal-organic deposition (MOD), and metal organic chemical vapor deposition (MOCVD), the co-evaporation method has a strong advantage of higher deposition rate because metal sources can be used as precursor materials. After the first attempt to produce REBCO films by the co-evaporation method in 1987, various co-evaporation technologies for high performance REBCO films have been developed during last several decades. The key points of each co-evaporation technology are reviewed in this article, which enables us to have a good insight into a new high throughput process, called as a Reactive Co-Evaporation by Deposition and Reaction (RCE-DR).

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제안 방법

[34]. In their work, various processing variables, including oxygen pressure, composition, substrate temperature, type and orientation of substrate, total thickness of film, and cooling procedure, were studied to investigate their effects on the YBCO films. They also found that in the case of deposition at low temperature, the c-axis lattice parameters of YBCO films were expanded in comparison with that of YBCO bulk.

대상 데이터

With the concept of the cyclic ex-situ process, a new batch-type facility, called as evaporation using drum in dual chamber (EDDC), was developed by KAIST and KERI groups [59-65]. This facility consisted of a dual chamber in which high oxygen pressure was set in upper part for conversion into REBCO films while low pressure was maintained in lower part for deposition of metal precursors by co-evaporation. In addition, a cylindrical holder with heating elements was located inside the chamber.

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용어 설명: PCR은 세균 특이성이 있는 primer를 이용하여 적은 수의 세균이 있을지라도 쉽게 검출할 수 있는 유용한 방법이며, 이를 이용하여 구강 내 치면세균막이나 타액에서 직접 세균을 검출할 수 있게 되었다[8].

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