[논문]Protective SiC Coating on Carbon Fibers by Low Pressure Chemical Vapor Deposition

Bae, Hyun Jeong; Kim, Baek Hyun; Kwon, Do-Kyun

doi:10.3740/mrsk.2013.23.12.702

[국내논문] Protective SiC Coating on Carbon Fibers by Low Pressure Chemical Vapor Deposition 원문보기

한국재료학회지 = Korean journal of materials research, v.23 no.12, 2013년, pp.702 - 707

Bae, Hyun Jeong (Department of materials Engineering, Korea Aerospace University) , Kim, Baek Hyun (Department of materials Engineering, Korea Aerospace University) , Kwon, Do-Kyun (Department of materials Engineering, Korea Aerospace University)

Abstract ▼ AI-Helper

High-quality ${\beta}$-silicon carbide (SiC) coatings are expected to prevent the oxidation degradation of carbon fibers in carbon fiber/silicon carbide (C/SiC) composites at high temperature. Uniform and dense ${\beta}$-SiC coatings were deposited on carbon fibers by low-pressure chemical vapor deposition (LP-CVD) using silane ($SiH_4$) and acetylene ($C_2H_2$) as source gases which were carried by hydrogen gas. SiC coating layers with nanometer scale microstructures were obtained by optimization of the processing parameters considering deposition mechanisms. The thickness and morphology of ${\beta}$-SiC coatings can be controlled by adjustment of the amount of source gas flow, the mean velocity of the gas flow, and deposition time. XRD and FE-SEM analyses showed that dense and crack-free ${\beta}$-SiC coating layers are crystallized in ${\beta}$-SiC structure with a thickness of around 2 micrometers depending on the processing parameters. The fine and dense microstructures with micrometer level thickness of the SiC coating layers are anticipated to effectively protect carbon fibers against the oxidation at high-temperatures.

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가설 설정

The fine and uniform microstructure of the both samples in Fig. 5(a) and (b) alludes that the deposition process in these conditions are still diffusion-limited. However, further reduction in boundary layer thickness may switch the process into reaction-limited process where the boundary layer diffusion plays a negligible role.

제안 방법

In the current work, we prepared two sets of LP-CVD SiC samples, which were deposited in tube reactors of different diameters, 130 mm (Ø 130) and 60 mm (Ø 60), respectively.

대상 데이터

Carbon fibers with a diameter of about 6-7 µm (C-520, Muhan composite, tensile modulus was 235 GPa, tensile strength was 4.354 GPa, density was 1.795 g/cm3) were used as substrates.

성능/효과

6(b). The results showed that the deposition time directly influenced to the thickness of the deposited layer without changing microstructure. The fine and dense microstructure with micrometer level thickness of the SiC coating layer is anticipated to effectively protect the carbon fiber against the oxidation in high temperature atmosphere.

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