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NTIS 바로가기한국지능시스템학회 논문지 = Journal of Korean institute of intelligent systems, v.22 no.6, 2012년, pp.694 - 699
구영모 (연성대학교 디지털전기과) , 이규호 (주식회사 에이앤아이)
In this paper, semiconductor package inspection results using white light interferometer with large F.O.V., in order to apply semiconductor product inspection process, are shown. Experimental 3D data repeatability test results for the same special bumps of each substrate are shown. Experimental 3D d...
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